10/25/2010	9:17:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	9:17:29 AM	Recipe started at 9:17 AM
10/25/2010	9:17:29 AM	H2 valve closed
10/25/2010	9:17:29 AM	BCl3 valve closed
10/25/2010	9:17:29 AM	PH3 valve closed
10/25/2010	9:17:29 AM	SiCl4 pre valve closed
10/25/2010	9:17:29 AM	SiCl4 post valve closed
10/25/2010	9:17:29 AM	Main Vac valve closed
10/25/2010	9:17:29 AM	Bypass valve closed
10/25/2010	9:17:29 AM	Bubbler valve closed
10/25/2010	9:17:29 AM	Helium valve opened
10/25/2010	9:17:29 AM	Helium MFC set to  500.000000
10/25/2010	9:17:29 AM	H2 MFC set to  0.000000
10/25/2010	9:17:29 AM	BCl3 MFC set to  0.000000
10/25/2010	9:17:29 AM	PHl3 MFC set to  0.000000
10/25/2010	9:17:29 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:17:29 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:17:29 AM	Tube furnace set to 0
10/25/2010	9:18:49 AM	Helium valve closed
10/25/2010	9:18:49 AM	H2 valve closed
10/25/2010	9:18:49 AM	BCl3 valve closed
10/25/2010	9:18:49 AM	PH3 valve closed
10/25/2010	9:18:49 AM	SiCl4 pre valve closed
10/25/2010	9:18:49 AM	SiCl4 post valve closed
10/25/2010	9:18:49 AM	Main Vac valve closed
10/25/2010	9:18:49 AM	Bypass valve closed
10/25/2010	9:18:49 AM	Bubbler valve closed
10/25/2010	9:18:49 AM	Helium MFC set to  0.000000
10/25/2010	9:18:49 AM	H2 MFC set to  0.000000
10/25/2010	9:18:49 AM	BCl3 MFC set to  0.000000
10/25/2010	9:18:49 AM	PHl3 MFC set to  0.000000
10/25/2010	9:18:49 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:18:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:18:49 AM	Tube furnace set to 0
10/25/2010	9:18:50 AM	Run finished at 9:18 AM
10/25/2010	9:18:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	9:26:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	9:26:12 AM	Recipe started at 9:26 AM
10/25/2010	9:26:12 AM	Helium valve closed
10/25/2010	9:26:12 AM	H2 valve closed
10/25/2010	9:26:12 AM	BCl3 valve closed
10/25/2010	9:26:12 AM	PH3 valve closed
10/25/2010	9:26:12 AM	SiCl4 pre valve closed
10/25/2010	9:26:12 AM	SiCl4 post valve closed
10/25/2010	9:26:12 AM	Main Vac valve closed
10/25/2010	9:26:12 AM	Bubbler valve closed
10/25/2010	9:26:12 AM	Bypass valve opened
10/25/2010	9:26:12 AM	Helium MFC set to  0.000000
10/25/2010	9:26:12 AM	H2 MFC set to  0.000000
10/25/2010	9:26:12 AM	BCl3 MFC set to  0.000000
10/25/2010	9:26:12 AM	PHl3 MFC set to  0.000000
10/25/2010	9:26:12 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:26:12 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:26:12 AM	Tube furnace set to 0
10/25/2010	9:27:02 AM	Helium valve closed
10/25/2010	9:27:02 AM	H2 valve closed
10/25/2010	9:27:02 AM	BCl3 valve closed
10/25/2010	9:27:02 AM	PH3 valve closed
10/25/2010	9:27:02 AM	SiCl4 pre valve closed
10/25/2010	9:27:02 AM	SiCl4 post valve closed
10/25/2010	9:27:02 AM	Bubbler valve closed
10/25/2010	9:27:02 AM	Main Vac valve opened
10/25/2010	9:27:02 AM	Bypass valve opened
10/25/2010	9:27:02 AM	Helium MFC set to  0.000000
10/25/2010	9:27:02 AM	H2 MFC set to  0.000000
10/25/2010	9:27:02 AM	BCl3 MFC set to  0.000000
10/25/2010	9:27:02 AM	PHl3 MFC set to  0.000000
10/25/2010	9:27:02 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:27:02 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:27:02 AM	Tube furnace set to 0
10/25/2010	9:27:02 AM	Run finished at 9:27 AM
10/25/2010	9:27:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	9:30:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	9:30:16 AM	Recipe started at 9:30 AM
10/25/2010	9:30:16 AM	Helium valve closed
10/25/2010	9:30:16 AM	H2 valve closed
10/25/2010	9:30:16 AM	BCl3 valve closed
10/25/2010	9:30:16 AM	PH3 valve closed
10/25/2010	9:30:16 AM	SiCl4 pre valve closed
10/25/2010	9:30:16 AM	SiCl4 post valve closed
10/25/2010	9:30:16 AM	Main Vac valve closed
10/25/2010	9:30:16 AM	Bubbler valve closed
10/25/2010	9:30:16 AM	Bypass valve opened
10/25/2010	9:30:16 AM	Helium MFC set to  0.000000
10/25/2010	9:30:16 AM	H2 MFC set to  0.000000
10/25/2010	9:30:16 AM	BCl3 MFC set to  0.000000
10/25/2010	9:30:16 AM	PHl3 MFC set to  0.000000
10/25/2010	9:30:16 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:30:16 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:30:17 AM	Tube furnace set to 0
10/25/2010	9:30:17 AM	Helium valve closed
10/25/2010	9:30:17 AM	H2 valve closed
10/25/2010	9:30:17 AM	BCl3 valve closed
10/25/2010	9:30:17 AM	PH3 valve closed
10/25/2010	9:30:17 AM	SiCl4 pre valve closed
10/25/2010	9:30:17 AM	SiCl4 post valve closed
10/25/2010	9:30:17 AM	Bubbler valve closed
10/25/2010	9:30:17 AM	Main Vac valve opened
10/25/2010	9:30:17 AM	Bypass valve opened
10/25/2010	9:30:17 AM	Helium MFC set to  0.000000
10/25/2010	9:30:17 AM	H2 MFC set to  0.000000
10/25/2010	9:30:17 AM	BCl3 MFC set to  0.000000
10/25/2010	9:30:17 AM	PHl3 MFC set to  0.000000
10/25/2010	9:30:17 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:30:17 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:30:17 AM	Tube furnace set to 0
10/25/2010	9:31:17 AM	H2 valve closed
10/25/2010	9:31:17 AM	BCl3 valve closed
10/25/2010	9:31:17 AM	PH3 valve closed
10/25/2010	9:31:17 AM	SiCl4 pre valve closed
10/25/2010	9:31:17 AM	SiCl4 post valve closed
10/25/2010	9:31:17 AM	Bubbler valve closed
10/25/2010	9:31:17 AM	Helium valve opened
10/25/2010	9:31:17 AM	Main Vac valve opened
10/25/2010	9:31:17 AM	Bypass valve opened
10/25/2010	9:31:17 AM	Helium MFC set to  100.000000
10/25/2010	9:31:17 AM	H2 MFC set to  0.000000
10/25/2010	9:31:17 AM	BCl3 MFC set to  0.000000
10/25/2010	9:31:17 AM	PHl3 MFC set to  0.000000
10/25/2010	9:31:17 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:31:17 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:31:17 AM	Tube furnace set to 0
10/25/2010	9:32:17 AM	Helium valve closed
10/25/2010	9:32:17 AM	H2 valve closed
10/25/2010	9:32:17 AM	BCl3 valve closed
10/25/2010	9:32:17 AM	PH3 valve closed
10/25/2010	9:32:17 AM	SiCl4 pre valve closed
10/25/2010	9:32:17 AM	SiCl4 post valve closed
10/25/2010	9:32:17 AM	Bubbler valve closed
10/25/2010	9:32:17 AM	Main Vac valve opened
10/25/2010	9:32:17 AM	Bypass valve opened
10/25/2010	9:32:17 AM	Helium MFC set to  0.000000
10/25/2010	9:32:17 AM	H2 MFC set to  0.000000
10/25/2010	9:32:17 AM	BCl3 MFC set to  0.000000
10/25/2010	9:32:17 AM	PHl3 MFC set to  0.000000
10/25/2010	9:32:17 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:32:17 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:32:17 AM	Tube furnace set to 0
10/25/2010	9:33:18 AM	H2 valve closed
10/25/2010	9:33:18 AM	BCl3 valve closed
10/25/2010	9:33:18 AM	PH3 valve closed
10/25/2010	9:33:18 AM	SiCl4 pre valve closed
10/25/2010	9:33:18 AM	SiCl4 post valve closed
10/25/2010	9:33:18 AM	Bubbler valve closed
10/25/2010	9:33:18 AM	Helium valve opened
10/25/2010	9:33:18 AM	Main Vac valve opened
10/25/2010	9:33:18 AM	Bypass valve opened
10/25/2010	9:33:18 AM	Helium MFC set to  100.000000
10/25/2010	9:33:18 AM	H2 MFC set to  0.000000
10/25/2010	9:33:18 AM	BCl3 MFC set to  0.000000
10/25/2010	9:33:18 AM	PHl3 MFC set to  0.000000
10/25/2010	9:33:18 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:33:18 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:33:18 AM	Tube furnace set to 0
10/25/2010	9:34:18 AM	Helium valve closed
10/25/2010	9:34:18 AM	H2 valve closed
10/25/2010	9:34:18 AM	BCl3 valve closed
10/25/2010	9:34:18 AM	PH3 valve closed
10/25/2010	9:34:18 AM	SiCl4 pre valve closed
10/25/2010	9:34:18 AM	SiCl4 post valve closed
10/25/2010	9:34:18 AM	Bubbler valve closed
10/25/2010	9:34:18 AM	Main Vac valve opened
10/25/2010	9:34:18 AM	Bypass valve opened
10/25/2010	9:34:18 AM	Helium MFC set to  0.000000
10/25/2010	9:34:18 AM	H2 MFC set to  0.000000
10/25/2010	9:34:18 AM	BCl3 MFC set to  0.000000
10/25/2010	9:34:18 AM	PHl3 MFC set to  0.000000
10/25/2010	9:34:18 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:34:18 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:34:18 AM	Tube furnace set to 0
10/25/2010	9:35:18 AM	H2 valve closed
10/25/2010	9:35:18 AM	BCl3 valve closed
10/25/2010	9:35:18 AM	PH3 valve closed
10/25/2010	9:35:18 AM	SiCl4 pre valve closed
10/25/2010	9:35:18 AM	SiCl4 post valve closed
10/25/2010	9:35:18 AM	Bubbler valve closed
10/25/2010	9:35:18 AM	Helium valve opened
10/25/2010	9:35:18 AM	Main Vac valve opened
10/25/2010	9:35:18 AM	Bypass valve opened
10/25/2010	9:35:18 AM	Helium MFC set to  100.000000
10/25/2010	9:35:18 AM	H2 MFC set to  0.000000
10/25/2010	9:35:18 AM	BCl3 MFC set to  0.000000
10/25/2010	9:35:18 AM	PHl3 MFC set to  0.000000
10/25/2010	9:35:18 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:35:18 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:35:18 AM	Tube furnace set to 0
10/25/2010	9:36:18 AM	Helium valve closed
10/25/2010	9:36:18 AM	H2 valve closed
10/25/2010	9:36:18 AM	BCl3 valve closed
10/25/2010	9:36:18 AM	PH3 valve closed
10/25/2010	9:36:18 AM	SiCl4 pre valve closed
10/25/2010	9:36:18 AM	SiCl4 post valve closed
10/25/2010	9:36:18 AM	Bubbler valve closed
10/25/2010	9:36:18 AM	Main Vac valve opened
10/25/2010	9:36:18 AM	Bypass valve opened
10/25/2010	9:36:18 AM	Helium MFC set to  0.000000
10/25/2010	9:36:18 AM	H2 MFC set to  0.000000
10/25/2010	9:36:18 AM	BCl3 MFC set to  0.000000
10/25/2010	9:36:18 AM	PHl3 MFC set to  0.000000
10/25/2010	9:36:18 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:36:18 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:36:18 AM	Tube furnace set to 0
10/25/2010	9:37:18 AM	H2 valve closed
10/25/2010	9:37:18 AM	BCl3 valve closed
10/25/2010	9:37:18 AM	PH3 valve closed
10/25/2010	9:37:18 AM	SiCl4 pre valve closed
10/25/2010	9:37:18 AM	SiCl4 post valve closed
10/25/2010	9:37:18 AM	Bubbler valve closed
10/25/2010	9:37:18 AM	Helium valve opened
10/25/2010	9:37:18 AM	Main Vac valve opened
10/25/2010	9:37:18 AM	Bypass valve opened
10/25/2010	9:37:18 AM	Helium MFC set to  100.000000
10/25/2010	9:37:18 AM	H2 MFC set to  0.000000
10/25/2010	9:37:18 AM	BCl3 MFC set to  0.000000
10/25/2010	9:37:18 AM	PHl3 MFC set to  0.000000
10/25/2010	9:37:18 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:37:18 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:37:18 AM	Tube furnace set to 0
10/25/2010	9:38:18 AM	Helium valve closed
10/25/2010	9:38:18 AM	H2 valve closed
10/25/2010	9:38:18 AM	BCl3 valve closed
10/25/2010	9:38:18 AM	PH3 valve closed
10/25/2010	9:38:18 AM	SiCl4 pre valve closed
10/25/2010	9:38:18 AM	SiCl4 post valve closed
10/25/2010	9:38:18 AM	Bubbler valve closed
10/25/2010	9:38:19 AM	Main Vac valve opened
10/25/2010	9:38:19 AM	Bypass valve opened
10/25/2010	9:38:19 AM	Helium MFC set to  0.000000
10/25/2010	9:38:19 AM	H2 MFC set to  0.000000
10/25/2010	9:38:19 AM	BCl3 MFC set to  0.000000
10/25/2010	9:38:19 AM	PHl3 MFC set to  0.000000
10/25/2010	9:38:19 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:38:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:38:19 AM	Tube furnace set to 0
10/25/2010	9:39:19 AM	H2 valve closed
10/25/2010	9:39:19 AM	BCl3 valve closed
10/25/2010	9:39:19 AM	PH3 valve closed
10/25/2010	9:39:19 AM	SiCl4 pre valve closed
10/25/2010	9:39:19 AM	SiCl4 post valve closed
10/25/2010	9:39:19 AM	Bubbler valve closed
10/25/2010	9:39:19 AM	Helium valve opened
10/25/2010	9:39:19 AM	Main Vac valve opened
10/25/2010	9:39:19 AM	Bypass valve opened
10/25/2010	9:39:19 AM	Helium MFC set to  100.000000
10/25/2010	9:39:19 AM	H2 MFC set to  0.000000
10/25/2010	9:39:19 AM	BCl3 MFC set to  0.000000
10/25/2010	9:39:19 AM	PHl3 MFC set to  0.000000
10/25/2010	9:39:19 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:39:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:39:19 AM	Tube furnace set to 0
10/25/2010	9:40:19 AM	Helium valve closed
10/25/2010	9:40:19 AM	H2 valve closed
10/25/2010	9:40:19 AM	BCl3 valve closed
10/25/2010	9:40:19 AM	PH3 valve closed
10/25/2010	9:40:19 AM	SiCl4 pre valve closed
10/25/2010	9:40:19 AM	SiCl4 post valve closed
10/25/2010	9:40:19 AM	Bubbler valve closed
10/25/2010	9:40:19 AM	Main Vac valve opened
10/25/2010	9:40:19 AM	Bypass valve opened
10/25/2010	9:40:19 AM	Helium MFC set to  0.000000
10/25/2010	9:40:19 AM	H2 MFC set to  0.000000
10/25/2010	9:40:19 AM	BCl3 MFC set to  0.000000
10/25/2010	9:40:19 AM	PHl3 MFC set to  0.000000
10/25/2010	9:40:19 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:40:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:40:19 AM	Tube furnace set to 0
10/25/2010	9:41:19 AM	H2 valve closed
10/25/2010	9:41:19 AM	BCl3 valve closed
10/25/2010	9:41:19 AM	PH3 valve closed
10/25/2010	9:41:19 AM	SiCl4 pre valve closed
10/25/2010	9:41:19 AM	SiCl4 post valve closed
10/25/2010	9:41:19 AM	Bubbler valve closed
10/25/2010	9:41:19 AM	Helium valve opened
10/25/2010	9:41:19 AM	Main Vac valve opened
10/25/2010	9:41:19 AM	Bypass valve opened
10/25/2010	9:41:19 AM	Helium MFC set to  100.000000
10/25/2010	9:41:19 AM	H2 MFC set to  0.000000
10/25/2010	9:41:19 AM	BCl3 MFC set to  0.000000
10/25/2010	9:41:19 AM	PHl3 MFC set to  0.000000
10/25/2010	9:41:19 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:41:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:41:19 AM	Tube furnace set to 0
10/25/2010	9:42:19 AM	Helium valve closed
10/25/2010	9:42:19 AM	H2 valve closed
10/25/2010	9:42:19 AM	BCl3 valve closed
10/25/2010	9:42:19 AM	PH3 valve closed
10/25/2010	9:42:19 AM	SiCl4 pre valve closed
10/25/2010	9:42:19 AM	SiCl4 post valve closed
10/25/2010	9:42:19 AM	Bubbler valve closed
10/25/2010	9:42:19 AM	Main Vac valve opened
10/25/2010	9:42:19 AM	Bypass valve opened
10/25/2010	9:42:19 AM	Helium MFC set to  0.000000
10/25/2010	9:42:19 AM	H2 MFC set to  0.000000
10/25/2010	9:42:19 AM	BCl3 MFC set to  0.000000
10/25/2010	9:42:19 AM	PHl3 MFC set to  0.000000
10/25/2010	9:42:19 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:42:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:42:19 AM	Tube furnace set to 0
10/25/2010	9:43:19 AM	H2 valve closed
10/25/2010	9:43:19 AM	BCl3 valve closed
10/25/2010	9:43:19 AM	PH3 valve closed
10/25/2010	9:43:19 AM	SiCl4 pre valve closed
10/25/2010	9:43:19 AM	SiCl4 post valve closed
10/25/2010	9:43:19 AM	Bubbler valve closed
10/25/2010	9:43:19 AM	Helium valve opened
10/25/2010	9:43:19 AM	Main Vac valve opened
10/25/2010	9:43:19 AM	Bypass valve opened
10/25/2010	9:43:19 AM	Helium MFC set to  100.000000
10/25/2010	9:43:19 AM	H2 MFC set to  0.000000
10/25/2010	9:43:19 AM	BCl3 MFC set to  0.000000
10/25/2010	9:43:20 AM	PHl3 MFC set to  0.000000
10/25/2010	9:43:20 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:43:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:43:20 AM	Tube furnace set to 0
10/25/2010	9:44:20 AM	Helium valve closed
10/25/2010	9:44:20 AM	H2 valve closed
10/25/2010	9:44:20 AM	BCl3 valve closed
10/25/2010	9:44:20 AM	PH3 valve closed
10/25/2010	9:44:20 AM	SiCl4 pre valve closed
10/25/2010	9:44:20 AM	SiCl4 post valve closed
10/25/2010	9:44:20 AM	Bubbler valve closed
10/25/2010	9:44:20 AM	Main Vac valve opened
10/25/2010	9:44:20 AM	Bypass valve opened
10/25/2010	9:44:20 AM	Helium MFC set to  0.000000
10/25/2010	9:44:20 AM	H2 MFC set to  0.000000
10/25/2010	9:44:20 AM	BCl3 MFC set to  0.000000
10/25/2010	9:44:20 AM	PHl3 MFC set to  0.000000
10/25/2010	9:44:20 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:44:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:44:20 AM	Tube furnace set to 0
10/25/2010	9:45:20 AM	H2 valve closed
10/25/2010	9:45:20 AM	BCl3 valve closed
10/25/2010	9:45:20 AM	PH3 valve closed
10/25/2010	9:45:20 AM	SiCl4 pre valve closed
10/25/2010	9:45:20 AM	SiCl4 post valve closed
10/25/2010	9:45:20 AM	Bubbler valve closed
10/25/2010	9:45:20 AM	Helium valve opened
10/25/2010	9:45:20 AM	Main Vac valve opened
10/25/2010	9:45:20 AM	Bypass valve opened
10/25/2010	9:45:20 AM	Helium MFC set to  100.000000
10/25/2010	9:45:20 AM	H2 MFC set to  0.000000
10/25/2010	9:45:20 AM	BCl3 MFC set to  0.000000
10/25/2010	9:45:20 AM	PHl3 MFC set to  0.000000
10/25/2010	9:45:20 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:45:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:45:20 AM	Tube furnace set to 0
10/25/2010	9:46:20 AM	Helium valve closed
10/25/2010	9:46:20 AM	H2 valve closed
10/25/2010	9:46:20 AM	BCl3 valve closed
10/25/2010	9:46:20 AM	PH3 valve closed
10/25/2010	9:46:20 AM	SiCl4 pre valve closed
10/25/2010	9:46:20 AM	SiCl4 post valve closed
10/25/2010	9:46:20 AM	Bubbler valve closed
10/25/2010	9:46:20 AM	Main Vac valve opened
10/25/2010	9:46:20 AM	Bypass valve opened
10/25/2010	9:46:20 AM	Helium MFC set to  0.000000
10/25/2010	9:46:20 AM	H2 MFC set to  0.000000
10/25/2010	9:46:20 AM	BCl3 MFC set to  0.000000
10/25/2010	9:46:20 AM	PHl3 MFC set to  0.000000
10/25/2010	9:46:20 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:46:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:46:20 AM	Tube furnace set to 0
10/25/2010	9:47:20 AM	H2 valve closed
10/25/2010	9:47:20 AM	BCl3 valve closed
10/25/2010	9:47:20 AM	PH3 valve closed
10/25/2010	9:47:20 AM	SiCl4 pre valve closed
10/25/2010	9:47:20 AM	SiCl4 post valve closed
10/25/2010	9:47:20 AM	Bubbler valve closed
10/25/2010	9:47:20 AM	Helium valve opened
10/25/2010	9:47:20 AM	Main Vac valve opened
10/25/2010	9:47:20 AM	Bypass valve opened
10/25/2010	9:47:20 AM	Helium MFC set to  100.000000
10/25/2010	9:47:20 AM	H2 MFC set to  0.000000
10/25/2010	9:47:20 AM	BCl3 MFC set to  0.000000
10/25/2010	9:47:20 AM	PHl3 MFC set to  0.000000
10/25/2010	9:47:20 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:47:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:47:20 AM	Tube furnace set to 0
10/25/2010	9:48:20 AM	Helium valve closed
10/25/2010	9:48:20 AM	H2 valve closed
10/25/2010	9:48:20 AM	BCl3 valve closed
10/25/2010	9:48:20 AM	PH3 valve closed
10/25/2010	9:48:20 AM	SiCl4 pre valve closed
10/25/2010	9:48:20 AM	SiCl4 post valve closed
10/25/2010	9:48:20 AM	Bubbler valve closed
10/25/2010	9:48:20 AM	Main Vac valve opened
10/25/2010	9:48:20 AM	Bypass valve opened
10/25/2010	9:48:20 AM	Helium MFC set to  0.000000
10/25/2010	9:48:20 AM	H2 MFC set to  0.000000
10/25/2010	9:48:20 AM	BCl3 MFC set to  0.000000
10/25/2010	9:48:20 AM	PHl3 MFC set to  0.000000
10/25/2010	9:48:20 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:48:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:48:21 AM	Tube furnace set to 0
10/25/2010	9:49:21 AM	H2 valve closed
10/25/2010	9:49:21 AM	BCl3 valve closed
10/25/2010	9:49:21 AM	PH3 valve closed
10/25/2010	9:49:21 AM	SiCl4 pre valve closed
10/25/2010	9:49:21 AM	SiCl4 post valve closed
10/25/2010	9:49:21 AM	Bubbler valve closed
10/25/2010	9:49:21 AM	Helium valve opened
10/25/2010	9:49:21 AM	Main Vac valve opened
10/25/2010	9:49:21 AM	Bypass valve opened
10/25/2010	9:49:21 AM	Helium MFC set to  100.000000
10/25/2010	9:49:21 AM	H2 MFC set to  0.000000
10/25/2010	9:49:21 AM	BCl3 MFC set to  0.000000
10/25/2010	9:49:21 AM	PHl3 MFC set to  0.000000
10/25/2010	9:49:21 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:49:21 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:49:21 AM	Tube furnace set to 0
10/25/2010	9:50:21 AM	Helium valve closed
10/25/2010	9:50:21 AM	H2 valve closed
10/25/2010	9:50:21 AM	BCl3 valve closed
10/25/2010	9:50:21 AM	PH3 valve closed
10/25/2010	9:50:21 AM	SiCl4 pre valve closed
10/25/2010	9:50:21 AM	SiCl4 post valve closed
10/25/2010	9:50:21 AM	Bubbler valve closed
10/25/2010	9:50:21 AM	Main Vac valve opened
10/25/2010	9:50:21 AM	Bypass valve opened
10/25/2010	9:50:21 AM	Helium MFC set to  0.000000
10/25/2010	9:50:21 AM	H2 MFC set to  0.000000
10/25/2010	9:50:21 AM	BCl3 MFC set to  0.000000
10/25/2010	9:50:21 AM	PHl3 MFC set to  0.000000
10/25/2010	9:50:21 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:50:21 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:50:21 AM	Tube furnace set to 0
10/25/2010	9:50:22 AM	Run finished at 9:50 AM
10/25/2010	9:50:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	9:53:24 AM	Main Vac valve closed
10/25/2010	9:53:25 AM	Bypass valve closed
10/25/2010	9:53:56 AM	Bypass valve opened
10/25/2010	9:53:56 AM	Main Vac valve opened
10/25/2010	9:54:34 AM	Recipe started at 9:54 AM
10/25/2010	9:54:34 AM	Helium valve closed
10/25/2010	9:54:34 AM	BCl3 valve closed
10/25/2010	9:54:34 AM	PH3 valve closed
10/25/2010	9:54:34 AM	SiCl4 pre valve closed
10/25/2010	9:54:34 AM	SiCl4 post valve closed
10/25/2010	9:54:34 AM	Main Vac valve closed
10/25/2010	9:54:34 AM	Bypass valve closed
10/25/2010	9:54:34 AM	Bubbler valve closed
10/25/2010	9:54:34 AM	H2 valve opened
10/25/2010	9:54:34 AM	Helium MFC set to  0.000000
10/25/2010	9:54:34 AM	H2 MFC set to  500.000000
10/25/2010	9:54:34 AM	BCl3 MFC set to  0.000000
10/25/2010	9:54:34 AM	PHl3 MFC set to  0.000000
10/25/2010	9:54:34 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:54:34 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:54:34 AM	Tube furnace set to 0
10/25/2010	9:55:57 AM	Helium valve closed
10/25/2010	9:55:57 AM	BCl3 valve closed
10/25/2010	9:55:57 AM	PH3 valve closed
10/25/2010	9:55:57 AM	SiCl4 pre valve closed
10/25/2010	9:55:57 AM	SiCl4 post valve closed
10/25/2010	9:55:57 AM	Main Vac valve closed
10/25/2010	9:55:57 AM	Bypass valve closed
10/25/2010	9:55:57 AM	H2 valve opened
10/25/2010	9:55:57 AM	Bubbler valve opened
10/25/2010	9:55:57 AM	Helium MFC set to  0.000000
10/25/2010	9:55:57 AM	H2 MFC set to  500.000000
10/25/2010	9:55:57 AM	BCl3 MFC set to  0.000000
10/25/2010	9:55:57 AM	PHl3 MFC set to  0.000000
10/25/2010	9:55:57 AM	SiCl4 MFC set to  0.000000
10/25/2010	9:55:57 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:55:57 AM	Tube furnace set to 1000
10/25/2010	10:05:57 AM	Helium valve closed
10/25/2010	10:05:57 AM	BCl3 valve closed
10/25/2010	10:05:57 AM	PH3 valve closed
10/25/2010	10:05:57 AM	Main Vac valve closed
10/25/2010	10:05:57 AM	Bypass valve closed
10/25/2010	10:05:57 AM	H2 valve opened
10/25/2010	10:05:57 AM	SiCl4 pre valve opened
10/25/2010	10:05:57 AM	SiCl4 post valve opened
10/25/2010	10:05:57 AM	Bubbler valve opened
10/25/2010	10:05:57 AM	Helium MFC set to  0.000000
10/25/2010	10:05:57 AM	H2 MFC set to  500.000000
10/25/2010	10:05:57 AM	BCl3 MFC set to  0.000000
10/25/2010	10:05:57 AM	PHl3 MFC set to  0.000000
10/25/2010	10:05:57 AM	SiCl4 MFC set to  50.000000
10/25/2010	10:05:57 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:05:57 AM	Tube furnace set to 1000
10/25/2010	10:05:58 AM	H2 valve closed
10/25/2010	10:05:58 AM	BCl3 valve closed
10/25/2010	10:05:58 AM	PH3 valve closed
10/25/2010	10:05:58 AM	SiCl4 pre valve closed
10/25/2010	10:05:58 AM	SiCl4 post valve closed
10/25/2010	10:05:58 AM	Main Vac valve closed
10/25/2010	10:05:58 AM	Bypass valve closed
10/25/2010	10:05:58 AM	Helium valve opened
10/25/2010	10:05:58 AM	Bubbler valve opened
10/25/2010	10:05:58 AM	Helium MFC set to  500.000000
10/25/2010	10:05:58 AM	H2 MFC set to  0.000000
10/25/2010	10:05:58 AM	BCl3 MFC set to  0.000000
10/25/2010	10:05:58 AM	PHl3 MFC set to  0.000000
10/25/2010	10:05:58 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:05:58 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:05:58 AM	Tube furnace set to 0
10/25/2010	10:15:58 AM	Helium valve closed
10/25/2010	10:15:58 AM	H2 valve closed
10/25/2010	10:15:58 AM	BCl3 valve closed
10/25/2010	10:15:58 AM	PH3 valve closed
10/25/2010	10:15:58 AM	SiCl4 pre valve closed
10/25/2010	10:15:58 AM	SiCl4 post valve closed
10/25/2010	10:15:58 AM	Main Vac valve closed
10/25/2010	10:15:58 AM	Bypass valve closed
10/25/2010	10:15:58 AM	Bubbler valve closed
10/25/2010	10:15:58 AM	Helium MFC set to  0.000000
10/25/2010	10:15:58 AM	H2 MFC set to  0.000000
10/25/2010	10:15:58 AM	BCl3 MFC set to  0.000000
10/25/2010	10:15:58 AM	PHl3 MFC set to  0.000000
10/25/2010	10:15:58 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:15:58 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:15:58 AM	Tube furnace set to 0
10/25/2010	10:15:58 AM	Run finished at 10:15 AM
10/25/2010	10:27:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	10:27:30 AM	Recipe started at 10:27 AM
10/25/2010	10:27:30 AM	H2 valve closed
10/25/2010	10:27:30 AM	BCl3 valve closed
10/25/2010	10:27:30 AM	PH3 valve closed
10/25/2010	10:27:30 AM	SiCl4 pre valve closed
10/25/2010	10:27:30 AM	SiCl4 post valve closed
10/25/2010	10:27:30 AM	Main Vac valve closed
10/25/2010	10:27:30 AM	Bypass valve closed
10/25/2010	10:27:30 AM	Bubbler valve closed
10/25/2010	10:27:30 AM	Helium valve opened
10/25/2010	10:27:30 AM	Helium MFC set to  500.000000
10/25/2010	10:27:30 AM	H2 MFC set to  0.000000
10/25/2010	10:27:30 AM	BCl3 MFC set to  0.000000
10/25/2010	10:27:30 AM	PHl3 MFC set to  0.000000
10/25/2010	10:27:30 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:27:30 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:27:30 AM	Tube furnace set to 0
10/25/2010	10:27:36 AM	Helium valve closed
10/25/2010	10:27:36 AM	H2 valve closed
10/25/2010	10:27:36 AM	BCl3 valve closed
10/25/2010	10:27:36 AM	PH3 valve closed
10/25/2010	10:27:36 AM	SiCl4 pre valve closed
10/25/2010	10:27:36 AM	SiCl4 post valve closed
10/25/2010	10:27:36 AM	Main Vac valve closed
10/25/2010	10:27:36 AM	Bypass valve closed
10/25/2010	10:27:36 AM	Bubbler valve closed
10/25/2010	10:27:36 AM	Helium MFC set to  0.000000
10/25/2010	10:27:36 AM	H2 MFC set to  0.000000
10/25/2010	10:27:36 AM	BCl3 MFC set to  0.000000
10/25/2010	10:27:36 AM	PHl3 MFC set to  0.000000
10/25/2010	10:27:36 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:27:36 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:27:36 AM	Tube furnace set to 0
10/25/2010	10:27:36 AM	Run finished at 10:27 AM
10/25/2010	10:27:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	10:33:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	10:33:31 AM	Recipe started at 10:33 AM
10/25/2010	10:33:31 AM	Helium valve closed
10/25/2010	10:33:31 AM	H2 valve closed
10/25/2010	10:33:31 AM	BCl3 valve closed
10/25/2010	10:33:31 AM	PH3 valve closed
10/25/2010	10:33:31 AM	SiCl4 pre valve closed
10/25/2010	10:33:31 AM	SiCl4 post valve closed
10/25/2010	10:33:31 AM	Main Vac valve closed
10/25/2010	10:33:31 AM	Bubbler valve closed
10/25/2010	10:33:32 AM	Bypass valve opened
10/25/2010	10:33:32 AM	Helium MFC set to  0.000000
10/25/2010	10:33:32 AM	H2 MFC set to  0.000000
10/25/2010	10:33:32 AM	BCl3 MFC set to  0.000000
10/25/2010	10:33:32 AM	PHl3 MFC set to  0.000000
10/25/2010	10:33:32 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:33:32 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:33:32 AM	Tube furnace set to 0
10/25/2010	10:34:20 AM	Helium valve closed
10/25/2010	10:34:20 AM	H2 valve closed
10/25/2010	10:34:20 AM	BCl3 valve closed
10/25/2010	10:34:20 AM	PH3 valve closed
10/25/2010	10:34:20 AM	SiCl4 pre valve closed
10/25/2010	10:34:20 AM	SiCl4 post valve closed
10/25/2010	10:34:20 AM	Bubbler valve closed
10/25/2010	10:34:20 AM	Main Vac valve opened
10/25/2010	10:34:20 AM	Bypass valve opened
10/25/2010	10:34:20 AM	Helium MFC set to  0.000000
10/25/2010	10:34:20 AM	H2 MFC set to  0.000000
10/25/2010	10:34:20 AM	BCl3 MFC set to  0.000000
10/25/2010	10:34:20 AM	PHl3 MFC set to  0.000000
10/25/2010	10:34:20 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:34:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:34:21 AM	Tube furnace set to 0
10/25/2010	10:34:21 AM	Run finished at 10:34 AM
10/25/2010	10:34:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	10:36:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	10:36:45 AM	Recipe started at 10:36 AM
10/25/2010	10:36:45 AM	Helium valve closed
10/25/2010	10:36:45 AM	H2 valve closed
10/25/2010	10:36:45 AM	BCl3 valve closed
10/25/2010	10:36:45 AM	PH3 valve closed
10/25/2010	10:36:45 AM	SiCl4 pre valve closed
10/25/2010	10:36:45 AM	SiCl4 post valve closed
10/25/2010	10:36:45 AM	Main Vac valve closed
10/25/2010	10:36:45 AM	Bubbler valve closed
10/25/2010	10:36:45 AM	Bypass valve opened
10/25/2010	10:36:45 AM	Helium MFC set to  0.000000
10/25/2010	10:36:45 AM	H2 MFC set to  0.000000
10/25/2010	10:36:45 AM	BCl3 MFC set to  0.000000
10/25/2010	10:36:45 AM	PHl3 MFC set to  0.000000
10/25/2010	10:36:45 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:36:45 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:36:45 AM	Tube furnace set to 0
10/25/2010	10:36:46 AM	Helium valve closed
10/25/2010	10:36:46 AM	H2 valve closed
10/25/2010	10:36:46 AM	BCl3 valve closed
10/25/2010	10:36:46 AM	PH3 valve closed
10/25/2010	10:36:46 AM	SiCl4 pre valve closed
10/25/2010	10:36:46 AM	SiCl4 post valve closed
10/25/2010	10:36:46 AM	Bubbler valve closed
10/25/2010	10:36:46 AM	Main Vac valve opened
10/25/2010	10:36:46 AM	Bypass valve opened
10/25/2010	10:36:46 AM	Helium MFC set to  0.000000
10/25/2010	10:36:46 AM	H2 MFC set to  0.000000
10/25/2010	10:36:46 AM	BCl3 MFC set to  0.000000
10/25/2010	10:36:46 AM	PHl3 MFC set to  0.000000
10/25/2010	10:36:46 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:36:46 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:36:46 AM	Tube furnace set to 0
10/25/2010	10:37:46 AM	H2 valve closed
10/25/2010	10:37:46 AM	BCl3 valve closed
10/25/2010	10:37:46 AM	PH3 valve closed
10/25/2010	10:37:46 AM	SiCl4 pre valve closed
10/25/2010	10:37:46 AM	SiCl4 post valve closed
10/25/2010	10:37:46 AM	Bubbler valve closed
10/25/2010	10:37:46 AM	Helium valve opened
10/25/2010	10:37:46 AM	Main Vac valve opened
10/25/2010	10:37:46 AM	Bypass valve opened
10/25/2010	10:37:46 AM	Helium MFC set to  100.000000
10/25/2010	10:37:46 AM	H2 MFC set to  0.000000
10/25/2010	10:37:46 AM	BCl3 MFC set to  0.000000
10/25/2010	10:37:46 AM	PHl3 MFC set to  0.000000
10/25/2010	10:37:46 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:37:46 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:37:46 AM	Tube furnace set to 0
10/25/2010	10:38:46 AM	Helium valve closed
10/25/2010	10:38:46 AM	H2 valve closed
10/25/2010	10:38:46 AM	BCl3 valve closed
10/25/2010	10:38:46 AM	PH3 valve closed
10/25/2010	10:38:46 AM	SiCl4 pre valve closed
10/25/2010	10:38:46 AM	SiCl4 post valve closed
10/25/2010	10:38:46 AM	Bubbler valve closed
10/25/2010	10:38:46 AM	Main Vac valve opened
10/25/2010	10:38:46 AM	Bypass valve opened
10/25/2010	10:38:46 AM	Helium MFC set to  0.000000
10/25/2010	10:38:46 AM	H2 MFC set to  0.000000
10/25/2010	10:38:46 AM	BCl3 MFC set to  0.000000
10/25/2010	10:38:46 AM	PHl3 MFC set to  0.000000
10/25/2010	10:38:46 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:38:46 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:38:46 AM	Tube furnace set to 0
10/25/2010	10:39:46 AM	H2 valve closed
10/25/2010	10:39:46 AM	BCl3 valve closed
10/25/2010	10:39:46 AM	PH3 valve closed
10/25/2010	10:39:46 AM	SiCl4 pre valve closed
10/25/2010	10:39:46 AM	SiCl4 post valve closed
10/25/2010	10:39:46 AM	Bubbler valve closed
10/25/2010	10:39:46 AM	Helium valve opened
10/25/2010	10:39:46 AM	Main Vac valve opened
10/25/2010	10:39:46 AM	Bypass valve opened
10/25/2010	10:39:46 AM	Helium MFC set to  100.000000
10/25/2010	10:39:46 AM	H2 MFC set to  0.000000
10/25/2010	10:39:46 AM	BCl3 MFC set to  0.000000
10/25/2010	10:39:46 AM	PHl3 MFC set to  0.000000
10/25/2010	10:39:46 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:39:46 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:39:46 AM	Tube furnace set to 0
10/25/2010	10:40:46 AM	Helium valve closed
10/25/2010	10:40:46 AM	H2 valve closed
10/25/2010	10:40:46 AM	BCl3 valve closed
10/25/2010	10:40:46 AM	PH3 valve closed
10/25/2010	10:40:46 AM	SiCl4 pre valve closed
10/25/2010	10:40:46 AM	SiCl4 post valve closed
10/25/2010	10:40:46 AM	Bubbler valve closed
10/25/2010	10:40:46 AM	Main Vac valve opened
10/25/2010	10:40:46 AM	Bypass valve opened
10/25/2010	10:40:46 AM	Helium MFC set to  0.000000
10/25/2010	10:40:46 AM	H2 MFC set to  0.000000
10/25/2010	10:40:46 AM	BCl3 MFC set to  0.000000
10/25/2010	10:40:46 AM	PHl3 MFC set to  0.000000
10/25/2010	10:40:46 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:40:46 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:40:47 AM	Tube furnace set to 0
10/25/2010	10:41:47 AM	H2 valve closed
10/25/2010	10:41:47 AM	BCl3 valve closed
10/25/2010	10:41:47 AM	PH3 valve closed
10/25/2010	10:41:47 AM	SiCl4 pre valve closed
10/25/2010	10:41:47 AM	SiCl4 post valve closed
10/25/2010	10:41:47 AM	Bubbler valve closed
10/25/2010	10:41:47 AM	Helium valve opened
10/25/2010	10:41:47 AM	Main Vac valve opened
10/25/2010	10:41:47 AM	Bypass valve opened
10/25/2010	10:41:47 AM	Helium MFC set to  100.000000
10/25/2010	10:41:47 AM	H2 MFC set to  0.000000
10/25/2010	10:41:47 AM	BCl3 MFC set to  0.000000
10/25/2010	10:41:47 AM	PHl3 MFC set to  0.000000
10/25/2010	10:41:47 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:41:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:41:47 AM	Tube furnace set to 0
10/25/2010	10:42:47 AM	Helium valve closed
10/25/2010	10:42:47 AM	H2 valve closed
10/25/2010	10:42:47 AM	BCl3 valve closed
10/25/2010	10:42:47 AM	PH3 valve closed
10/25/2010	10:42:47 AM	SiCl4 pre valve closed
10/25/2010	10:42:47 AM	SiCl4 post valve closed
10/25/2010	10:42:47 AM	Bubbler valve closed
10/25/2010	10:42:47 AM	Main Vac valve opened
10/25/2010	10:42:47 AM	Bypass valve opened
10/25/2010	10:42:47 AM	Helium MFC set to  0.000000
10/25/2010	10:42:47 AM	H2 MFC set to  0.000000
10/25/2010	10:42:47 AM	BCl3 MFC set to  0.000000
10/25/2010	10:42:47 AM	PHl3 MFC set to  0.000000
10/25/2010	10:42:47 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:42:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:42:47 AM	Tube furnace set to 0
10/25/2010	10:43:47 AM	H2 valve closed
10/25/2010	10:43:47 AM	BCl3 valve closed
10/25/2010	10:43:47 AM	PH3 valve closed
10/25/2010	10:43:47 AM	SiCl4 pre valve closed
10/25/2010	10:43:47 AM	SiCl4 post valve closed
10/25/2010	10:43:47 AM	Bubbler valve closed
10/25/2010	10:43:47 AM	Helium valve opened
10/25/2010	10:43:47 AM	Main Vac valve opened
10/25/2010	10:43:47 AM	Bypass valve opened
10/25/2010	10:43:47 AM	Helium MFC set to  100.000000
10/25/2010	10:43:47 AM	H2 MFC set to  0.000000
10/25/2010	10:43:47 AM	BCl3 MFC set to  0.000000
10/25/2010	10:43:47 AM	PHl3 MFC set to  0.000000
10/25/2010	10:43:47 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:43:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:43:47 AM	Tube furnace set to 0
10/25/2010	10:44:47 AM	Helium valve closed
10/25/2010	10:44:47 AM	H2 valve closed
10/25/2010	10:44:47 AM	BCl3 valve closed
10/25/2010	10:44:47 AM	PH3 valve closed
10/25/2010	10:44:47 AM	SiCl4 pre valve closed
10/25/2010	10:44:47 AM	SiCl4 post valve closed
10/25/2010	10:44:47 AM	Bubbler valve closed
10/25/2010	10:44:47 AM	Main Vac valve opened
10/25/2010	10:44:47 AM	Bypass valve opened
10/25/2010	10:44:47 AM	Helium MFC set to  0.000000
10/25/2010	10:44:47 AM	H2 MFC set to  0.000000
10/25/2010	10:44:47 AM	BCl3 MFC set to  0.000000
10/25/2010	10:44:47 AM	PHl3 MFC set to  0.000000
10/25/2010	10:44:47 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:44:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:44:47 AM	Tube furnace set to 0
10/25/2010	10:45:47 AM	H2 valve closed
10/25/2010	10:45:47 AM	BCl3 valve closed
10/25/2010	10:45:47 AM	PH3 valve closed
10/25/2010	10:45:47 AM	SiCl4 pre valve closed
10/25/2010	10:45:47 AM	SiCl4 post valve closed
10/25/2010	10:45:47 AM	Bubbler valve closed
10/25/2010	10:45:47 AM	Helium valve opened
10/25/2010	10:45:47 AM	Main Vac valve opened
10/25/2010	10:45:47 AM	Bypass valve opened
10/25/2010	10:45:47 AM	Helium MFC set to  100.000000
10/25/2010	10:45:47 AM	H2 MFC set to  0.000000
10/25/2010	10:45:47 AM	BCl3 MFC set to  0.000000
10/25/2010	10:45:47 AM	PHl3 MFC set to  0.000000
10/25/2010	10:45:47 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:45:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:45:48 AM	Tube furnace set to 0
10/25/2010	10:46:48 AM	Helium valve closed
10/25/2010	10:46:48 AM	H2 valve closed
10/25/2010	10:46:48 AM	BCl3 valve closed
10/25/2010	10:46:48 AM	PH3 valve closed
10/25/2010	10:46:48 AM	SiCl4 pre valve closed
10/25/2010	10:46:48 AM	SiCl4 post valve closed
10/25/2010	10:46:48 AM	Bubbler valve closed
10/25/2010	10:46:48 AM	Main Vac valve opened
10/25/2010	10:46:48 AM	Bypass valve opened
10/25/2010	10:46:48 AM	Helium MFC set to  0.000000
10/25/2010	10:46:48 AM	H2 MFC set to  0.000000
10/25/2010	10:46:48 AM	BCl3 MFC set to  0.000000
10/25/2010	10:46:48 AM	PHl3 MFC set to  0.000000
10/25/2010	10:46:48 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:46:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:46:48 AM	Tube furnace set to 0
10/25/2010	10:47:48 AM	H2 valve closed
10/25/2010	10:47:48 AM	BCl3 valve closed
10/25/2010	10:47:48 AM	PH3 valve closed
10/25/2010	10:47:48 AM	SiCl4 pre valve closed
10/25/2010	10:47:48 AM	SiCl4 post valve closed
10/25/2010	10:47:48 AM	Bubbler valve closed
10/25/2010	10:47:48 AM	Helium valve opened
10/25/2010	10:47:48 AM	Main Vac valve opened
10/25/2010	10:47:48 AM	Bypass valve opened
10/25/2010	10:47:48 AM	Helium MFC set to  100.000000
10/25/2010	10:47:48 AM	H2 MFC set to  0.000000
10/25/2010	10:47:48 AM	BCl3 MFC set to  0.000000
10/25/2010	10:47:48 AM	PHl3 MFC set to  0.000000
10/25/2010	10:47:48 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:47:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:47:48 AM	Tube furnace set to 0
10/25/2010	10:48:48 AM	Helium valve closed
10/25/2010	10:48:48 AM	H2 valve closed
10/25/2010	10:48:48 AM	BCl3 valve closed
10/25/2010	10:48:48 AM	PH3 valve closed
10/25/2010	10:48:48 AM	SiCl4 pre valve closed
10/25/2010	10:48:48 AM	SiCl4 post valve closed
10/25/2010	10:48:48 AM	Bubbler valve closed
10/25/2010	10:48:48 AM	Main Vac valve opened
10/25/2010	10:48:48 AM	Bypass valve opened
10/25/2010	10:48:48 AM	Helium MFC set to  0.000000
10/25/2010	10:48:48 AM	H2 MFC set to  0.000000
10/25/2010	10:48:48 AM	BCl3 MFC set to  0.000000
10/25/2010	10:48:48 AM	PHl3 MFC set to  0.000000
10/25/2010	10:48:48 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:48:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:48:48 AM	Tube furnace set to 0
10/25/2010	10:49:48 AM	H2 valve closed
10/25/2010	10:49:48 AM	BCl3 valve closed
10/25/2010	10:49:48 AM	PH3 valve closed
10/25/2010	10:49:48 AM	SiCl4 pre valve closed
10/25/2010	10:49:48 AM	SiCl4 post valve closed
10/25/2010	10:49:48 AM	Bubbler valve closed
10/25/2010	10:49:48 AM	Helium valve opened
10/25/2010	10:49:48 AM	Main Vac valve opened
10/25/2010	10:49:48 AM	Bypass valve opened
10/25/2010	10:49:48 AM	Helium MFC set to  100.000000
10/25/2010	10:49:48 AM	H2 MFC set to  0.000000
10/25/2010	10:49:48 AM	BCl3 MFC set to  0.000000
10/25/2010	10:49:48 AM	PHl3 MFC set to  0.000000
10/25/2010	10:49:48 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:49:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:49:48 AM	Tube furnace set to 0
10/25/2010	10:50:48 AM	Helium valve closed
10/25/2010	10:50:48 AM	H2 valve closed
10/25/2010	10:50:48 AM	BCl3 valve closed
10/25/2010	10:50:48 AM	PH3 valve closed
10/25/2010	10:50:48 AM	SiCl4 pre valve closed
10/25/2010	10:50:48 AM	SiCl4 post valve closed
10/25/2010	10:50:48 AM	Bubbler valve closed
10/25/2010	10:50:48 AM	Main Vac valve opened
10/25/2010	10:50:48 AM	Bypass valve opened
10/25/2010	10:50:48 AM	Helium MFC set to  0.000000
10/25/2010	10:50:48 AM	H2 MFC set to  0.000000
10/25/2010	10:50:48 AM	BCl3 MFC set to  0.000000
10/25/2010	10:50:48 AM	PHl3 MFC set to  0.000000
10/25/2010	10:50:48 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:50:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:50:49 AM	Tube furnace set to 0
10/25/2010	10:51:49 AM	H2 valve closed
10/25/2010	10:51:49 AM	BCl3 valve closed
10/25/2010	10:51:49 AM	PH3 valve closed
10/25/2010	10:51:49 AM	SiCl4 pre valve closed
10/25/2010	10:51:49 AM	SiCl4 post valve closed
10/25/2010	10:51:49 AM	Bubbler valve closed
10/25/2010	10:51:49 AM	Helium valve opened
10/25/2010	10:51:49 AM	Main Vac valve opened
10/25/2010	10:51:49 AM	Bypass valve opened
10/25/2010	10:51:49 AM	Helium MFC set to  100.000000
10/25/2010	10:51:49 AM	H2 MFC set to  0.000000
10/25/2010	10:51:49 AM	BCl3 MFC set to  0.000000
10/25/2010	10:51:49 AM	PHl3 MFC set to  0.000000
10/25/2010	10:51:49 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:51:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:51:49 AM	Tube furnace set to 0
10/25/2010	10:52:49 AM	Helium valve closed
10/25/2010	10:52:49 AM	H2 valve closed
10/25/2010	10:52:49 AM	BCl3 valve closed
10/25/2010	10:52:49 AM	PH3 valve closed
10/25/2010	10:52:49 AM	SiCl4 pre valve closed
10/25/2010	10:52:49 AM	SiCl4 post valve closed
10/25/2010	10:52:49 AM	Bubbler valve closed
10/25/2010	10:52:49 AM	Main Vac valve opened
10/25/2010	10:52:49 AM	Bypass valve opened
10/25/2010	10:52:49 AM	Helium MFC set to  0.000000
10/25/2010	10:52:49 AM	H2 MFC set to  0.000000
10/25/2010	10:52:49 AM	BCl3 MFC set to  0.000000
10/25/2010	10:52:49 AM	PHl3 MFC set to  0.000000
10/25/2010	10:52:49 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:52:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:52:49 AM	Tube furnace set to 0
10/25/2010	10:53:49 AM	H2 valve closed
10/25/2010	10:53:49 AM	BCl3 valve closed
10/25/2010	10:53:49 AM	PH3 valve closed
10/25/2010	10:53:49 AM	SiCl4 pre valve closed
10/25/2010	10:53:49 AM	SiCl4 post valve closed
10/25/2010	10:53:49 AM	Bubbler valve closed
10/25/2010	10:53:49 AM	Helium valve opened
10/25/2010	10:53:49 AM	Main Vac valve opened
10/25/2010	10:53:49 AM	Bypass valve opened
10/25/2010	10:53:49 AM	Helium MFC set to  100.000000
10/25/2010	10:53:49 AM	H2 MFC set to  0.000000
10/25/2010	10:53:49 AM	BCl3 MFC set to  0.000000
10/25/2010	10:53:49 AM	PHl3 MFC set to  0.000000
10/25/2010	10:53:49 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:53:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:53:49 AM	Tube furnace set to 0
10/25/2010	10:54:49 AM	Helium valve closed
10/25/2010	10:54:49 AM	H2 valve closed
10/25/2010	10:54:49 AM	BCl3 valve closed
10/25/2010	10:54:49 AM	PH3 valve closed
10/25/2010	10:54:49 AM	SiCl4 pre valve closed
10/25/2010	10:54:49 AM	SiCl4 post valve closed
10/25/2010	10:54:49 AM	Bubbler valve closed
10/25/2010	10:54:49 AM	Main Vac valve opened
10/25/2010	10:54:49 AM	Bypass valve opened
10/25/2010	10:54:49 AM	Helium MFC set to  0.000000
10/25/2010	10:54:49 AM	H2 MFC set to  0.000000
10/25/2010	10:54:49 AM	BCl3 MFC set to  0.000000
10/25/2010	10:54:49 AM	PHl3 MFC set to  0.000000
10/25/2010	10:54:49 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:54:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:54:49 AM	Tube furnace set to 0
10/25/2010	10:55:49 AM	H2 valve closed
10/25/2010	10:55:49 AM	BCl3 valve closed
10/25/2010	10:55:49 AM	PH3 valve closed
10/25/2010	10:55:49 AM	SiCl4 pre valve closed
10/25/2010	10:55:49 AM	SiCl4 post valve closed
10/25/2010	10:55:49 AM	Bubbler valve closed
10/25/2010	10:55:49 AM	Helium valve opened
10/25/2010	10:55:49 AM	Main Vac valve opened
10/25/2010	10:55:49 AM	Bypass valve opened
10/25/2010	10:55:49 AM	Helium MFC set to  100.000000
10/25/2010	10:55:49 AM	H2 MFC set to  0.000000
10/25/2010	10:55:49 AM	BCl3 MFC set to  0.000000
10/25/2010	10:55:49 AM	PHl3 MFC set to  0.000000
10/25/2010	10:55:49 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:55:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:55:50 AM	Tube furnace set to 0
10/25/2010	10:56:50 AM	Helium valve closed
10/25/2010	10:56:50 AM	H2 valve closed
10/25/2010	10:56:50 AM	BCl3 valve closed
10/25/2010	10:56:50 AM	PH3 valve closed
10/25/2010	10:56:50 AM	SiCl4 pre valve closed
10/25/2010	10:56:50 AM	SiCl4 post valve closed
10/25/2010	10:56:50 AM	Bubbler valve closed
10/25/2010	10:56:50 AM	Main Vac valve opened
10/25/2010	10:56:50 AM	Bypass valve opened
10/25/2010	10:56:50 AM	Helium MFC set to  0.000000
10/25/2010	10:56:50 AM	H2 MFC set to  0.000000
10/25/2010	10:56:50 AM	BCl3 MFC set to  0.000000
10/25/2010	10:56:50 AM	PHl3 MFC set to  0.000000
10/25/2010	10:56:50 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:56:50 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:56:50 AM	Tube furnace set to 0
10/25/2010	10:56:51 AM	Run finished at 10:56 AM
10/25/2010	10:56:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	10:57:27 AM	Bypass valve closed
10/25/2010	10:57:28 AM	Main Vac valve closed
10/25/2010	10:57:56 AM	Bypass valve opened
10/25/2010	10:57:56 AM	Main Vac valve opened
10/25/2010	10:58:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	10:58:51 AM	Recipe started at 10:58 AM
10/25/2010	10:58:51 AM	Helium valve closed
10/25/2010	10:58:51 AM	H2 valve closed
10/25/2010	10:58:51 AM	BCl3 valve closed
10/25/2010	10:58:51 AM	PH3 valve closed
10/25/2010	10:58:51 AM	SiCl4 pre valve closed
10/25/2010	10:58:51 AM	SiCl4 post valve closed
10/25/2010	10:58:51 AM	Main Vac valve closed
10/25/2010	10:58:51 AM	Bubbler valve closed
10/25/2010	10:58:51 AM	Bypass valve opened
10/25/2010	10:58:51 AM	Helium MFC set to  0.000000
10/25/2010	10:58:51 AM	H2 MFC set to  0.000000
10/25/2010	10:58:51 AM	BCl3 MFC set to  0.000000
10/25/2010	10:58:51 AM	PHl3 MFC set to  0.000000
10/25/2010	10:58:51 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:58:51 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:58:51 AM	Tube furnace set to 0
10/25/2010	10:58:51 AM	Helium valve closed
10/25/2010	10:58:51 AM	H2 valve closed
10/25/2010	10:58:51 AM	BCl3 valve closed
10/25/2010	10:58:51 AM	PH3 valve closed
10/25/2010	10:58:51 AM	SiCl4 pre valve closed
10/25/2010	10:58:51 AM	SiCl4 post valve closed
10/25/2010	10:58:51 AM	Bubbler valve closed
10/25/2010	10:58:51 AM	Main Vac valve opened
10/25/2010	10:58:51 AM	Bypass valve opened
10/25/2010	10:58:51 AM	Helium MFC set to  0.000000
10/25/2010	10:58:51 AM	H2 MFC set to  0.000000
10/25/2010	10:58:51 AM	BCl3 MFC set to  0.000000
10/25/2010	10:58:51 AM	PHl3 MFC set to  0.000000
10/25/2010	10:58:51 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:58:51 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:58:52 AM	Tube furnace set to 0
10/25/2010	10:59:52 AM	H2 valve closed
10/25/2010	10:59:52 AM	BCl3 valve closed
10/25/2010	10:59:52 AM	PH3 valve closed
10/25/2010	10:59:52 AM	SiCl4 pre valve closed
10/25/2010	10:59:52 AM	SiCl4 post valve closed
10/25/2010	10:59:52 AM	Bubbler valve closed
10/25/2010	10:59:52 AM	Helium valve opened
10/25/2010	10:59:52 AM	Main Vac valve opened
10/25/2010	10:59:52 AM	Bypass valve opened
10/25/2010	10:59:52 AM	Helium MFC set to  100.000000
10/25/2010	10:59:52 AM	H2 MFC set to  0.000000
10/25/2010	10:59:52 AM	BCl3 MFC set to  0.000000
10/25/2010	10:59:52 AM	PHl3 MFC set to  0.000000
10/25/2010	10:59:52 AM	SiCl4 MFC set to  0.000000
10/25/2010	10:59:52 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:59:52 AM	Tube furnace set to 0
10/25/2010	11:00:52 AM	Helium valve closed
10/25/2010	11:00:52 AM	H2 valve closed
10/25/2010	11:00:52 AM	BCl3 valve closed
10/25/2010	11:00:52 AM	PH3 valve closed
10/25/2010	11:00:52 AM	SiCl4 pre valve closed
10/25/2010	11:00:52 AM	SiCl4 post valve closed
10/25/2010	11:00:52 AM	Bubbler valve closed
10/25/2010	11:00:52 AM	Main Vac valve opened
10/25/2010	11:00:52 AM	Bypass valve opened
10/25/2010	11:00:52 AM	Helium MFC set to  0.000000
10/25/2010	11:00:52 AM	H2 MFC set to  0.000000
10/25/2010	11:00:52 AM	BCl3 MFC set to  0.000000
10/25/2010	11:00:52 AM	PHl3 MFC set to  0.000000
10/25/2010	11:00:52 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:00:52 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:00:52 AM	Tube furnace set to 0
10/25/2010	11:01:52 AM	H2 valve closed
10/25/2010	11:01:52 AM	BCl3 valve closed
10/25/2010	11:01:52 AM	PH3 valve closed
10/25/2010	11:01:52 AM	SiCl4 pre valve closed
10/25/2010	11:01:52 AM	SiCl4 post valve closed
10/25/2010	11:01:52 AM	Bubbler valve closed
10/25/2010	11:01:52 AM	Helium valve opened
10/25/2010	11:01:52 AM	Main Vac valve opened
10/25/2010	11:01:52 AM	Bypass valve opened
10/25/2010	11:01:52 AM	Helium MFC set to  100.000000
10/25/2010	11:01:52 AM	H2 MFC set to  0.000000
10/25/2010	11:01:52 AM	BCl3 MFC set to  0.000000
10/25/2010	11:01:52 AM	PHl3 MFC set to  0.000000
10/25/2010	11:01:52 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:01:52 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:01:52 AM	Tube furnace set to 0
10/25/2010	11:02:52 AM	Helium valve closed
10/25/2010	11:02:52 AM	H2 valve closed
10/25/2010	11:02:52 AM	BCl3 valve closed
10/25/2010	11:02:52 AM	PH3 valve closed
10/25/2010	11:02:52 AM	SiCl4 pre valve closed
10/25/2010	11:02:52 AM	SiCl4 post valve closed
10/25/2010	11:02:52 AM	Bubbler valve closed
10/25/2010	11:02:52 AM	Main Vac valve opened
10/25/2010	11:02:52 AM	Bypass valve opened
10/25/2010	11:02:52 AM	Helium MFC set to  0.000000
10/25/2010	11:02:52 AM	H2 MFC set to  0.000000
10/25/2010	11:02:52 AM	BCl3 MFC set to  0.000000
10/25/2010	11:02:52 AM	PHl3 MFC set to  0.000000
10/25/2010	11:02:52 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:02:52 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:02:52 AM	Tube furnace set to 0
10/25/2010	11:03:52 AM	H2 valve closed
10/25/2010	11:03:52 AM	BCl3 valve closed
10/25/2010	11:03:52 AM	PH3 valve closed
10/25/2010	11:03:52 AM	SiCl4 pre valve closed
10/25/2010	11:03:52 AM	SiCl4 post valve closed
10/25/2010	11:03:52 AM	Bubbler valve closed
10/25/2010	11:03:52 AM	Helium valve opened
10/25/2010	11:03:52 AM	Main Vac valve opened
10/25/2010	11:03:52 AM	Bypass valve opened
10/25/2010	11:03:52 AM	Helium MFC set to  100.000000
10/25/2010	11:03:52 AM	H2 MFC set to  0.000000
10/25/2010	11:03:52 AM	BCl3 MFC set to  0.000000
10/25/2010	11:03:52 AM	PHl3 MFC set to  0.000000
10/25/2010	11:03:52 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:03:52 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:03:53 AM	Tube furnace set to 0
10/25/2010	11:04:53 AM	Helium valve closed
10/25/2010	11:04:53 AM	H2 valve closed
10/25/2010	11:04:53 AM	BCl3 valve closed
10/25/2010	11:04:53 AM	PH3 valve closed
10/25/2010	11:04:53 AM	SiCl4 pre valve closed
10/25/2010	11:04:53 AM	SiCl4 post valve closed
10/25/2010	11:04:53 AM	Bubbler valve closed
10/25/2010	11:04:53 AM	Main Vac valve opened
10/25/2010	11:04:53 AM	Bypass valve opened
10/25/2010	11:04:53 AM	Helium MFC set to  0.000000
10/25/2010	11:04:53 AM	H2 MFC set to  0.000000
10/25/2010	11:04:53 AM	BCl3 MFC set to  0.000000
10/25/2010	11:04:53 AM	PHl3 MFC set to  0.000000
10/25/2010	11:04:53 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:04:53 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:04:53 AM	Tube furnace set to 0
10/25/2010	11:05:53 AM	H2 valve closed
10/25/2010	11:05:53 AM	BCl3 valve closed
10/25/2010	11:05:53 AM	PH3 valve closed
10/25/2010	11:05:53 AM	SiCl4 pre valve closed
10/25/2010	11:05:53 AM	SiCl4 post valve closed
10/25/2010	11:05:53 AM	Bubbler valve closed
10/25/2010	11:05:53 AM	Helium valve opened
10/25/2010	11:05:53 AM	Main Vac valve opened
10/25/2010	11:05:53 AM	Bypass valve opened
10/25/2010	11:05:53 AM	Helium MFC set to  100.000000
10/25/2010	11:05:53 AM	H2 MFC set to  0.000000
10/25/2010	11:05:53 AM	BCl3 MFC set to  0.000000
10/25/2010	11:05:53 AM	PHl3 MFC set to  0.000000
10/25/2010	11:05:53 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:05:53 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:05:53 AM	Tube furnace set to 0
10/25/2010	11:06:53 AM	Helium valve closed
10/25/2010	11:06:53 AM	H2 valve closed
10/25/2010	11:06:53 AM	BCl3 valve closed
10/25/2010	11:06:53 AM	PH3 valve closed
10/25/2010	11:06:53 AM	SiCl4 pre valve closed
10/25/2010	11:06:53 AM	SiCl4 post valve closed
10/25/2010	11:06:53 AM	Bubbler valve closed
10/25/2010	11:06:53 AM	Main Vac valve opened
10/25/2010	11:06:53 AM	Bypass valve opened
10/25/2010	11:06:53 AM	Helium MFC set to  0.000000
10/25/2010	11:06:53 AM	H2 MFC set to  0.000000
10/25/2010	11:06:53 AM	BCl3 MFC set to  0.000000
10/25/2010	11:06:53 AM	PHl3 MFC set to  0.000000
10/25/2010	11:06:53 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:06:53 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:06:53 AM	Tube furnace set to 0
10/25/2010	11:07:53 AM	H2 valve closed
10/25/2010	11:07:53 AM	BCl3 valve closed
10/25/2010	11:07:53 AM	PH3 valve closed
10/25/2010	11:07:53 AM	SiCl4 pre valve closed
10/25/2010	11:07:53 AM	SiCl4 post valve closed
10/25/2010	11:07:53 AM	Bubbler valve closed
10/25/2010	11:07:53 AM	Helium valve opened
10/25/2010	11:07:53 AM	Main Vac valve opened
10/25/2010	11:07:53 AM	Bypass valve opened
10/25/2010	11:07:53 AM	Helium MFC set to  100.000000
10/25/2010	11:07:53 AM	H2 MFC set to  0.000000
10/25/2010	11:07:53 AM	BCl3 MFC set to  0.000000
10/25/2010	11:07:53 AM	PHl3 MFC set to  0.000000
10/25/2010	11:07:53 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:07:53 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:07:53 AM	Tube furnace set to 0
10/25/2010	11:08:53 AM	Helium valve closed
10/25/2010	11:08:53 AM	H2 valve closed
10/25/2010	11:08:53 AM	BCl3 valve closed
10/25/2010	11:08:53 AM	PH3 valve closed
10/25/2010	11:08:53 AM	SiCl4 pre valve closed
10/25/2010	11:08:53 AM	SiCl4 post valve closed
10/25/2010	11:08:53 AM	Bubbler valve closed
10/25/2010	11:08:53 AM	Main Vac valve opened
10/25/2010	11:08:53 AM	Bypass valve opened
10/25/2010	11:08:53 AM	Helium MFC set to  0.000000
10/25/2010	11:08:53 AM	H2 MFC set to  0.000000
10/25/2010	11:08:53 AM	BCl3 MFC set to  0.000000
10/25/2010	11:08:53 AM	PHl3 MFC set to  0.000000
10/25/2010	11:08:53 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:08:53 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:08:54 AM	Tube furnace set to 0
10/25/2010	11:09:54 AM	H2 valve closed
10/25/2010	11:09:54 AM	BCl3 valve closed
10/25/2010	11:09:54 AM	PH3 valve closed
10/25/2010	11:09:54 AM	SiCl4 pre valve closed
10/25/2010	11:09:54 AM	SiCl4 post valve closed
10/25/2010	11:09:54 AM	Bubbler valve closed
10/25/2010	11:09:54 AM	Helium valve opened
10/25/2010	11:09:54 AM	Main Vac valve opened
10/25/2010	11:09:54 AM	Bypass valve opened
10/25/2010	11:09:54 AM	Helium MFC set to  100.000000
10/25/2010	11:09:54 AM	H2 MFC set to  0.000000
10/25/2010	11:09:54 AM	BCl3 MFC set to  0.000000
10/25/2010	11:09:54 AM	PHl3 MFC set to  0.000000
10/25/2010	11:09:54 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:09:54 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:09:54 AM	Tube furnace set to 0
10/25/2010	11:10:54 AM	Helium valve closed
10/25/2010	11:10:54 AM	H2 valve closed
10/25/2010	11:10:54 AM	BCl3 valve closed
10/25/2010	11:10:54 AM	PH3 valve closed
10/25/2010	11:10:54 AM	SiCl4 pre valve closed
10/25/2010	11:10:54 AM	SiCl4 post valve closed
10/25/2010	11:10:54 AM	Bubbler valve closed
10/25/2010	11:10:54 AM	Main Vac valve opened
10/25/2010	11:10:54 AM	Bypass valve opened
10/25/2010	11:10:54 AM	Helium MFC set to  0.000000
10/25/2010	11:10:54 AM	H2 MFC set to  0.000000
10/25/2010	11:10:54 AM	BCl3 MFC set to  0.000000
10/25/2010	11:10:54 AM	PHl3 MFC set to  0.000000
10/25/2010	11:10:54 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:10:54 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:10:54 AM	Tube furnace set to 0
10/25/2010	11:11:54 AM	H2 valve closed
10/25/2010	11:11:54 AM	BCl3 valve closed
10/25/2010	11:11:54 AM	PH3 valve closed
10/25/2010	11:11:54 AM	SiCl4 pre valve closed
10/25/2010	11:11:54 AM	SiCl4 post valve closed
10/25/2010	11:11:54 AM	Bubbler valve closed
10/25/2010	11:11:54 AM	Helium valve opened
10/25/2010	11:11:54 AM	Main Vac valve opened
10/25/2010	11:11:54 AM	Bypass valve opened
10/25/2010	11:11:54 AM	Helium MFC set to  100.000000
10/25/2010	11:11:54 AM	H2 MFC set to  0.000000
10/25/2010	11:11:54 AM	BCl3 MFC set to  0.000000
10/25/2010	11:11:54 AM	PHl3 MFC set to  0.000000
10/25/2010	11:11:54 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:11:54 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:11:54 AM	Tube furnace set to 0
10/25/2010	11:12:54 AM	Helium valve closed
10/25/2010	11:12:54 AM	H2 valve closed
10/25/2010	11:12:54 AM	BCl3 valve closed
10/25/2010	11:12:54 AM	PH3 valve closed
10/25/2010	11:12:54 AM	SiCl4 pre valve closed
10/25/2010	11:12:54 AM	SiCl4 post valve closed
10/25/2010	11:12:54 AM	Bubbler valve closed
10/25/2010	11:12:54 AM	Main Vac valve opened
10/25/2010	11:12:54 AM	Bypass valve opened
10/25/2010	11:12:54 AM	Helium MFC set to  0.000000
10/25/2010	11:12:54 AM	H2 MFC set to  0.000000
10/25/2010	11:12:54 AM	BCl3 MFC set to  0.000000
10/25/2010	11:12:54 AM	PHl3 MFC set to  0.000000
10/25/2010	11:12:54 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:12:54 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:12:54 AM	Tube furnace set to 0
10/25/2010	11:13:54 AM	H2 valve closed
10/25/2010	11:13:54 AM	BCl3 valve closed
10/25/2010	11:13:54 AM	PH3 valve closed
10/25/2010	11:13:54 AM	SiCl4 pre valve closed
10/25/2010	11:13:54 AM	SiCl4 post valve closed
10/25/2010	11:13:54 AM	Bubbler valve closed
10/25/2010	11:13:54 AM	Helium valve opened
10/25/2010	11:13:54 AM	Main Vac valve opened
10/25/2010	11:13:54 AM	Bypass valve opened
10/25/2010	11:13:54 AM	Helium MFC set to  100.000000
10/25/2010	11:13:54 AM	H2 MFC set to  0.000000
10/25/2010	11:13:54 AM	BCl3 MFC set to  0.000000
10/25/2010	11:13:54 AM	PHl3 MFC set to  0.000000
10/25/2010	11:13:54 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:13:54 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:13:55 AM	Tube furnace set to 0
10/25/2010	11:14:55 AM	Helium valve closed
10/25/2010	11:14:55 AM	H2 valve closed
10/25/2010	11:14:55 AM	BCl3 valve closed
10/25/2010	11:14:55 AM	PH3 valve closed
10/25/2010	11:14:55 AM	SiCl4 pre valve closed
10/25/2010	11:14:55 AM	SiCl4 post valve closed
10/25/2010	11:14:55 AM	Bubbler valve closed
10/25/2010	11:14:55 AM	Main Vac valve opened
10/25/2010	11:14:55 AM	Bypass valve opened
10/25/2010	11:14:55 AM	Helium MFC set to  0.000000
10/25/2010	11:14:55 AM	H2 MFC set to  0.000000
10/25/2010	11:14:55 AM	BCl3 MFC set to  0.000000
10/25/2010	11:14:55 AM	PHl3 MFC set to  0.000000
10/25/2010	11:14:55 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:14:55 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:14:55 AM	Tube furnace set to 0
10/25/2010	11:15:55 AM	H2 valve closed
10/25/2010	11:15:55 AM	BCl3 valve closed
10/25/2010	11:15:55 AM	PH3 valve closed
10/25/2010	11:15:55 AM	SiCl4 pre valve closed
10/25/2010	11:15:55 AM	SiCl4 post valve closed
10/25/2010	11:15:55 AM	Bubbler valve closed
10/25/2010	11:15:55 AM	Helium valve opened
10/25/2010	11:15:55 AM	Main Vac valve opened
10/25/2010	11:15:55 AM	Bypass valve opened
10/25/2010	11:15:55 AM	Helium MFC set to  100.000000
10/25/2010	11:15:55 AM	H2 MFC set to  0.000000
10/25/2010	11:15:55 AM	BCl3 MFC set to  0.000000
10/25/2010	11:15:55 AM	PHl3 MFC set to  0.000000
10/25/2010	11:15:55 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:15:55 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:15:55 AM	Tube furnace set to 0
10/25/2010	11:16:55 AM	Helium valve closed
10/25/2010	11:16:55 AM	H2 valve closed
10/25/2010	11:16:55 AM	BCl3 valve closed
10/25/2010	11:16:55 AM	PH3 valve closed
10/25/2010	11:16:55 AM	SiCl4 pre valve closed
10/25/2010	11:16:55 AM	SiCl4 post valve closed
10/25/2010	11:16:55 AM	Bubbler valve closed
10/25/2010	11:16:55 AM	Main Vac valve opened
10/25/2010	11:16:55 AM	Bypass valve opened
10/25/2010	11:16:55 AM	Helium MFC set to  0.000000
10/25/2010	11:16:55 AM	H2 MFC set to  0.000000
10/25/2010	11:16:55 AM	BCl3 MFC set to  0.000000
10/25/2010	11:16:55 AM	PHl3 MFC set to  0.000000
10/25/2010	11:16:55 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:16:55 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:16:55 AM	Tube furnace set to 0
10/25/2010	11:17:55 AM	H2 valve closed
10/25/2010	11:17:55 AM	BCl3 valve closed
10/25/2010	11:17:55 AM	PH3 valve closed
10/25/2010	11:17:55 AM	SiCl4 pre valve closed
10/25/2010	11:17:55 AM	SiCl4 post valve closed
10/25/2010	11:17:55 AM	Bubbler valve closed
10/25/2010	11:17:55 AM	Helium valve opened
10/25/2010	11:17:55 AM	Main Vac valve opened
10/25/2010	11:17:55 AM	Bypass valve opened
10/25/2010	11:17:55 AM	Helium MFC set to  100.000000
10/25/2010	11:17:55 AM	H2 MFC set to  0.000000
10/25/2010	11:17:55 AM	BCl3 MFC set to  0.000000
10/25/2010	11:17:55 AM	PHl3 MFC set to  0.000000
10/25/2010	11:17:55 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:17:55 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:17:55 AM	Tube furnace set to 0
10/25/2010	11:18:55 AM	Helium valve closed
10/25/2010	11:18:55 AM	H2 valve closed
10/25/2010	11:18:55 AM	BCl3 valve closed
10/25/2010	11:18:55 AM	PH3 valve closed
10/25/2010	11:18:55 AM	SiCl4 pre valve closed
10/25/2010	11:18:55 AM	SiCl4 post valve closed
10/25/2010	11:18:55 AM	Bubbler valve closed
10/25/2010	11:18:55 AM	Main Vac valve opened
10/25/2010	11:18:55 AM	Bypass valve opened
10/25/2010	11:18:55 AM	Helium MFC set to  0.000000
10/25/2010	11:18:55 AM	H2 MFC set to  0.000000
10/25/2010	11:18:55 AM	BCl3 MFC set to  0.000000
10/25/2010	11:18:55 AM	PHl3 MFC set to  0.000000
10/25/2010	11:18:55 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:18:55 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:18:56 AM	Tube furnace set to 0
10/25/2010	11:18:57 AM	Run finished at 11:18 AM
10/25/2010	11:18:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	11:25:51 AM	Recipe started at 11:25 AM
10/25/2010	11:25:51 AM	Helium valve closed
10/25/2010	11:25:51 AM	BCl3 valve closed
10/25/2010	11:25:51 AM	PH3 valve closed
10/25/2010	11:25:51 AM	SiCl4 pre valve closed
10/25/2010	11:25:51 AM	SiCl4 post valve closed
10/25/2010	11:25:51 AM	Main Vac valve closed
10/25/2010	11:25:51 AM	Bypass valve closed
10/25/2010	11:25:51 AM	Bubbler valve closed
10/25/2010	11:25:51 AM	H2 valve opened
10/25/2010	11:25:51 AM	Helium MFC set to  0.000000
10/25/2010	11:25:51 AM	H2 MFC set to  500.000000
10/25/2010	11:25:51 AM	BCl3 MFC set to  0.000000
10/25/2010	11:25:51 AM	PHl3 MFC set to  0.000000
10/25/2010	11:25:51 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:25:51 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:25:52 AM	Tube furnace set to 0
10/25/2010	11:27:11 AM	Helium valve closed
10/25/2010	11:27:11 AM	BCl3 valve closed
10/25/2010	11:27:11 AM	PH3 valve closed
10/25/2010	11:27:11 AM	SiCl4 pre valve closed
10/25/2010	11:27:11 AM	SiCl4 post valve closed
10/25/2010	11:27:11 AM	Main Vac valve closed
10/25/2010	11:27:11 AM	Bypass valve closed
10/25/2010	11:27:11 AM	H2 valve opened
10/25/2010	11:27:11 AM	Bubbler valve opened
10/25/2010	11:27:11 AM	Helium MFC set to  0.000000
10/25/2010	11:27:11 AM	H2 MFC set to  500.000000
10/25/2010	11:27:11 AM	BCl3 MFC set to  0.000000
10/25/2010	11:27:11 AM	PHl3 MFC set to  0.000000
10/25/2010	11:27:11 AM	SiCl4 MFC set to  0.000000
10/25/2010	11:27:11 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:27:12 AM	Tube furnace set to 1000
10/25/2010	11:47:12 AM	Helium valve closed
10/25/2010	11:47:12 AM	BCl3 valve closed
10/25/2010	11:47:12 AM	PH3 valve closed
10/25/2010	11:47:12 AM	Main Vac valve closed
10/25/2010	11:47:12 AM	Bypass valve closed
10/25/2010	11:47:12 AM	H2 valve opened
10/25/2010	11:47:12 AM	SiCl4 pre valve opened
10/25/2010	11:47:12 AM	SiCl4 post valve opened
10/25/2010	11:47:12 AM	Bubbler valve opened
10/25/2010	11:47:12 AM	Helium MFC set to  0.000000
10/25/2010	11:47:12 AM	H2 MFC set to  500.000000
10/25/2010	11:47:12 AM	BCl3 MFC set to  0.000000
10/25/2010	11:47:12 AM	PHl3 MFC set to  0.000000
10/25/2010	11:47:12 AM	SiCl4 MFC set to  50.000000
10/25/2010	11:47:12 AM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:47:12 AM	Tube furnace set to 1000
10/25/2010	12:07:12 PM	H2 valve closed
10/25/2010	12:07:12 PM	BCl3 valve closed
10/25/2010	12:07:12 PM	PH3 valve closed
10/25/2010	12:07:12 PM	SiCl4 pre valve closed
10/25/2010	12:07:12 PM	SiCl4 post valve closed
10/25/2010	12:07:12 PM	Main Vac valve closed
10/25/2010	12:07:12 PM	Bypass valve closed
10/25/2010	12:07:12 PM	Helium valve opened
10/25/2010	12:07:12 PM	Bubbler valve opened
10/25/2010	12:07:12 PM	Helium MFC set to  500.000000
10/25/2010	12:07:12 PM	H2 MFC set to  0.000000
10/25/2010	12:07:12 PM	BCl3 MFC set to  0.000000
10/25/2010	12:07:12 PM	PHl3 MFC set to  0.000000
10/25/2010	12:07:12 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:07:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:07:12 PM	Tube furnace set to 0
10/25/2010	12:27:12 PM	Helium valve closed
10/25/2010	12:27:12 PM	H2 valve closed
10/25/2010	12:27:12 PM	BCl3 valve closed
10/25/2010	12:27:12 PM	PH3 valve closed
10/25/2010	12:27:12 PM	SiCl4 pre valve closed
10/25/2010	12:27:12 PM	SiCl4 post valve closed
10/25/2010	12:27:12 PM	Main Vac valve closed
10/25/2010	12:27:12 PM	Bypass valve closed
10/25/2010	12:27:12 PM	Bubbler valve closed
10/25/2010	12:27:12 PM	Helium MFC set to  0.000000
10/25/2010	12:27:12 PM	H2 MFC set to  0.000000
10/25/2010	12:27:12 PM	BCl3 MFC set to  0.000000
10/25/2010	12:27:12 PM	PHl3 MFC set to  0.000000
10/25/2010	12:27:12 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:27:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:27:12 PM	Tube furnace set to 0
10/25/2010	12:27:12 PM	Run finished at 12:27 PM
10/25/2010	12:41:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	12:41:26 PM	Recipe started at 12:41 PM
10/25/2010	12:41:26 PM	H2 valve closed
10/25/2010	12:41:26 PM	BCl3 valve closed
10/25/2010	12:41:26 PM	PH3 valve closed
10/25/2010	12:41:26 PM	SiCl4 pre valve closed
10/25/2010	12:41:26 PM	SiCl4 post valve closed
10/25/2010	12:41:26 PM	Main Vac valve closed
10/25/2010	12:41:26 PM	Bypass valve closed
10/25/2010	12:41:26 PM	Bubbler valve closed
10/25/2010	12:41:26 PM	Helium valve opened
10/25/2010	12:41:26 PM	Helium MFC set to  500.000000
10/25/2010	12:41:26 PM	H2 MFC set to  0.000000
10/25/2010	12:41:26 PM	BCl3 MFC set to  0.000000
10/25/2010	12:41:26 PM	PHl3 MFC set to  0.000000
10/25/2010	12:41:26 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:41:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:41:26 PM	Tube furnace set to 0
10/25/2010	12:41:32 PM	Helium valve closed
10/25/2010	12:41:32 PM	H2 valve closed
10/25/2010	12:41:32 PM	BCl3 valve closed
10/25/2010	12:41:32 PM	PH3 valve closed
10/25/2010	12:41:32 PM	SiCl4 pre valve closed
10/25/2010	12:41:32 PM	SiCl4 post valve closed
10/25/2010	12:41:32 PM	Main Vac valve closed
10/25/2010	12:41:32 PM	Bypass valve closed
10/25/2010	12:41:32 PM	Bubbler valve closed
10/25/2010	12:41:32 PM	Helium MFC set to  0.000000
10/25/2010	12:41:32 PM	H2 MFC set to  0.000000
10/25/2010	12:41:32 PM	BCl3 MFC set to  0.000000
10/25/2010	12:41:32 PM	PHl3 MFC set to  0.000000
10/25/2010	12:41:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:41:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:41:32 PM	Tube furnace set to 0
10/25/2010	12:41:32 PM	Run finished at 12:41 PM
10/25/2010	12:41:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	12:47:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	12:47:05 PM	Recipe started at 12:47 PM
10/25/2010	12:47:05 PM	Helium valve closed
10/25/2010	12:47:05 PM	H2 valve closed
10/25/2010	12:47:05 PM	BCl3 valve closed
10/25/2010	12:47:05 PM	PH3 valve closed
10/25/2010	12:47:05 PM	SiCl4 pre valve closed
10/25/2010	12:47:05 PM	SiCl4 post valve closed
10/25/2010	12:47:05 PM	Main Vac valve closed
10/25/2010	12:47:05 PM	Bubbler valve closed
10/25/2010	12:47:05 PM	Bypass valve opened
10/25/2010	12:47:05 PM	Helium MFC set to  0.000000
10/25/2010	12:47:05 PM	H2 MFC set to  0.000000
10/25/2010	12:47:05 PM	BCl3 MFC set to  0.000000
10/25/2010	12:47:05 PM	PHl3 MFC set to  0.000000
10/25/2010	12:47:05 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:47:05 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:47:05 PM	Tube furnace set to 0
10/25/2010	12:47:58 PM	Helium valve closed
10/25/2010	12:47:58 PM	H2 valve closed
10/25/2010	12:47:58 PM	BCl3 valve closed
10/25/2010	12:47:58 PM	PH3 valve closed
10/25/2010	12:47:58 PM	SiCl4 pre valve closed
10/25/2010	12:47:58 PM	SiCl4 post valve closed
10/25/2010	12:47:58 PM	Bubbler valve closed
10/25/2010	12:47:58 PM	Main Vac valve opened
10/25/2010	12:47:58 PM	Bypass valve opened
10/25/2010	12:47:58 PM	Helium MFC set to  0.000000
10/25/2010	12:47:58 PM	H2 MFC set to  0.000000
10/25/2010	12:47:58 PM	BCl3 MFC set to  0.000000
10/25/2010	12:47:58 PM	PHl3 MFC set to  0.000000
10/25/2010	12:47:58 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:47:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:47:58 PM	Tube furnace set to 0
10/25/2010	12:47:58 PM	Run finished at 12:47 PM
10/25/2010	12:47:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	12:49:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	12:49:31 PM	Recipe started at 12:49 PM
10/25/2010	12:49:32 PM	Helium valve closed
10/25/2010	12:49:32 PM	H2 valve closed
10/25/2010	12:49:32 PM	BCl3 valve closed
10/25/2010	12:49:32 PM	PH3 valve closed
10/25/2010	12:49:32 PM	SiCl4 pre valve closed
10/25/2010	12:49:32 PM	SiCl4 post valve closed
10/25/2010	12:49:32 PM	Main Vac valve closed
10/25/2010	12:49:32 PM	Bubbler valve closed
10/25/2010	12:49:32 PM	Bypass valve opened
10/25/2010	12:49:32 PM	Helium MFC set to  0.000000
10/25/2010	12:49:32 PM	H2 MFC set to  0.000000
10/25/2010	12:49:32 PM	BCl3 MFC set to  0.000000
10/25/2010	12:49:32 PM	PHl3 MFC set to  0.000000
10/25/2010	12:49:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:49:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:49:32 PM	Tube furnace set to 0
10/25/2010	12:49:32 PM	Helium valve closed
10/25/2010	12:49:32 PM	H2 valve closed
10/25/2010	12:49:32 PM	BCl3 valve closed
10/25/2010	12:49:32 PM	PH3 valve closed
10/25/2010	12:49:32 PM	SiCl4 pre valve closed
10/25/2010	12:49:32 PM	SiCl4 post valve closed
10/25/2010	12:49:32 PM	Bubbler valve closed
10/25/2010	12:49:32 PM	Main Vac valve opened
10/25/2010	12:49:32 PM	Bypass valve opened
10/25/2010	12:49:32 PM	Helium MFC set to  0.000000
10/25/2010	12:49:32 PM	H2 MFC set to  0.000000
10/25/2010	12:49:32 PM	BCl3 MFC set to  0.000000
10/25/2010	12:49:32 PM	PHl3 MFC set to  0.000000
10/25/2010	12:49:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:49:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:49:32 PM	Tube furnace set to 0
10/25/2010	12:50:32 PM	H2 valve closed
10/25/2010	12:50:32 PM	BCl3 valve closed
10/25/2010	12:50:32 PM	PH3 valve closed
10/25/2010	12:50:32 PM	SiCl4 pre valve closed
10/25/2010	12:50:32 PM	SiCl4 post valve closed
10/25/2010	12:50:32 PM	Bubbler valve closed
10/25/2010	12:50:32 PM	Helium valve opened
10/25/2010	12:50:32 PM	Main Vac valve opened
10/25/2010	12:50:32 PM	Bypass valve opened
10/25/2010	12:50:32 PM	Helium MFC set to  100.000000
10/25/2010	12:50:32 PM	H2 MFC set to  0.000000
10/25/2010	12:50:32 PM	BCl3 MFC set to  0.000000
10/25/2010	12:50:32 PM	PHl3 MFC set to  0.000000
10/25/2010	12:50:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:50:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:50:32 PM	Tube furnace set to 0
10/25/2010	12:51:32 PM	Helium valve closed
10/25/2010	12:51:32 PM	H2 valve closed
10/25/2010	12:51:32 PM	BCl3 valve closed
10/25/2010	12:51:32 PM	PH3 valve closed
10/25/2010	12:51:32 PM	SiCl4 pre valve closed
10/25/2010	12:51:32 PM	SiCl4 post valve closed
10/25/2010	12:51:32 PM	Bubbler valve closed
10/25/2010	12:51:32 PM	Main Vac valve opened
10/25/2010	12:51:32 PM	Bypass valve opened
10/25/2010	12:51:32 PM	Helium MFC set to  0.000000
10/25/2010	12:51:32 PM	H2 MFC set to  0.000000
10/25/2010	12:51:32 PM	BCl3 MFC set to  0.000000
10/25/2010	12:51:32 PM	PHl3 MFC set to  0.000000
10/25/2010	12:51:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:51:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:51:33 PM	Tube furnace set to 0
10/25/2010	12:52:33 PM	H2 valve closed
10/25/2010	12:52:33 PM	BCl3 valve closed
10/25/2010	12:52:33 PM	PH3 valve closed
10/25/2010	12:52:33 PM	SiCl4 pre valve closed
10/25/2010	12:52:33 PM	SiCl4 post valve closed
10/25/2010	12:52:33 PM	Bubbler valve closed
10/25/2010	12:52:33 PM	Helium valve opened
10/25/2010	12:52:33 PM	Main Vac valve opened
10/25/2010	12:52:33 PM	Bypass valve opened
10/25/2010	12:52:33 PM	Helium MFC set to  100.000000
10/25/2010	12:52:33 PM	H2 MFC set to  0.000000
10/25/2010	12:52:33 PM	BCl3 MFC set to  0.000000
10/25/2010	12:52:33 PM	PHl3 MFC set to  0.000000
10/25/2010	12:52:33 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:52:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:52:33 PM	Tube furnace set to 0
10/25/2010	12:53:33 PM	Helium valve closed
10/25/2010	12:53:33 PM	H2 valve closed
10/25/2010	12:53:33 PM	BCl3 valve closed
10/25/2010	12:53:33 PM	PH3 valve closed
10/25/2010	12:53:33 PM	SiCl4 pre valve closed
10/25/2010	12:53:33 PM	SiCl4 post valve closed
10/25/2010	12:53:33 PM	Bubbler valve closed
10/25/2010	12:53:33 PM	Main Vac valve opened
10/25/2010	12:53:33 PM	Bypass valve opened
10/25/2010	12:53:33 PM	Helium MFC set to  0.000000
10/25/2010	12:53:33 PM	H2 MFC set to  0.000000
10/25/2010	12:53:33 PM	BCl3 MFC set to  0.000000
10/25/2010	12:53:33 PM	PHl3 MFC set to  0.000000
10/25/2010	12:53:33 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:53:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:53:33 PM	Tube furnace set to 0
10/25/2010	12:54:33 PM	H2 valve closed
10/25/2010	12:54:33 PM	BCl3 valve closed
10/25/2010	12:54:33 PM	PH3 valve closed
10/25/2010	12:54:33 PM	SiCl4 pre valve closed
10/25/2010	12:54:33 PM	SiCl4 post valve closed
10/25/2010	12:54:33 PM	Bubbler valve closed
10/25/2010	12:54:33 PM	Helium valve opened
10/25/2010	12:54:33 PM	Main Vac valve opened
10/25/2010	12:54:33 PM	Bypass valve opened
10/25/2010	12:54:33 PM	Helium MFC set to  100.000000
10/25/2010	12:54:33 PM	H2 MFC set to  0.000000
10/25/2010	12:54:33 PM	BCl3 MFC set to  0.000000
10/25/2010	12:54:33 PM	PHl3 MFC set to  0.000000
10/25/2010	12:54:33 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:54:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:54:33 PM	Tube furnace set to 0
10/25/2010	12:55:33 PM	Helium valve closed
10/25/2010	12:55:33 PM	H2 valve closed
10/25/2010	12:55:33 PM	BCl3 valve closed
10/25/2010	12:55:33 PM	PH3 valve closed
10/25/2010	12:55:33 PM	SiCl4 pre valve closed
10/25/2010	12:55:33 PM	SiCl4 post valve closed
10/25/2010	12:55:33 PM	Bubbler valve closed
10/25/2010	12:55:33 PM	Main Vac valve opened
10/25/2010	12:55:33 PM	Bypass valve opened
10/25/2010	12:55:33 PM	Helium MFC set to  0.000000
10/25/2010	12:55:33 PM	H2 MFC set to  0.000000
10/25/2010	12:55:33 PM	BCl3 MFC set to  0.000000
10/25/2010	12:55:33 PM	PHl3 MFC set to  0.000000
10/25/2010	12:55:33 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:55:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:55:33 PM	Tube furnace set to 0
10/25/2010	12:56:33 PM	H2 valve closed
10/25/2010	12:56:33 PM	BCl3 valve closed
10/25/2010	12:56:33 PM	PH3 valve closed
10/25/2010	12:56:33 PM	SiCl4 pre valve closed
10/25/2010	12:56:33 PM	SiCl4 post valve closed
10/25/2010	12:56:33 PM	Bubbler valve closed
10/25/2010	12:56:33 PM	Helium valve opened
10/25/2010	12:56:33 PM	Main Vac valve opened
10/25/2010	12:56:33 PM	Bypass valve opened
10/25/2010	12:56:33 PM	Helium MFC set to  100.000000
10/25/2010	12:56:33 PM	H2 MFC set to  0.000000
10/25/2010	12:56:33 PM	BCl3 MFC set to  0.000000
10/25/2010	12:56:33 PM	PHl3 MFC set to  0.000000
10/25/2010	12:56:33 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:56:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:56:34 PM	Tube furnace set to 0
10/25/2010	12:57:34 PM	Helium valve closed
10/25/2010	12:57:34 PM	H2 valve closed
10/25/2010	12:57:34 PM	BCl3 valve closed
10/25/2010	12:57:34 PM	PH3 valve closed
10/25/2010	12:57:34 PM	SiCl4 pre valve closed
10/25/2010	12:57:34 PM	SiCl4 post valve closed
10/25/2010	12:57:34 PM	Bubbler valve closed
10/25/2010	12:57:34 PM	Main Vac valve opened
10/25/2010	12:57:34 PM	Bypass valve opened
10/25/2010	12:57:34 PM	Helium MFC set to  0.000000
10/25/2010	12:57:34 PM	H2 MFC set to  0.000000
10/25/2010	12:57:34 PM	BCl3 MFC set to  0.000000
10/25/2010	12:57:34 PM	PHl3 MFC set to  0.000000
10/25/2010	12:57:34 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:57:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:57:34 PM	Tube furnace set to 0
10/25/2010	12:58:34 PM	H2 valve closed
10/25/2010	12:58:34 PM	BCl3 valve closed
10/25/2010	12:58:34 PM	PH3 valve closed
10/25/2010	12:58:34 PM	SiCl4 pre valve closed
10/25/2010	12:58:34 PM	SiCl4 post valve closed
10/25/2010	12:58:34 PM	Bubbler valve closed
10/25/2010	12:58:34 PM	Helium valve opened
10/25/2010	12:58:34 PM	Main Vac valve opened
10/25/2010	12:58:34 PM	Bypass valve opened
10/25/2010	12:58:34 PM	Helium MFC set to  100.000000
10/25/2010	12:58:34 PM	H2 MFC set to  0.000000
10/25/2010	12:58:34 PM	BCl3 MFC set to  0.000000
10/25/2010	12:58:34 PM	PHl3 MFC set to  0.000000
10/25/2010	12:58:34 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:58:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:58:34 PM	Tube furnace set to 0
10/25/2010	12:59:34 PM	Helium valve closed
10/25/2010	12:59:34 PM	H2 valve closed
10/25/2010	12:59:34 PM	BCl3 valve closed
10/25/2010	12:59:34 PM	PH3 valve closed
10/25/2010	12:59:34 PM	SiCl4 pre valve closed
10/25/2010	12:59:34 PM	SiCl4 post valve closed
10/25/2010	12:59:34 PM	Bubbler valve closed
10/25/2010	12:59:34 PM	Main Vac valve opened
10/25/2010	12:59:34 PM	Bypass valve opened
10/25/2010	12:59:34 PM	Helium MFC set to  0.000000
10/25/2010	12:59:34 PM	H2 MFC set to  0.000000
10/25/2010	12:59:34 PM	BCl3 MFC set to  0.000000
10/25/2010	12:59:34 PM	PHl3 MFC set to  0.000000
10/25/2010	12:59:34 PM	SiCl4 MFC set to  0.000000
10/25/2010	12:59:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	12:59:34 PM	Tube furnace set to 0
10/25/2010	1:00:34 PM	H2 valve closed
10/25/2010	1:00:34 PM	BCl3 valve closed
10/25/2010	1:00:34 PM	PH3 valve closed
10/25/2010	1:00:34 PM	SiCl4 pre valve closed
10/25/2010	1:00:34 PM	SiCl4 post valve closed
10/25/2010	1:00:34 PM	Bubbler valve closed
10/25/2010	1:00:34 PM	Helium valve opened
10/25/2010	1:00:34 PM	Main Vac valve opened
10/25/2010	1:00:34 PM	Bypass valve opened
10/25/2010	1:00:34 PM	Helium MFC set to  100.000000
10/25/2010	1:00:34 PM	H2 MFC set to  0.000000
10/25/2010	1:00:34 PM	BCl3 MFC set to  0.000000
10/25/2010	1:00:34 PM	PHl3 MFC set to  0.000000
10/25/2010	1:00:34 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:00:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:00:34 PM	Tube furnace set to 0
10/25/2010	1:01:34 PM	Helium valve closed
10/25/2010	1:01:34 PM	H2 valve closed
10/25/2010	1:01:34 PM	BCl3 valve closed
10/25/2010	1:01:34 PM	PH3 valve closed
10/25/2010	1:01:34 PM	SiCl4 pre valve closed
10/25/2010	1:01:34 PM	SiCl4 post valve closed
10/25/2010	1:01:34 PM	Bubbler valve closed
10/25/2010	1:01:34 PM	Main Vac valve opened
10/25/2010	1:01:34 PM	Bypass valve opened
10/25/2010	1:01:34 PM	Helium MFC set to  0.000000
10/25/2010	1:01:34 PM	H2 MFC set to  0.000000
10/25/2010	1:01:34 PM	BCl3 MFC set to  0.000000
10/25/2010	1:01:34 PM	PHl3 MFC set to  0.000000
10/25/2010	1:01:34 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:01:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:01:35 PM	Tube furnace set to 0
10/25/2010	1:02:35 PM	H2 valve closed
10/25/2010	1:02:35 PM	BCl3 valve closed
10/25/2010	1:02:35 PM	PH3 valve closed
10/25/2010	1:02:35 PM	SiCl4 pre valve closed
10/25/2010	1:02:35 PM	SiCl4 post valve closed
10/25/2010	1:02:35 PM	Bubbler valve closed
10/25/2010	1:02:35 PM	Helium valve opened
10/25/2010	1:02:35 PM	Main Vac valve opened
10/25/2010	1:02:35 PM	Bypass valve opened
10/25/2010	1:02:35 PM	Helium MFC set to  100.000000
10/25/2010	1:02:35 PM	H2 MFC set to  0.000000
10/25/2010	1:02:35 PM	BCl3 MFC set to  0.000000
10/25/2010	1:02:35 PM	PHl3 MFC set to  0.000000
10/25/2010	1:02:35 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:02:35 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:02:35 PM	Tube furnace set to 0
10/25/2010	1:03:35 PM	Helium valve closed
10/25/2010	1:03:35 PM	H2 valve closed
10/25/2010	1:03:35 PM	BCl3 valve closed
10/25/2010	1:03:35 PM	PH3 valve closed
10/25/2010	1:03:35 PM	SiCl4 pre valve closed
10/25/2010	1:03:35 PM	SiCl4 post valve closed
10/25/2010	1:03:35 PM	Bubbler valve closed
10/25/2010	1:03:35 PM	Main Vac valve opened
10/25/2010	1:03:35 PM	Bypass valve opened
10/25/2010	1:03:35 PM	Helium MFC set to  0.000000
10/25/2010	1:03:35 PM	H2 MFC set to  0.000000
10/25/2010	1:03:35 PM	BCl3 MFC set to  0.000000
10/25/2010	1:03:35 PM	PHl3 MFC set to  0.000000
10/25/2010	1:03:35 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:03:35 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:03:35 PM	Tube furnace set to 0
10/25/2010	1:04:35 PM	H2 valve closed
10/25/2010	1:04:35 PM	BCl3 valve closed
10/25/2010	1:04:35 PM	PH3 valve closed
10/25/2010	1:04:35 PM	SiCl4 pre valve closed
10/25/2010	1:04:35 PM	SiCl4 post valve closed
10/25/2010	1:04:35 PM	Bubbler valve closed
10/25/2010	1:04:35 PM	Helium valve opened
10/25/2010	1:04:35 PM	Main Vac valve opened
10/25/2010	1:04:35 PM	Bypass valve opened
10/25/2010	1:04:35 PM	Helium MFC set to  100.000000
10/25/2010	1:04:35 PM	H2 MFC set to  0.000000
10/25/2010	1:04:35 PM	BCl3 MFC set to  0.000000
10/25/2010	1:04:35 PM	PHl3 MFC set to  0.000000
10/25/2010	1:04:35 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:04:35 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:04:35 PM	Tube furnace set to 0
10/25/2010	1:05:35 PM	Helium valve closed
10/25/2010	1:05:35 PM	H2 valve closed
10/25/2010	1:05:35 PM	BCl3 valve closed
10/25/2010	1:05:35 PM	PH3 valve closed
10/25/2010	1:05:35 PM	SiCl4 pre valve closed
10/25/2010	1:05:35 PM	SiCl4 post valve closed
10/25/2010	1:05:35 PM	Bubbler valve closed
10/25/2010	1:05:35 PM	Main Vac valve opened
10/25/2010	1:05:35 PM	Bypass valve opened
10/25/2010	1:05:35 PM	Helium MFC set to  0.000000
10/25/2010	1:05:35 PM	H2 MFC set to  0.000000
10/25/2010	1:05:35 PM	BCl3 MFC set to  0.000000
10/25/2010	1:05:35 PM	PHl3 MFC set to  0.000000
10/25/2010	1:05:35 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:05:35 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:05:35 PM	Tube furnace set to 0
10/25/2010	1:06:35 PM	H2 valve closed
10/25/2010	1:06:35 PM	BCl3 valve closed
10/25/2010	1:06:35 PM	PH3 valve closed
10/25/2010	1:06:35 PM	SiCl4 pre valve closed
10/25/2010	1:06:35 PM	SiCl4 post valve closed
10/25/2010	1:06:35 PM	Bubbler valve closed
10/25/2010	1:06:35 PM	Helium valve opened
10/25/2010	1:06:35 PM	Main Vac valve opened
10/25/2010	1:06:35 PM	Bypass valve opened
10/25/2010	1:06:35 PM	Helium MFC set to  100.000000
10/25/2010	1:06:35 PM	H2 MFC set to  0.000000
10/25/2010	1:06:35 PM	BCl3 MFC set to  0.000000
10/25/2010	1:06:35 PM	PHl3 MFC set to  0.000000
10/25/2010	1:06:35 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:06:35 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:06:36 PM	Tube furnace set to 0
10/25/2010	1:07:36 PM	Helium valve closed
10/25/2010	1:07:36 PM	H2 valve closed
10/25/2010	1:07:36 PM	BCl3 valve closed
10/25/2010	1:07:36 PM	PH3 valve closed
10/25/2010	1:07:36 PM	SiCl4 pre valve closed
10/25/2010	1:07:36 PM	SiCl4 post valve closed
10/25/2010	1:07:36 PM	Bubbler valve closed
10/25/2010	1:07:36 PM	Main Vac valve opened
10/25/2010	1:07:36 PM	Bypass valve opened
10/25/2010	1:07:36 PM	Helium MFC set to  0.000000
10/25/2010	1:07:36 PM	H2 MFC set to  0.000000
10/25/2010	1:07:36 PM	BCl3 MFC set to  0.000000
10/25/2010	1:07:36 PM	PHl3 MFC set to  0.000000
10/25/2010	1:07:36 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:07:36 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:07:36 PM	Tube furnace set to 0
10/25/2010	1:08:36 PM	H2 valve closed
10/25/2010	1:08:36 PM	BCl3 valve closed
10/25/2010	1:08:36 PM	PH3 valve closed
10/25/2010	1:08:36 PM	SiCl4 pre valve closed
10/25/2010	1:08:36 PM	SiCl4 post valve closed
10/25/2010	1:08:36 PM	Bubbler valve closed
10/25/2010	1:08:36 PM	Helium valve opened
10/25/2010	1:08:36 PM	Main Vac valve opened
10/25/2010	1:08:36 PM	Bypass valve opened
10/25/2010	1:08:36 PM	Helium MFC set to  100.000000
10/25/2010	1:08:36 PM	H2 MFC set to  0.000000
10/25/2010	1:08:36 PM	BCl3 MFC set to  0.000000
10/25/2010	1:08:36 PM	PHl3 MFC set to  0.000000
10/25/2010	1:08:36 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:08:36 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:08:36 PM	Tube furnace set to 0
10/25/2010	1:09:36 PM	Helium valve closed
10/25/2010	1:09:36 PM	H2 valve closed
10/25/2010	1:09:36 PM	BCl3 valve closed
10/25/2010	1:09:36 PM	PH3 valve closed
10/25/2010	1:09:36 PM	SiCl4 pre valve closed
10/25/2010	1:09:36 PM	SiCl4 post valve closed
10/25/2010	1:09:36 PM	Bubbler valve closed
10/25/2010	1:09:36 PM	Main Vac valve opened
10/25/2010	1:09:36 PM	Bypass valve opened
10/25/2010	1:09:36 PM	Helium MFC set to  0.000000
10/25/2010	1:09:36 PM	H2 MFC set to  0.000000
10/25/2010	1:09:36 PM	BCl3 MFC set to  0.000000
10/25/2010	1:09:36 PM	PHl3 MFC set to  0.000000
10/25/2010	1:09:36 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:09:36 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:09:36 PM	Tube furnace set to 0
10/25/2010	1:09:37 PM	Run finished at 1:09 PM
10/25/2010	1:09:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	1:24:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	1:24:30 PM	Recipe started at 1:24 PM
10/25/2010	1:24:30 PM	Helium valve closed
10/25/2010	1:24:30 PM	H2 valve closed
10/25/2010	1:24:30 PM	BCl3 valve closed
10/25/2010	1:24:30 PM	PH3 valve closed
10/25/2010	1:24:30 PM	SiCl4 pre valve closed
10/25/2010	1:24:30 PM	SiCl4 post valve closed
10/25/2010	1:24:30 PM	Main Vac valve closed
10/25/2010	1:24:30 PM	Bubbler valve closed
10/25/2010	1:24:30 PM	Bypass valve opened
10/25/2010	1:24:30 PM	Helium MFC set to  0.000000
10/25/2010	1:24:30 PM	H2 MFC set to  0.000000
10/25/2010	1:24:30 PM	BCl3 MFC set to  0.000000
10/25/2010	1:24:30 PM	PHl3 MFC set to  0.000000
10/25/2010	1:24:30 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:24:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:24:31 PM	Tube furnace set to 0
10/25/2010	1:24:31 PM	Helium valve closed
10/25/2010	1:24:31 PM	H2 valve closed
10/25/2010	1:24:31 PM	BCl3 valve closed
10/25/2010	1:24:31 PM	PH3 valve closed
10/25/2010	1:24:31 PM	SiCl4 pre valve closed
10/25/2010	1:24:31 PM	SiCl4 post valve closed
10/25/2010	1:24:31 PM	Bubbler valve closed
10/25/2010	1:24:31 PM	Main Vac valve opened
10/25/2010	1:24:31 PM	Bypass valve opened
10/25/2010	1:24:31 PM	Helium MFC set to  0.000000
10/25/2010	1:24:31 PM	H2 MFC set to  0.000000
10/25/2010	1:24:31 PM	BCl3 MFC set to  0.000000
10/25/2010	1:24:31 PM	PHl3 MFC set to  0.000000
10/25/2010	1:24:31 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:24:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:24:31 PM	Tube furnace set to 0
10/25/2010	1:25:31 PM	H2 valve closed
10/25/2010	1:25:31 PM	BCl3 valve closed
10/25/2010	1:25:31 PM	PH3 valve closed
10/25/2010	1:25:31 PM	SiCl4 pre valve closed
10/25/2010	1:25:31 PM	SiCl4 post valve closed
10/25/2010	1:25:31 PM	Bubbler valve closed
10/25/2010	1:25:31 PM	Helium valve opened
10/25/2010	1:25:31 PM	Main Vac valve opened
10/25/2010	1:25:31 PM	Bypass valve opened
10/25/2010	1:25:31 PM	Helium MFC set to  100.000000
10/25/2010	1:25:31 PM	H2 MFC set to  0.000000
10/25/2010	1:25:31 PM	BCl3 MFC set to  0.000000
10/25/2010	1:25:31 PM	PHl3 MFC set to  0.000000
10/25/2010	1:25:31 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:25:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:25:31 PM	Tube furnace set to 0
10/25/2010	1:26:31 PM	Helium valve closed
10/25/2010	1:26:31 PM	H2 valve closed
10/25/2010	1:26:31 PM	BCl3 valve closed
10/25/2010	1:26:31 PM	PH3 valve closed
10/25/2010	1:26:31 PM	SiCl4 pre valve closed
10/25/2010	1:26:31 PM	SiCl4 post valve closed
10/25/2010	1:26:31 PM	Bubbler valve closed
10/25/2010	1:26:31 PM	Main Vac valve opened
10/25/2010	1:26:31 PM	Bypass valve opened
10/25/2010	1:26:31 PM	Helium MFC set to  0.000000
10/25/2010	1:26:31 PM	H2 MFC set to  0.000000
10/25/2010	1:26:31 PM	BCl3 MFC set to  0.000000
10/25/2010	1:26:31 PM	PHl3 MFC set to  0.000000
10/25/2010	1:26:31 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:26:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:26:31 PM	Tube furnace set to 0
10/25/2010	1:27:31 PM	H2 valve closed
10/25/2010	1:27:31 PM	BCl3 valve closed
10/25/2010	1:27:31 PM	PH3 valve closed
10/25/2010	1:27:31 PM	SiCl4 pre valve closed
10/25/2010	1:27:31 PM	SiCl4 post valve closed
10/25/2010	1:27:31 PM	Bubbler valve closed
10/25/2010	1:27:31 PM	Helium valve opened
10/25/2010	1:27:31 PM	Main Vac valve opened
10/25/2010	1:27:31 PM	Bypass valve opened
10/25/2010	1:27:31 PM	Helium MFC set to  100.000000
10/25/2010	1:27:31 PM	H2 MFC set to  0.000000
10/25/2010	1:27:31 PM	BCl3 MFC set to  0.000000
10/25/2010	1:27:31 PM	PHl3 MFC set to  0.000000
10/25/2010	1:27:31 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:27:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:27:32 PM	Tube furnace set to 0
10/25/2010	1:28:32 PM	Helium valve closed
10/25/2010	1:28:32 PM	H2 valve closed
10/25/2010	1:28:32 PM	BCl3 valve closed
10/25/2010	1:28:32 PM	PH3 valve closed
10/25/2010	1:28:32 PM	SiCl4 pre valve closed
10/25/2010	1:28:32 PM	SiCl4 post valve closed
10/25/2010	1:28:32 PM	Bubbler valve closed
10/25/2010	1:28:32 PM	Main Vac valve opened
10/25/2010	1:28:32 PM	Bypass valve opened
10/25/2010	1:28:32 PM	Helium MFC set to  0.000000
10/25/2010	1:28:32 PM	H2 MFC set to  0.000000
10/25/2010	1:28:32 PM	BCl3 MFC set to  0.000000
10/25/2010	1:28:32 PM	PHl3 MFC set to  0.000000
10/25/2010	1:28:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:28:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:28:32 PM	Tube furnace set to 0
10/25/2010	1:29:32 PM	H2 valve closed
10/25/2010	1:29:32 PM	BCl3 valve closed
10/25/2010	1:29:32 PM	PH3 valve closed
10/25/2010	1:29:32 PM	SiCl4 pre valve closed
10/25/2010	1:29:32 PM	SiCl4 post valve closed
10/25/2010	1:29:32 PM	Bubbler valve closed
10/25/2010	1:29:32 PM	Helium valve opened
10/25/2010	1:29:32 PM	Main Vac valve opened
10/25/2010	1:29:32 PM	Bypass valve opened
10/25/2010	1:29:32 PM	Helium MFC set to  100.000000
10/25/2010	1:29:32 PM	H2 MFC set to  0.000000
10/25/2010	1:29:32 PM	BCl3 MFC set to  0.000000
10/25/2010	1:29:32 PM	PHl3 MFC set to  0.000000
10/25/2010	1:29:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:29:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:29:32 PM	Tube furnace set to 0
10/25/2010	1:30:32 PM	Helium valve closed
10/25/2010	1:30:32 PM	H2 valve closed
10/25/2010	1:30:32 PM	BCl3 valve closed
10/25/2010	1:30:32 PM	PH3 valve closed
10/25/2010	1:30:32 PM	SiCl4 pre valve closed
10/25/2010	1:30:32 PM	SiCl4 post valve closed
10/25/2010	1:30:32 PM	Bubbler valve closed
10/25/2010	1:30:32 PM	Main Vac valve opened
10/25/2010	1:30:32 PM	Bypass valve opened
10/25/2010	1:30:32 PM	Helium MFC set to  0.000000
10/25/2010	1:30:32 PM	H2 MFC set to  0.000000
10/25/2010	1:30:32 PM	BCl3 MFC set to  0.000000
10/25/2010	1:30:32 PM	PHl3 MFC set to  0.000000
10/25/2010	1:30:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:30:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:30:32 PM	Tube furnace set to 0
10/25/2010	1:31:32 PM	H2 valve closed
10/25/2010	1:31:32 PM	BCl3 valve closed
10/25/2010	1:31:32 PM	PH3 valve closed
10/25/2010	1:31:32 PM	SiCl4 pre valve closed
10/25/2010	1:31:32 PM	SiCl4 post valve closed
10/25/2010	1:31:32 PM	Bubbler valve closed
10/25/2010	1:31:32 PM	Helium valve opened
10/25/2010	1:31:32 PM	Main Vac valve opened
10/25/2010	1:31:32 PM	Bypass valve opened
10/25/2010	1:31:32 PM	Helium MFC set to  100.000000
10/25/2010	1:31:32 PM	H2 MFC set to  0.000000
10/25/2010	1:31:32 PM	BCl3 MFC set to  0.000000
10/25/2010	1:31:32 PM	PHl3 MFC set to  0.000000
10/25/2010	1:31:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:31:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:31:32 PM	Tube furnace set to 0
10/25/2010	1:32:32 PM	Helium valve closed
10/25/2010	1:32:32 PM	H2 valve closed
10/25/2010	1:32:32 PM	BCl3 valve closed
10/25/2010	1:32:32 PM	PH3 valve closed
10/25/2010	1:32:32 PM	SiCl4 pre valve closed
10/25/2010	1:32:32 PM	SiCl4 post valve closed
10/25/2010	1:32:32 PM	Bubbler valve closed
10/25/2010	1:32:32 PM	Main Vac valve opened
10/25/2010	1:32:32 PM	Bypass valve opened
10/25/2010	1:32:32 PM	Helium MFC set to  0.000000
10/25/2010	1:32:32 PM	H2 MFC set to  0.000000
10/25/2010	1:32:32 PM	BCl3 MFC set to  0.000000
10/25/2010	1:32:32 PM	PHl3 MFC set to  0.000000
10/25/2010	1:32:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:32:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:32:33 PM	Tube furnace set to 0
10/25/2010	1:33:33 PM	H2 valve closed
10/25/2010	1:33:33 PM	BCl3 valve closed
10/25/2010	1:33:33 PM	PH3 valve closed
10/25/2010	1:33:33 PM	SiCl4 pre valve closed
10/25/2010	1:33:33 PM	SiCl4 post valve closed
10/25/2010	1:33:33 PM	Bubbler valve closed
10/25/2010	1:33:33 PM	Helium valve opened
10/25/2010	1:33:33 PM	Main Vac valve opened
10/25/2010	1:33:33 PM	Bypass valve opened
10/25/2010	1:33:33 PM	Helium MFC set to  100.000000
10/25/2010	1:33:33 PM	H2 MFC set to  0.000000
10/25/2010	1:33:33 PM	BCl3 MFC set to  0.000000
10/25/2010	1:33:33 PM	PHl3 MFC set to  0.000000
10/25/2010	1:33:33 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:33:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:33:33 PM	Tube furnace set to 0
10/25/2010	1:34:33 PM	Helium valve closed
10/25/2010	1:34:33 PM	H2 valve closed
10/25/2010	1:34:33 PM	BCl3 valve closed
10/25/2010	1:34:33 PM	PH3 valve closed
10/25/2010	1:34:33 PM	SiCl4 pre valve closed
10/25/2010	1:34:33 PM	SiCl4 post valve closed
10/25/2010	1:34:33 PM	Bubbler valve closed
10/25/2010	1:34:33 PM	Main Vac valve opened
10/25/2010	1:34:33 PM	Bypass valve opened
10/25/2010	1:34:33 PM	Helium MFC set to  0.000000
10/25/2010	1:34:33 PM	H2 MFC set to  0.000000
10/25/2010	1:34:33 PM	BCl3 MFC set to  0.000000
10/25/2010	1:34:33 PM	PHl3 MFC set to  0.000000
10/25/2010	1:34:33 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:34:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:34:33 PM	Tube furnace set to 0
10/25/2010	1:35:33 PM	H2 valve closed
10/25/2010	1:35:33 PM	BCl3 valve closed
10/25/2010	1:35:33 PM	PH3 valve closed
10/25/2010	1:35:33 PM	SiCl4 pre valve closed
10/25/2010	1:35:33 PM	SiCl4 post valve closed
10/25/2010	1:35:33 PM	Bubbler valve closed
10/25/2010	1:35:33 PM	Helium valve opened
10/25/2010	1:35:33 PM	Main Vac valve opened
10/25/2010	1:35:33 PM	Bypass valve opened
10/25/2010	1:35:33 PM	Helium MFC set to  100.000000
10/25/2010	1:35:33 PM	H2 MFC set to  0.000000
10/25/2010	1:35:33 PM	BCl3 MFC set to  0.000000
10/25/2010	1:35:33 PM	PHl3 MFC set to  0.000000
10/25/2010	1:35:33 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:35:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:35:33 PM	Tube furnace set to 0
10/25/2010	1:36:33 PM	Helium valve closed
10/25/2010	1:36:33 PM	H2 valve closed
10/25/2010	1:36:33 PM	BCl3 valve closed
10/25/2010	1:36:33 PM	PH3 valve closed
10/25/2010	1:36:33 PM	SiCl4 pre valve closed
10/25/2010	1:36:33 PM	SiCl4 post valve closed
10/25/2010	1:36:33 PM	Bubbler valve closed
10/25/2010	1:36:33 PM	Main Vac valve opened
10/25/2010	1:36:33 PM	Bypass valve opened
10/25/2010	1:36:33 PM	Helium MFC set to  0.000000
10/25/2010	1:36:33 PM	H2 MFC set to  0.000000
10/25/2010	1:36:33 PM	BCl3 MFC set to  0.000000
10/25/2010	1:36:33 PM	PHl3 MFC set to  0.000000
10/25/2010	1:36:33 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:36:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:36:33 PM	Tube furnace set to 0
10/25/2010	1:37:33 PM	H2 valve closed
10/25/2010	1:37:33 PM	BCl3 valve closed
10/25/2010	1:37:33 PM	PH3 valve closed
10/25/2010	1:37:33 PM	SiCl4 pre valve closed
10/25/2010	1:37:33 PM	SiCl4 post valve closed
10/25/2010	1:37:33 PM	Bubbler valve closed
10/25/2010	1:37:33 PM	Helium valve opened
10/25/2010	1:37:33 PM	Main Vac valve opened
10/25/2010	1:37:33 PM	Bypass valve opened
10/25/2010	1:37:33 PM	Helium MFC set to  100.000000
10/25/2010	1:37:33 PM	H2 MFC set to  0.000000
10/25/2010	1:37:33 PM	BCl3 MFC set to  0.000000
10/25/2010	1:37:33 PM	PHl3 MFC set to  0.000000
10/25/2010	1:37:33 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:37:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:37:34 PM	Tube furnace set to 0
10/25/2010	1:38:34 PM	Helium valve closed
10/25/2010	1:38:34 PM	H2 valve closed
10/25/2010	1:38:34 PM	BCl3 valve closed
10/25/2010	1:38:34 PM	PH3 valve closed
10/25/2010	1:38:34 PM	SiCl4 pre valve closed
10/25/2010	1:38:34 PM	SiCl4 post valve closed
10/25/2010	1:38:34 PM	Bubbler valve closed
10/25/2010	1:38:34 PM	Main Vac valve opened
10/25/2010	1:38:34 PM	Bypass valve opened
10/25/2010	1:38:34 PM	Helium MFC set to  0.000000
10/25/2010	1:38:34 PM	H2 MFC set to  0.000000
10/25/2010	1:38:34 PM	BCl3 MFC set to  0.000000
10/25/2010	1:38:34 PM	PHl3 MFC set to  0.000000
10/25/2010	1:38:34 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:38:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:38:34 PM	Tube furnace set to 0
10/25/2010	1:39:34 PM	H2 valve closed
10/25/2010	1:39:34 PM	BCl3 valve closed
10/25/2010	1:39:34 PM	PH3 valve closed
10/25/2010	1:39:34 PM	SiCl4 pre valve closed
10/25/2010	1:39:34 PM	SiCl4 post valve closed
10/25/2010	1:39:34 PM	Bubbler valve closed
10/25/2010	1:39:34 PM	Helium valve opened
10/25/2010	1:39:34 PM	Main Vac valve opened
10/25/2010	1:39:34 PM	Bypass valve opened
10/25/2010	1:39:34 PM	Helium MFC set to  100.000000
10/25/2010	1:39:34 PM	H2 MFC set to  0.000000
10/25/2010	1:39:34 PM	BCl3 MFC set to  0.000000
10/25/2010	1:39:34 PM	PHl3 MFC set to  0.000000
10/25/2010	1:39:34 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:39:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:39:34 PM	Tube furnace set to 0
10/25/2010	1:40:34 PM	Helium valve closed
10/25/2010	1:40:34 PM	H2 valve closed
10/25/2010	1:40:34 PM	BCl3 valve closed
10/25/2010	1:40:34 PM	PH3 valve closed
10/25/2010	1:40:34 PM	SiCl4 pre valve closed
10/25/2010	1:40:34 PM	SiCl4 post valve closed
10/25/2010	1:40:34 PM	Bubbler valve closed
10/25/2010	1:40:34 PM	Main Vac valve opened
10/25/2010	1:40:34 PM	Bypass valve opened
10/25/2010	1:40:34 PM	Helium MFC set to  0.000000
10/25/2010	1:40:34 PM	H2 MFC set to  0.000000
10/25/2010	1:40:34 PM	BCl3 MFC set to  0.000000
10/25/2010	1:40:34 PM	PHl3 MFC set to  0.000000
10/25/2010	1:40:34 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:40:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:40:34 PM	Tube furnace set to 0
10/25/2010	1:41:34 PM	H2 valve closed
10/25/2010	1:41:34 PM	BCl3 valve closed
10/25/2010	1:41:34 PM	PH3 valve closed
10/25/2010	1:41:34 PM	SiCl4 pre valve closed
10/25/2010	1:41:34 PM	SiCl4 post valve closed
10/25/2010	1:41:34 PM	Bubbler valve closed
10/25/2010	1:41:34 PM	Helium valve opened
10/25/2010	1:41:34 PM	Main Vac valve opened
10/25/2010	1:41:34 PM	Bypass valve opened
10/25/2010	1:41:34 PM	Helium MFC set to  100.000000
10/25/2010	1:41:34 PM	H2 MFC set to  0.000000
10/25/2010	1:41:34 PM	BCl3 MFC set to  0.000000
10/25/2010	1:41:34 PM	PHl3 MFC set to  0.000000
10/25/2010	1:41:34 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:41:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:41:34 PM	Tube furnace set to 0
10/25/2010	1:42:34 PM	Helium valve closed
10/25/2010	1:42:34 PM	H2 valve closed
10/25/2010	1:42:34 PM	BCl3 valve closed
10/25/2010	1:42:34 PM	PH3 valve closed
10/25/2010	1:42:34 PM	SiCl4 pre valve closed
10/25/2010	1:42:34 PM	SiCl4 post valve closed
10/25/2010	1:42:34 PM	Bubbler valve closed
10/25/2010	1:42:34 PM	Main Vac valve opened
10/25/2010	1:42:34 PM	Bypass valve opened
10/25/2010	1:42:34 PM	Helium MFC set to  0.000000
10/25/2010	1:42:34 PM	H2 MFC set to  0.000000
10/25/2010	1:42:34 PM	BCl3 MFC set to  0.000000
10/25/2010	1:42:34 PM	PHl3 MFC set to  0.000000
10/25/2010	1:42:34 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:42:34 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:42:34 PM	Tube furnace set to 0
10/25/2010	1:43:35 PM	H2 valve closed
10/25/2010	1:43:35 PM	BCl3 valve closed
10/25/2010	1:43:35 PM	PH3 valve closed
10/25/2010	1:43:35 PM	SiCl4 pre valve closed
10/25/2010	1:43:35 PM	SiCl4 post valve closed
10/25/2010	1:43:35 PM	Bubbler valve closed
10/25/2010	1:43:35 PM	Helium valve opened
10/25/2010	1:43:35 PM	Main Vac valve opened
10/25/2010	1:43:35 PM	Bypass valve opened
10/25/2010	1:43:35 PM	Helium MFC set to  100.000000
10/25/2010	1:43:35 PM	H2 MFC set to  0.000000
10/25/2010	1:43:35 PM	BCl3 MFC set to  0.000000
10/25/2010	1:43:35 PM	PHl3 MFC set to  0.000000
10/25/2010	1:43:35 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:43:35 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:43:35 PM	Tube furnace set to 0
10/25/2010	1:44:35 PM	Helium valve closed
10/25/2010	1:44:35 PM	H2 valve closed
10/25/2010	1:44:35 PM	BCl3 valve closed
10/25/2010	1:44:35 PM	PH3 valve closed
10/25/2010	1:44:35 PM	SiCl4 pre valve closed
10/25/2010	1:44:35 PM	SiCl4 post valve closed
10/25/2010	1:44:35 PM	Bubbler valve closed
10/25/2010	1:44:35 PM	Main Vac valve opened
10/25/2010	1:44:35 PM	Bypass valve opened
10/25/2010	1:44:35 PM	Helium MFC set to  0.000000
10/25/2010	1:44:35 PM	H2 MFC set to  0.000000
10/25/2010	1:44:35 PM	BCl3 MFC set to  0.000000
10/25/2010	1:44:35 PM	PHl3 MFC set to  0.000000
10/25/2010	1:44:35 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:44:35 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:44:35 PM	Tube furnace set to 0
10/25/2010	1:44:36 PM	Run finished at 1:44 PM
10/25/2010	1:44:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	1:47:57 PM	Recipe started at 1:47 PM
10/25/2010	1:47:57 PM	Helium valve closed
10/25/2010	1:47:57 PM	BCl3 valve closed
10/25/2010	1:47:57 PM	PH3 valve closed
10/25/2010	1:47:57 PM	SiCl4 pre valve closed
10/25/2010	1:47:57 PM	SiCl4 post valve closed
10/25/2010	1:47:57 PM	Main Vac valve closed
10/25/2010	1:47:57 PM	Bypass valve closed
10/25/2010	1:47:57 PM	Bubbler valve closed
10/25/2010	1:47:57 PM	H2 valve opened
10/25/2010	1:47:57 PM	Helium MFC set to  0.000000
10/25/2010	1:47:57 PM	H2 MFC set to  500.000000
10/25/2010	1:47:57 PM	BCl3 MFC set to  0.000000
10/25/2010	1:47:57 PM	PHl3 MFC set to  0.000000
10/25/2010	1:47:57 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:47:57 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:47:58 PM	Tube furnace set to 0
10/25/2010	1:49:16 PM	Helium valve closed
10/25/2010	1:49:16 PM	BCl3 valve closed
10/25/2010	1:49:16 PM	PH3 valve closed
10/25/2010	1:49:16 PM	SiCl4 pre valve closed
10/25/2010	1:49:16 PM	SiCl4 post valve closed
10/25/2010	1:49:16 PM	Main Vac valve closed
10/25/2010	1:49:16 PM	Bypass valve closed
10/25/2010	1:49:16 PM	H2 valve opened
10/25/2010	1:49:16 PM	Bubbler valve opened
10/25/2010	1:49:16 PM	Helium MFC set to  0.000000
10/25/2010	1:49:16 PM	H2 MFC set to  500.000000
10/25/2010	1:49:16 PM	BCl3 MFC set to  0.000000
10/25/2010	1:49:16 PM	PHl3 MFC set to  0.000000
10/25/2010	1:49:16 PM	SiCl4 MFC set to  0.000000
10/25/2010	1:49:16 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	1:49:16 PM	Tube furnace set to 1000
10/25/2010	2:09:16 PM	Helium valve closed
10/25/2010	2:09:16 PM	BCl3 valve closed
10/25/2010	2:09:16 PM	PH3 valve closed
10/25/2010	2:09:16 PM	Main Vac valve closed
10/25/2010	2:09:16 PM	Bypass valve closed
10/25/2010	2:09:16 PM	H2 valve opened
10/25/2010	2:09:16 PM	SiCl4 pre valve opened
10/25/2010	2:09:16 PM	SiCl4 post valve opened
10/25/2010	2:09:16 PM	Bubbler valve opened
10/25/2010	2:09:16 PM	Helium MFC set to  0.000000
10/25/2010	2:09:16 PM	H2 MFC set to  500.000000
10/25/2010	2:09:16 PM	BCl3 MFC set to  0.000000
10/25/2010	2:09:16 PM	PHl3 MFC set to  0.000000
10/25/2010	2:09:16 PM	SiCl4 MFC set to  50.000000
10/25/2010	2:09:16 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	2:09:16 PM	Tube furnace set to 1000
10/25/2010	2:29:16 PM	H2 valve closed
10/25/2010	2:29:16 PM	BCl3 valve closed
10/25/2010	2:29:16 PM	PH3 valve closed
10/25/2010	2:29:16 PM	SiCl4 pre valve closed
10/25/2010	2:29:16 PM	SiCl4 post valve closed
10/25/2010	2:29:16 PM	Main Vac valve closed
10/25/2010	2:29:16 PM	Bypass valve closed
10/25/2010	2:29:16 PM	Helium valve opened
10/25/2010	2:29:16 PM	Bubbler valve opened
10/25/2010	2:29:16 PM	Helium MFC set to  500.000000
10/25/2010	2:29:16 PM	H2 MFC set to  0.000000
10/25/2010	2:29:16 PM	BCl3 MFC set to  0.000000
10/25/2010	2:29:16 PM	PHl3 MFC set to  0.000000
10/25/2010	2:29:16 PM	SiCl4 MFC set to  0.000000
10/25/2010	2:29:16 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	2:29:16 PM	Tube furnace set to 0
10/25/2010	2:49:16 PM	Helium valve closed
10/25/2010	2:49:16 PM	H2 valve closed
10/25/2010	2:49:16 PM	BCl3 valve closed
10/25/2010	2:49:16 PM	PH3 valve closed
10/25/2010	2:49:16 PM	SiCl4 pre valve closed
10/25/2010	2:49:16 PM	SiCl4 post valve closed
10/25/2010	2:49:16 PM	Main Vac valve closed
10/25/2010	2:49:16 PM	Bypass valve closed
10/25/2010	2:49:16 PM	Bubbler valve closed
10/25/2010	2:49:16 PM	Helium MFC set to  0.000000
10/25/2010	2:49:16 PM	H2 MFC set to  0.000000
10/25/2010	2:49:16 PM	BCl3 MFC set to  0.000000
10/25/2010	2:49:16 PM	PHl3 MFC set to  0.000000
10/25/2010	2:49:16 PM	SiCl4 MFC set to  0.000000
10/25/2010	2:49:16 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	2:49:17 PM	Tube furnace set to 0
10/25/2010	2:49:17 PM	Run finished at 2:49 PM
10/25/2010	5:46:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	5:46:33 PM	Recipe started at 5:46 PM
10/25/2010	5:46:33 PM	H2 valve closed
10/25/2010	5:46:33 PM	BCl3 valve closed
10/25/2010	5:46:33 PM	PH3 valve closed
10/25/2010	5:46:33 PM	SiCl4 pre valve closed
10/25/2010	5:46:33 PM	SiCl4 post valve closed
10/25/2010	5:46:33 PM	Main Vac valve closed
10/25/2010	5:46:33 PM	Bypass valve closed
10/25/2010	5:46:33 PM	Bubbler valve closed
10/25/2010	5:46:33 PM	Helium valve opened
10/25/2010	5:46:33 PM	Helium MFC set to  500.000000
10/25/2010	5:46:33 PM	H2 MFC set to  0.000000
10/25/2010	5:46:33 PM	BCl3 MFC set to  0.000000
10/25/2010	5:46:33 PM	PHl3 MFC set to  0.000000
10/25/2010	5:46:33 PM	SiCl4 MFC set to  0.000000
10/25/2010	5:46:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	5:46:33 PM	Tube furnace set to 0
10/25/2010	5:46:44 PM	Helium valve closed
10/25/2010	5:46:44 PM	H2 valve closed
10/25/2010	5:46:44 PM	BCl3 valve closed
10/25/2010	5:46:44 PM	PH3 valve closed
10/25/2010	5:46:44 PM	SiCl4 pre valve closed
10/25/2010	5:46:44 PM	SiCl4 post valve closed
10/25/2010	5:46:44 PM	Main Vac valve closed
10/25/2010	5:46:44 PM	Bypass valve closed
10/25/2010	5:46:44 PM	Bubbler valve closed
10/25/2010	5:46:44 PM	Helium MFC set to  0.000000
10/25/2010	5:46:44 PM	H2 MFC set to  0.000000
10/25/2010	5:46:44 PM	BCl3 MFC set to  0.000000
10/25/2010	5:46:44 PM	PHl3 MFC set to  0.000000
10/25/2010	5:46:44 PM	SiCl4 MFC set to  0.000000
10/25/2010	5:46:44 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	5:46:44 PM	Tube furnace set to 0
10/25/2010	5:46:44 PM	Run finished at 5:46 PM
10/25/2010	5:46:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	5:51:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	5:51:31 PM	Recipe started at 5:51 PM
10/25/2010	5:51:31 PM	Helium valve closed
10/25/2010	5:51:31 PM	H2 valve closed
10/25/2010	5:51:31 PM	BCl3 valve closed
10/25/2010	5:51:31 PM	PH3 valve closed
10/25/2010	5:51:31 PM	SiCl4 pre valve closed
10/25/2010	5:51:31 PM	SiCl4 post valve closed
10/25/2010	5:51:31 PM	Main Vac valve closed
10/25/2010	5:51:31 PM	Bubbler valve closed
10/25/2010	5:51:31 PM	Bypass valve opened
10/25/2010	5:51:31 PM	Helium MFC set to  0.000000
10/25/2010	5:51:31 PM	H2 MFC set to  0.000000
10/25/2010	5:51:31 PM	BCl3 MFC set to  0.000000
10/25/2010	5:51:31 PM	PHl3 MFC set to  0.000000
10/25/2010	5:51:31 PM	SiCl4 MFC set to  0.000000
10/25/2010	5:51:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	5:51:32 PM	Tube furnace set to 0
10/25/2010	5:52:25 PM	Helium valve closed
10/25/2010	5:52:25 PM	H2 valve closed
10/25/2010	5:52:25 PM	BCl3 valve closed
10/25/2010	5:52:25 PM	PH3 valve closed
10/25/2010	5:52:25 PM	SiCl4 pre valve closed
10/25/2010	5:52:25 PM	SiCl4 post valve closed
10/25/2010	5:52:25 PM	Bubbler valve closed
10/25/2010	5:52:25 PM	Main Vac valve opened
10/25/2010	5:52:25 PM	Bypass valve opened
10/25/2010	5:52:25 PM	Helium MFC set to  0.000000
10/25/2010	5:52:25 PM	H2 MFC set to  0.000000
10/25/2010	5:52:25 PM	BCl3 MFC set to  0.000000
10/25/2010	5:52:25 PM	PHl3 MFC set to  0.000000
10/25/2010	5:52:25 PM	SiCl4 MFC set to  0.000000
10/25/2010	5:52:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	5:52:25 PM	Tube furnace set to 0
10/25/2010	5:52:25 PM	Run finished at 5:52 PM
10/25/2010	5:52:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	5:55:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	5:55:16 PM	Recipe started at 5:55 PM
10/25/2010	5:55:17 PM	Helium valve closed
10/25/2010	5:55:17 PM	H2 valve closed
10/25/2010	5:55:17 PM	BCl3 valve closed
10/25/2010	5:55:17 PM	PH3 valve closed
10/25/2010	5:55:17 PM	SiCl4 pre valve closed
10/25/2010	5:55:17 PM	SiCl4 post valve closed
10/25/2010	5:55:17 PM	Main Vac valve closed
10/25/2010	5:55:17 PM	Bubbler valve closed
10/25/2010	5:55:17 PM	Bypass valve opened
10/25/2010	5:55:17 PM	Helium MFC set to  0.000000
10/25/2010	5:55:17 PM	H2 MFC set to  0.000000
10/25/2010	5:55:17 PM	BCl3 MFC set to  0.000000
10/25/2010	5:55:17 PM	PHl3 MFC set to  0.000000
10/25/2010	5:55:17 PM	SiCl4 MFC set to  0.000000
10/25/2010	5:55:17 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	5:55:17 PM	Tube furnace set to 0
10/25/2010	5:55:17 PM	Helium valve closed
10/25/2010	5:55:17 PM	H2 valve closed
10/25/2010	5:55:17 PM	BCl3 valve closed
10/25/2010	5:55:17 PM	PH3 valve closed
10/25/2010	5:55:17 PM	SiCl4 pre valve closed
10/25/2010	5:55:17 PM	SiCl4 post valve closed
10/25/2010	5:55:17 PM	Bubbler valve closed
10/25/2010	5:55:17 PM	Main Vac valve opened
10/25/2010	5:55:17 PM	Bypass valve opened
10/25/2010	5:55:17 PM	Helium MFC set to  0.000000
10/25/2010	5:55:17 PM	H2 MFC set to  0.000000
10/25/2010	5:55:17 PM	BCl3 MFC set to  0.000000
10/25/2010	5:55:17 PM	PHl3 MFC set to  0.000000
10/25/2010	5:55:17 PM	SiCl4 MFC set to  0.000000
10/25/2010	5:55:17 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	5:55:17 PM	Tube furnace set to 0
10/25/2010	5:56:17 PM	H2 valve closed
10/25/2010	5:56:17 PM	BCl3 valve closed
10/25/2010	5:56:17 PM	PH3 valve closed
10/25/2010	5:56:17 PM	SiCl4 pre valve closed
10/25/2010	5:56:17 PM	SiCl4 post valve closed
10/25/2010	5:56:17 PM	Bubbler valve closed
10/25/2010	5:56:17 PM	Helium valve opened
10/25/2010	5:56:17 PM	Main Vac valve opened
10/25/2010	5:56:17 PM	Bypass valve opened
10/25/2010	5:56:17 PM	Helium MFC set to  100.000000
10/25/2010	5:56:17 PM	H2 MFC set to  0.000000
10/25/2010	5:56:17 PM	BCl3 MFC set to  0.000000
10/25/2010	5:56:17 PM	PHl3 MFC set to  0.000000
10/25/2010	5:56:17 PM	SiCl4 MFC set to  0.000000
10/25/2010	5:56:17 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	5:56:17 PM	Tube furnace set to 0
10/25/2010	5:57:17 PM	Helium valve closed
10/25/2010	5:57:17 PM	H2 valve closed
10/25/2010	5:57:17 PM	BCl3 valve closed
10/25/2010	5:57:17 PM	PH3 valve closed
10/25/2010	5:57:17 PM	SiCl4 pre valve closed
10/25/2010	5:57:17 PM	SiCl4 post valve closed
10/25/2010	5:57:17 PM	Bubbler valve closed
10/25/2010	5:57:17 PM	Main Vac valve opened
10/25/2010	5:57:17 PM	Bypass valve opened
10/25/2010	5:57:17 PM	Helium MFC set to  0.000000
10/25/2010	5:57:17 PM	H2 MFC set to  0.000000
10/25/2010	5:57:17 PM	BCl3 MFC set to  0.000000
10/25/2010	5:57:17 PM	PHl3 MFC set to  0.000000
10/25/2010	5:57:17 PM	SiCl4 MFC set to  0.000000
10/25/2010	5:57:17 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	5:57:18 PM	Tube furnace set to 0
10/25/2010	5:58:18 PM	H2 valve closed
10/25/2010	5:58:18 PM	BCl3 valve closed
10/25/2010	5:58:18 PM	PH3 valve closed
10/25/2010	5:58:18 PM	SiCl4 pre valve closed
10/25/2010	5:58:18 PM	SiCl4 post valve closed
10/25/2010	5:58:18 PM	Bubbler valve closed
10/25/2010	5:58:18 PM	Helium valve opened
10/25/2010	5:58:18 PM	Main Vac valve opened
10/25/2010	5:58:18 PM	Bypass valve opened
10/25/2010	5:58:18 PM	Helium MFC set to  100.000000
10/25/2010	5:58:18 PM	H2 MFC set to  0.000000
10/25/2010	5:58:18 PM	BCl3 MFC set to  0.000000
10/25/2010	5:58:18 PM	PHl3 MFC set to  0.000000
10/25/2010	5:58:18 PM	SiCl4 MFC set to  0.000000
10/25/2010	5:58:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	5:58:18 PM	Tube furnace set to 0
10/25/2010	5:59:18 PM	Helium valve closed
10/25/2010	5:59:18 PM	H2 valve closed
10/25/2010	5:59:18 PM	BCl3 valve closed
10/25/2010	5:59:18 PM	PH3 valve closed
10/25/2010	5:59:18 PM	SiCl4 pre valve closed
10/25/2010	5:59:18 PM	SiCl4 post valve closed
10/25/2010	5:59:18 PM	Bubbler valve closed
10/25/2010	5:59:18 PM	Main Vac valve opened
10/25/2010	5:59:18 PM	Bypass valve opened
10/25/2010	5:59:18 PM	Helium MFC set to  0.000000
10/25/2010	5:59:18 PM	H2 MFC set to  0.000000
10/25/2010	5:59:18 PM	BCl3 MFC set to  0.000000
10/25/2010	5:59:18 PM	PHl3 MFC set to  0.000000
10/25/2010	5:59:18 PM	SiCl4 MFC set to  0.000000
10/25/2010	5:59:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	5:59:18 PM	Tube furnace set to 0
10/25/2010	6:00:18 PM	H2 valve closed
10/25/2010	6:00:18 PM	BCl3 valve closed
10/25/2010	6:00:18 PM	PH3 valve closed
10/25/2010	6:00:18 PM	SiCl4 pre valve closed
10/25/2010	6:00:18 PM	SiCl4 post valve closed
10/25/2010	6:00:18 PM	Bubbler valve closed
10/25/2010	6:00:18 PM	Helium valve opened
10/25/2010	6:00:18 PM	Main Vac valve opened
10/25/2010	6:00:18 PM	Bypass valve opened
10/25/2010	6:00:18 PM	Helium MFC set to  100.000000
10/25/2010	6:00:18 PM	H2 MFC set to  0.000000
10/25/2010	6:00:18 PM	BCl3 MFC set to  0.000000
10/25/2010	6:00:18 PM	PHl3 MFC set to  0.000000
10/25/2010	6:00:18 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:00:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:00:18 PM	Tube furnace set to 0
10/25/2010	6:01:18 PM	Helium valve closed
10/25/2010	6:01:18 PM	H2 valve closed
10/25/2010	6:01:18 PM	BCl3 valve closed
10/25/2010	6:01:18 PM	PH3 valve closed
10/25/2010	6:01:18 PM	SiCl4 pre valve closed
10/25/2010	6:01:18 PM	SiCl4 post valve closed
10/25/2010	6:01:18 PM	Bubbler valve closed
10/25/2010	6:01:18 PM	Main Vac valve opened
10/25/2010	6:01:18 PM	Bypass valve opened
10/25/2010	6:01:18 PM	Helium MFC set to  0.000000
10/25/2010	6:01:18 PM	H2 MFC set to  0.000000
10/25/2010	6:01:18 PM	BCl3 MFC set to  0.000000
10/25/2010	6:01:18 PM	PHl3 MFC set to  0.000000
10/25/2010	6:01:18 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:01:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:01:18 PM	Tube furnace set to 0
10/25/2010	6:02:18 PM	H2 valve closed
10/25/2010	6:02:18 PM	BCl3 valve closed
10/25/2010	6:02:18 PM	PH3 valve closed
10/25/2010	6:02:18 PM	SiCl4 pre valve closed
10/25/2010	6:02:18 PM	SiCl4 post valve closed
10/25/2010	6:02:18 PM	Bubbler valve closed
10/25/2010	6:02:18 PM	Helium valve opened
10/25/2010	6:02:18 PM	Main Vac valve opened
10/25/2010	6:02:18 PM	Bypass valve opened
10/25/2010	6:02:18 PM	Helium MFC set to  100.000000
10/25/2010	6:02:18 PM	H2 MFC set to  0.000000
10/25/2010	6:02:18 PM	BCl3 MFC set to  0.000000
10/25/2010	6:02:18 PM	PHl3 MFC set to  0.000000
10/25/2010	6:02:18 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:02:18 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:02:18 PM	Tube furnace set to 0
10/25/2010	6:03:19 PM	Helium valve closed
10/25/2010	6:03:19 PM	H2 valve closed
10/25/2010	6:03:19 PM	BCl3 valve closed
10/25/2010	6:03:19 PM	PH3 valve closed
10/25/2010	6:03:19 PM	SiCl4 pre valve closed
10/25/2010	6:03:19 PM	SiCl4 post valve closed
10/25/2010	6:03:19 PM	Bubbler valve closed
10/25/2010	6:03:19 PM	Main Vac valve opened
10/25/2010	6:03:19 PM	Bypass valve opened
10/25/2010	6:03:19 PM	Helium MFC set to  0.000000
10/25/2010	6:03:19 PM	H2 MFC set to  0.000000
10/25/2010	6:03:19 PM	BCl3 MFC set to  0.000000
10/25/2010	6:03:19 PM	PHl3 MFC set to  0.000000
10/25/2010	6:03:19 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:03:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:03:19 PM	Tube furnace set to 0
10/25/2010	6:04:19 PM	H2 valve closed
10/25/2010	6:04:19 PM	BCl3 valve closed
10/25/2010	6:04:19 PM	PH3 valve closed
10/25/2010	6:04:19 PM	SiCl4 pre valve closed
10/25/2010	6:04:19 PM	SiCl4 post valve closed
10/25/2010	6:04:19 PM	Bubbler valve closed
10/25/2010	6:04:19 PM	Helium valve opened
10/25/2010	6:04:19 PM	Main Vac valve opened
10/25/2010	6:04:19 PM	Bypass valve opened
10/25/2010	6:04:19 PM	Helium MFC set to  100.000000
10/25/2010	6:04:19 PM	H2 MFC set to  0.000000
10/25/2010	6:04:19 PM	BCl3 MFC set to  0.000000
10/25/2010	6:04:19 PM	PHl3 MFC set to  0.000000
10/25/2010	6:04:19 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:04:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:04:19 PM	Tube furnace set to 0
10/25/2010	6:05:19 PM	Helium valve closed
10/25/2010	6:05:19 PM	H2 valve closed
10/25/2010	6:05:19 PM	BCl3 valve closed
10/25/2010	6:05:19 PM	PH3 valve closed
10/25/2010	6:05:19 PM	SiCl4 pre valve closed
10/25/2010	6:05:19 PM	SiCl4 post valve closed
10/25/2010	6:05:19 PM	Bubbler valve closed
10/25/2010	6:05:19 PM	Main Vac valve opened
10/25/2010	6:05:19 PM	Bypass valve opened
10/25/2010	6:05:19 PM	Helium MFC set to  0.000000
10/25/2010	6:05:19 PM	H2 MFC set to  0.000000
10/25/2010	6:05:19 PM	BCl3 MFC set to  0.000000
10/25/2010	6:05:19 PM	PHl3 MFC set to  0.000000
10/25/2010	6:05:19 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:05:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:05:19 PM	Tube furnace set to 0
10/25/2010	6:06:19 PM	H2 valve closed
10/25/2010	6:06:19 PM	BCl3 valve closed
10/25/2010	6:06:19 PM	PH3 valve closed
10/25/2010	6:06:19 PM	SiCl4 pre valve closed
10/25/2010	6:06:19 PM	SiCl4 post valve closed
10/25/2010	6:06:19 PM	Bubbler valve closed
10/25/2010	6:06:19 PM	Helium valve opened
10/25/2010	6:06:19 PM	Main Vac valve opened
10/25/2010	6:06:19 PM	Bypass valve opened
10/25/2010	6:06:19 PM	Helium MFC set to  100.000000
10/25/2010	6:06:19 PM	H2 MFC set to  0.000000
10/25/2010	6:06:19 PM	BCl3 MFC set to  0.000000
10/25/2010	6:06:19 PM	PHl3 MFC set to  0.000000
10/25/2010	6:06:19 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:06:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:06:19 PM	Tube furnace set to 0
10/25/2010	6:07:19 PM	Helium valve closed
10/25/2010	6:07:19 PM	H2 valve closed
10/25/2010	6:07:19 PM	BCl3 valve closed
10/25/2010	6:07:19 PM	PH3 valve closed
10/25/2010	6:07:19 PM	SiCl4 pre valve closed
10/25/2010	6:07:19 PM	SiCl4 post valve closed
10/25/2010	6:07:19 PM	Bubbler valve closed
10/25/2010	6:07:19 PM	Main Vac valve opened
10/25/2010	6:07:19 PM	Bypass valve opened
10/25/2010	6:07:19 PM	Helium MFC set to  0.000000
10/25/2010	6:07:19 PM	H2 MFC set to  0.000000
10/25/2010	6:07:19 PM	BCl3 MFC set to  0.000000
10/25/2010	6:07:19 PM	PHl3 MFC set to  0.000000
10/25/2010	6:07:19 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:07:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:07:19 PM	Tube furnace set to 0
10/25/2010	6:08:19 PM	H2 valve closed
10/25/2010	6:08:19 PM	BCl3 valve closed
10/25/2010	6:08:19 PM	PH3 valve closed
10/25/2010	6:08:19 PM	SiCl4 pre valve closed
10/25/2010	6:08:19 PM	SiCl4 post valve closed
10/25/2010	6:08:19 PM	Bubbler valve closed
10/25/2010	6:08:20 PM	Helium valve opened
10/25/2010	6:08:20 PM	Main Vac valve opened
10/25/2010	6:08:20 PM	Bypass valve opened
10/25/2010	6:08:20 PM	Helium MFC set to  100.000000
10/25/2010	6:08:20 PM	H2 MFC set to  0.000000
10/25/2010	6:08:20 PM	BCl3 MFC set to  0.000000
10/25/2010	6:08:20 PM	PHl3 MFC set to  0.000000
10/25/2010	6:08:20 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:08:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:08:20 PM	Tube furnace set to 0
10/25/2010	6:09:20 PM	Helium valve closed
10/25/2010	6:09:20 PM	H2 valve closed
10/25/2010	6:09:20 PM	BCl3 valve closed
10/25/2010	6:09:20 PM	PH3 valve closed
10/25/2010	6:09:20 PM	SiCl4 pre valve closed
10/25/2010	6:09:20 PM	SiCl4 post valve closed
10/25/2010	6:09:20 PM	Bubbler valve closed
10/25/2010	6:09:20 PM	Main Vac valve opened
10/25/2010	6:09:20 PM	Bypass valve opened
10/25/2010	6:09:20 PM	Helium MFC set to  0.000000
10/25/2010	6:09:20 PM	H2 MFC set to  0.000000
10/25/2010	6:09:20 PM	BCl3 MFC set to  0.000000
10/25/2010	6:09:20 PM	PHl3 MFC set to  0.000000
10/25/2010	6:09:20 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:09:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:09:20 PM	Tube furnace set to 0
10/25/2010	6:10:20 PM	H2 valve closed
10/25/2010	6:10:20 PM	BCl3 valve closed
10/25/2010	6:10:20 PM	PH3 valve closed
10/25/2010	6:10:20 PM	SiCl4 pre valve closed
10/25/2010	6:10:20 PM	SiCl4 post valve closed
10/25/2010	6:10:20 PM	Bubbler valve closed
10/25/2010	6:10:20 PM	Helium valve opened
10/25/2010	6:10:20 PM	Main Vac valve opened
10/25/2010	6:10:20 PM	Bypass valve opened
10/25/2010	6:10:20 PM	Helium MFC set to  100.000000
10/25/2010	6:10:20 PM	H2 MFC set to  0.000000
10/25/2010	6:10:20 PM	BCl3 MFC set to  0.000000
10/25/2010	6:10:20 PM	PHl3 MFC set to  0.000000
10/25/2010	6:10:20 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:10:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:10:20 PM	Tube furnace set to 0
10/25/2010	6:11:20 PM	Helium valve closed
10/25/2010	6:11:20 PM	H2 valve closed
10/25/2010	6:11:20 PM	BCl3 valve closed
10/25/2010	6:11:20 PM	PH3 valve closed
10/25/2010	6:11:20 PM	SiCl4 pre valve closed
10/25/2010	6:11:20 PM	SiCl4 post valve closed
10/25/2010	6:11:20 PM	Bubbler valve closed
10/25/2010	6:11:20 PM	Main Vac valve opened
10/25/2010	6:11:20 PM	Bypass valve opened
10/25/2010	6:11:20 PM	Helium MFC set to  0.000000
10/25/2010	6:11:20 PM	H2 MFC set to  0.000000
10/25/2010	6:11:20 PM	BCl3 MFC set to  0.000000
10/25/2010	6:11:20 PM	PHl3 MFC set to  0.000000
10/25/2010	6:11:20 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:11:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:11:20 PM	Tube furnace set to 0
10/25/2010	6:12:20 PM	H2 valve closed
10/25/2010	6:12:20 PM	BCl3 valve closed
10/25/2010	6:12:20 PM	PH3 valve closed
10/25/2010	6:12:20 PM	SiCl4 pre valve closed
10/25/2010	6:12:20 PM	SiCl4 post valve closed
10/25/2010	6:12:20 PM	Bubbler valve closed
10/25/2010	6:12:20 PM	Helium valve opened
10/25/2010	6:12:20 PM	Main Vac valve opened
10/25/2010	6:12:20 PM	Bypass valve opened
10/25/2010	6:12:20 PM	Helium MFC set to  100.000000
10/25/2010	6:12:20 PM	H2 MFC set to  0.000000
10/25/2010	6:12:20 PM	BCl3 MFC set to  0.000000
10/25/2010	6:12:20 PM	PHl3 MFC set to  0.000000
10/25/2010	6:12:20 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:12:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:12:20 PM	Tube furnace set to 0
10/25/2010	6:13:20 PM	Helium valve closed
10/25/2010	6:13:20 PM	H2 valve closed
10/25/2010	6:13:20 PM	BCl3 valve closed
10/25/2010	6:13:20 PM	PH3 valve closed
10/25/2010	6:13:20 PM	SiCl4 pre valve closed
10/25/2010	6:13:20 PM	SiCl4 post valve closed
10/25/2010	6:13:20 PM	Bubbler valve closed
10/25/2010	6:13:20 PM	Main Vac valve opened
10/25/2010	6:13:20 PM	Bypass valve opened
10/25/2010	6:13:20 PM	Helium MFC set to  0.000000
10/25/2010	6:13:20 PM	H2 MFC set to  0.000000
10/25/2010	6:13:20 PM	BCl3 MFC set to  0.000000
10/25/2010	6:13:20 PM	PHl3 MFC set to  0.000000
10/25/2010	6:13:20 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:13:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:13:21 PM	Tube furnace set to 0
10/25/2010	6:14:21 PM	H2 valve closed
10/25/2010	6:14:21 PM	BCl3 valve closed
10/25/2010	6:14:21 PM	PH3 valve closed
10/25/2010	6:14:21 PM	SiCl4 pre valve closed
10/25/2010	6:14:21 PM	SiCl4 post valve closed
10/25/2010	6:14:21 PM	Bubbler valve closed
10/25/2010	6:14:21 PM	Helium valve opened
10/25/2010	6:14:21 PM	Main Vac valve opened
10/25/2010	6:14:21 PM	Bypass valve opened
10/25/2010	6:14:21 PM	Helium MFC set to  100.000000
10/25/2010	6:14:21 PM	H2 MFC set to  0.000000
10/25/2010	6:14:21 PM	BCl3 MFC set to  0.000000
10/25/2010	6:14:21 PM	PHl3 MFC set to  0.000000
10/25/2010	6:14:21 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:14:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:14:21 PM	Tube furnace set to 0
10/25/2010	6:15:21 PM	Helium valve closed
10/25/2010	6:15:21 PM	H2 valve closed
10/25/2010	6:15:21 PM	BCl3 valve closed
10/25/2010	6:15:21 PM	PH3 valve closed
10/25/2010	6:15:21 PM	SiCl4 pre valve closed
10/25/2010	6:15:21 PM	SiCl4 post valve closed
10/25/2010	6:15:21 PM	Bubbler valve closed
10/25/2010	6:15:21 PM	Main Vac valve opened
10/25/2010	6:15:21 PM	Bypass valve opened
10/25/2010	6:15:21 PM	Helium MFC set to  0.000000
10/25/2010	6:15:21 PM	H2 MFC set to  0.000000
10/25/2010	6:15:21 PM	BCl3 MFC set to  0.000000
10/25/2010	6:15:21 PM	PHl3 MFC set to  0.000000
10/25/2010	6:15:21 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:15:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:15:21 PM	Tube furnace set to 0
10/25/2010	6:15:22 PM	Run finished at 6:15 PM
10/25/2010	6:15:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	6:20:44 PM	Bypass valve closed
10/25/2010	6:20:45 PM	Main Vac valve closed
10/25/2010	6:21:06 PM	Bypass valve opened
10/25/2010	6:21:07 PM	Main Vac valve opened
10/25/2010	6:21:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	6:21:23 PM	Recipe started at 6:21 PM
10/25/2010	6:21:23 PM	Helium valve closed
10/25/2010	6:21:23 PM	H2 valve closed
10/25/2010	6:21:23 PM	BCl3 valve closed
10/25/2010	6:21:23 PM	PH3 valve closed
10/25/2010	6:21:23 PM	SiCl4 pre valve closed
10/25/2010	6:21:23 PM	SiCl4 post valve closed
10/25/2010	6:21:23 PM	Main Vac valve closed
10/25/2010	6:21:23 PM	Bubbler valve closed
10/25/2010	6:21:23 PM	Bypass valve opened
10/25/2010	6:21:23 PM	Helium MFC set to  0.000000
10/25/2010	6:21:23 PM	H2 MFC set to  0.000000
10/25/2010	6:21:23 PM	BCl3 MFC set to  0.000000
10/25/2010	6:21:23 PM	PHl3 MFC set to  0.000000
10/25/2010	6:21:23 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:21:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:21:23 PM	Tube furnace set to 0
10/25/2010	6:21:23 PM	Helium valve closed
10/25/2010	6:21:23 PM	H2 valve closed
10/25/2010	6:21:23 PM	BCl3 valve closed
10/25/2010	6:21:23 PM	PH3 valve closed
10/25/2010	6:21:23 PM	SiCl4 pre valve closed
10/25/2010	6:21:23 PM	SiCl4 post valve closed
10/25/2010	6:21:23 PM	Bubbler valve closed
10/25/2010	6:21:23 PM	Main Vac valve opened
10/25/2010	6:21:23 PM	Bypass valve opened
10/25/2010	6:21:23 PM	Helium MFC set to  0.000000
10/25/2010	6:21:23 PM	H2 MFC set to  0.000000
10/25/2010	6:21:23 PM	BCl3 MFC set to  0.000000
10/25/2010	6:21:23 PM	PHl3 MFC set to  0.000000
10/25/2010	6:21:23 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:21:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:21:23 PM	Tube furnace set to 0
10/25/2010	6:22:23 PM	H2 valve closed
10/25/2010	6:22:23 PM	BCl3 valve closed
10/25/2010	6:22:23 PM	PH3 valve closed
10/25/2010	6:22:23 PM	SiCl4 pre valve closed
10/25/2010	6:22:23 PM	SiCl4 post valve closed
10/25/2010	6:22:23 PM	Bubbler valve closed
10/25/2010	6:22:23 PM	Helium valve opened
10/25/2010	6:22:23 PM	Main Vac valve opened
10/25/2010	6:22:23 PM	Bypass valve opened
10/25/2010	6:22:23 PM	Helium MFC set to  100.000000
10/25/2010	6:22:23 PM	H2 MFC set to  0.000000
10/25/2010	6:22:23 PM	BCl3 MFC set to  0.000000
10/25/2010	6:22:23 PM	PHl3 MFC set to  0.000000
10/25/2010	6:22:23 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:22:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:22:23 PM	Tube furnace set to 0
10/25/2010	6:23:23 PM	Helium valve closed
10/25/2010	6:23:23 PM	H2 valve closed
10/25/2010	6:23:23 PM	BCl3 valve closed
10/25/2010	6:23:23 PM	PH3 valve closed
10/25/2010	6:23:23 PM	SiCl4 pre valve closed
10/25/2010	6:23:23 PM	SiCl4 post valve closed
10/25/2010	6:23:23 PM	Bubbler valve closed
10/25/2010	6:23:23 PM	Main Vac valve opened
10/25/2010	6:23:23 PM	Bypass valve opened
10/25/2010	6:23:23 PM	Helium MFC set to  0.000000
10/25/2010	6:23:23 PM	H2 MFC set to  0.000000
10/25/2010	6:23:23 PM	BCl3 MFC set to  0.000000
10/25/2010	6:23:23 PM	PHl3 MFC set to  0.000000
10/25/2010	6:23:23 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:23:23 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:23:24 PM	Tube furnace set to 0
10/25/2010	6:24:24 PM	H2 valve closed
10/25/2010	6:24:24 PM	BCl3 valve closed
10/25/2010	6:24:24 PM	PH3 valve closed
10/25/2010	6:24:24 PM	SiCl4 pre valve closed
10/25/2010	6:24:24 PM	SiCl4 post valve closed
10/25/2010	6:24:24 PM	Bubbler valve closed
10/25/2010	6:24:24 PM	Helium valve opened
10/25/2010	6:24:24 PM	Main Vac valve opened
10/25/2010	6:24:24 PM	Bypass valve opened
10/25/2010	6:24:24 PM	Helium MFC set to  100.000000
10/25/2010	6:24:24 PM	H2 MFC set to  0.000000
10/25/2010	6:24:24 PM	BCl3 MFC set to  0.000000
10/25/2010	6:24:24 PM	PHl3 MFC set to  0.000000
10/25/2010	6:24:24 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:24:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:24:24 PM	Tube furnace set to 0
10/25/2010	6:25:24 PM	Helium valve closed
10/25/2010	6:25:24 PM	H2 valve closed
10/25/2010	6:25:24 PM	BCl3 valve closed
10/25/2010	6:25:24 PM	PH3 valve closed
10/25/2010	6:25:24 PM	SiCl4 pre valve closed
10/25/2010	6:25:24 PM	SiCl4 post valve closed
10/25/2010	6:25:24 PM	Bubbler valve closed
10/25/2010	6:25:24 PM	Main Vac valve opened
10/25/2010	6:25:24 PM	Bypass valve opened
10/25/2010	6:25:24 PM	Helium MFC set to  0.000000
10/25/2010	6:25:24 PM	H2 MFC set to  0.000000
10/25/2010	6:25:24 PM	BCl3 MFC set to  0.000000
10/25/2010	6:25:24 PM	PHl3 MFC set to  0.000000
10/25/2010	6:25:24 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:25:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:25:24 PM	Tube furnace set to 0
10/25/2010	6:26:24 PM	H2 valve closed
10/25/2010	6:26:24 PM	BCl3 valve closed
10/25/2010	6:26:24 PM	PH3 valve closed
10/25/2010	6:26:24 PM	SiCl4 pre valve closed
10/25/2010	6:26:24 PM	SiCl4 post valve closed
10/25/2010	6:26:24 PM	Bubbler valve closed
10/25/2010	6:26:24 PM	Helium valve opened
10/25/2010	6:26:24 PM	Main Vac valve opened
10/25/2010	6:26:24 PM	Bypass valve opened
10/25/2010	6:26:24 PM	Helium MFC set to  100.000000
10/25/2010	6:26:24 PM	H2 MFC set to  0.000000
10/25/2010	6:26:24 PM	BCl3 MFC set to  0.000000
10/25/2010	6:26:24 PM	PHl3 MFC set to  0.000000
10/25/2010	6:26:24 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:26:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:26:24 PM	Tube furnace set to 0
10/25/2010	6:27:24 PM	Helium valve closed
10/25/2010	6:27:24 PM	H2 valve closed
10/25/2010	6:27:24 PM	BCl3 valve closed
10/25/2010	6:27:24 PM	PH3 valve closed
10/25/2010	6:27:24 PM	SiCl4 pre valve closed
10/25/2010	6:27:24 PM	SiCl4 post valve closed
10/25/2010	6:27:24 PM	Bubbler valve closed
10/25/2010	6:27:24 PM	Main Vac valve opened
10/25/2010	6:27:24 PM	Bypass valve opened
10/25/2010	6:27:24 PM	Helium MFC set to  0.000000
10/25/2010	6:27:24 PM	H2 MFC set to  0.000000
10/25/2010	6:27:24 PM	BCl3 MFC set to  0.000000
10/25/2010	6:27:24 PM	PHl3 MFC set to  0.000000
10/25/2010	6:27:24 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:27:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:27:24 PM	Tube furnace set to 0
10/25/2010	6:28:24 PM	H2 valve closed
10/25/2010	6:28:24 PM	BCl3 valve closed
10/25/2010	6:28:24 PM	PH3 valve closed
10/25/2010	6:28:24 PM	SiCl4 pre valve closed
10/25/2010	6:28:24 PM	SiCl4 post valve closed
10/25/2010	6:28:24 PM	Bubbler valve closed
10/25/2010	6:28:24 PM	Helium valve opened
10/25/2010	6:28:24 PM	Main Vac valve opened
10/25/2010	6:28:24 PM	Bypass valve opened
10/25/2010	6:28:24 PM	Helium MFC set to  100.000000
10/25/2010	6:28:24 PM	H2 MFC set to  0.000000
10/25/2010	6:28:24 PM	BCl3 MFC set to  0.000000
10/25/2010	6:28:24 PM	PHl3 MFC set to  0.000000
10/25/2010	6:28:24 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:28:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:28:25 PM	Tube furnace set to 0
10/25/2010	6:29:25 PM	Helium valve closed
10/25/2010	6:29:25 PM	H2 valve closed
10/25/2010	6:29:25 PM	BCl3 valve closed
10/25/2010	6:29:25 PM	PH3 valve closed
10/25/2010	6:29:25 PM	SiCl4 pre valve closed
10/25/2010	6:29:25 PM	SiCl4 post valve closed
10/25/2010	6:29:25 PM	Bubbler valve closed
10/25/2010	6:29:25 PM	Main Vac valve opened
10/25/2010	6:29:25 PM	Bypass valve opened
10/25/2010	6:29:25 PM	Helium MFC set to  0.000000
10/25/2010	6:29:25 PM	H2 MFC set to  0.000000
10/25/2010	6:29:25 PM	BCl3 MFC set to  0.000000
10/25/2010	6:29:25 PM	PHl3 MFC set to  0.000000
10/25/2010	6:29:25 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:29:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:29:25 PM	Tube furnace set to 0
10/25/2010	6:30:25 PM	H2 valve closed
10/25/2010	6:30:25 PM	BCl3 valve closed
10/25/2010	6:30:25 PM	PH3 valve closed
10/25/2010	6:30:25 PM	SiCl4 pre valve closed
10/25/2010	6:30:25 PM	SiCl4 post valve closed
10/25/2010	6:30:25 PM	Bubbler valve closed
10/25/2010	6:30:25 PM	Helium valve opened
10/25/2010	6:30:25 PM	Main Vac valve opened
10/25/2010	6:30:25 PM	Bypass valve opened
10/25/2010	6:30:25 PM	Helium MFC set to  100.000000
10/25/2010	6:30:25 PM	H2 MFC set to  0.000000
10/25/2010	6:30:25 PM	BCl3 MFC set to  0.000000
10/25/2010	6:30:25 PM	PHl3 MFC set to  0.000000
10/25/2010	6:30:25 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:30:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:30:25 PM	Tube furnace set to 0
10/25/2010	6:31:25 PM	Helium valve closed
10/25/2010	6:31:25 PM	H2 valve closed
10/25/2010	6:31:25 PM	BCl3 valve closed
10/25/2010	6:31:25 PM	PH3 valve closed
10/25/2010	6:31:25 PM	SiCl4 pre valve closed
10/25/2010	6:31:25 PM	SiCl4 post valve closed
10/25/2010	6:31:25 PM	Bubbler valve closed
10/25/2010	6:31:25 PM	Main Vac valve opened
10/25/2010	6:31:25 PM	Bypass valve opened
10/25/2010	6:31:25 PM	Helium MFC set to  0.000000
10/25/2010	6:31:25 PM	H2 MFC set to  0.000000
10/25/2010	6:31:25 PM	BCl3 MFC set to  0.000000
10/25/2010	6:31:25 PM	PHl3 MFC set to  0.000000
10/25/2010	6:31:25 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:31:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:31:25 PM	Tube furnace set to 0
10/25/2010	6:32:25 PM	H2 valve closed
10/25/2010	6:32:25 PM	BCl3 valve closed
10/25/2010	6:32:25 PM	PH3 valve closed
10/25/2010	6:32:25 PM	SiCl4 pre valve closed
10/25/2010	6:32:25 PM	SiCl4 post valve closed
10/25/2010	6:32:25 PM	Bubbler valve closed
10/25/2010	6:32:25 PM	Helium valve opened
10/25/2010	6:32:25 PM	Main Vac valve opened
10/25/2010	6:32:25 PM	Bypass valve opened
10/25/2010	6:32:25 PM	Helium MFC set to  100.000000
10/25/2010	6:32:25 PM	H2 MFC set to  0.000000
10/25/2010	6:32:25 PM	BCl3 MFC set to  0.000000
10/25/2010	6:32:25 PM	PHl3 MFC set to  0.000000
10/25/2010	6:32:25 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:32:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:32:25 PM	Tube furnace set to 0
10/25/2010	6:33:25 PM	Helium valve closed
10/25/2010	6:33:25 PM	H2 valve closed
10/25/2010	6:33:25 PM	BCl3 valve closed
10/25/2010	6:33:25 PM	PH3 valve closed
10/25/2010	6:33:25 PM	SiCl4 pre valve closed
10/25/2010	6:33:25 PM	SiCl4 post valve closed
10/25/2010	6:33:25 PM	Bubbler valve closed
10/25/2010	6:33:25 PM	Main Vac valve opened
10/25/2010	6:33:25 PM	Bypass valve opened
10/25/2010	6:33:25 PM	Helium MFC set to  0.000000
10/25/2010	6:33:25 PM	H2 MFC set to  0.000000
10/25/2010	6:33:25 PM	BCl3 MFC set to  0.000000
10/25/2010	6:33:25 PM	PHl3 MFC set to  0.000000
10/25/2010	6:33:25 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:33:25 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:33:26 PM	Tube furnace set to 0
10/25/2010	6:34:26 PM	H2 valve closed
10/25/2010	6:34:26 PM	BCl3 valve closed
10/25/2010	6:34:26 PM	PH3 valve closed
10/25/2010	6:34:26 PM	SiCl4 pre valve closed
10/25/2010	6:34:26 PM	SiCl4 post valve closed
10/25/2010	6:34:26 PM	Bubbler valve closed
10/25/2010	6:34:26 PM	Helium valve opened
10/25/2010	6:34:26 PM	Main Vac valve opened
10/25/2010	6:34:26 PM	Bypass valve opened
10/25/2010	6:34:26 PM	Helium MFC set to  100.000000
10/25/2010	6:34:26 PM	H2 MFC set to  0.000000
10/25/2010	6:34:26 PM	BCl3 MFC set to  0.000000
10/25/2010	6:34:26 PM	PHl3 MFC set to  0.000000
10/25/2010	6:34:26 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:34:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:34:26 PM	Tube furnace set to 0
10/25/2010	6:35:26 PM	Helium valve closed
10/25/2010	6:35:26 PM	H2 valve closed
10/25/2010	6:35:26 PM	BCl3 valve closed
10/25/2010	6:35:26 PM	PH3 valve closed
10/25/2010	6:35:26 PM	SiCl4 pre valve closed
10/25/2010	6:35:26 PM	SiCl4 post valve closed
10/25/2010	6:35:26 PM	Bubbler valve closed
10/25/2010	6:35:26 PM	Main Vac valve opened
10/25/2010	6:35:26 PM	Bypass valve opened
10/25/2010	6:35:26 PM	Helium MFC set to  0.000000
10/25/2010	6:35:26 PM	H2 MFC set to  0.000000
10/25/2010	6:35:26 PM	BCl3 MFC set to  0.000000
10/25/2010	6:35:26 PM	PHl3 MFC set to  0.000000
10/25/2010	6:35:26 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:35:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:35:26 PM	Tube furnace set to 0
10/25/2010	6:36:26 PM	H2 valve closed
10/25/2010	6:36:26 PM	BCl3 valve closed
10/25/2010	6:36:26 PM	PH3 valve closed
10/25/2010	6:36:26 PM	SiCl4 pre valve closed
10/25/2010	6:36:26 PM	SiCl4 post valve closed
10/25/2010	6:36:26 PM	Bubbler valve closed
10/25/2010	6:36:26 PM	Helium valve opened
10/25/2010	6:36:26 PM	Main Vac valve opened
10/25/2010	6:36:26 PM	Bypass valve opened
10/25/2010	6:36:26 PM	Helium MFC set to  100.000000
10/25/2010	6:36:26 PM	H2 MFC set to  0.000000
10/25/2010	6:36:26 PM	BCl3 MFC set to  0.000000
10/25/2010	6:36:26 PM	PHl3 MFC set to  0.000000
10/25/2010	6:36:26 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:36:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:36:26 PM	Tube furnace set to 0
10/25/2010	6:37:26 PM	Helium valve closed
10/25/2010	6:37:26 PM	H2 valve closed
10/25/2010	6:37:26 PM	BCl3 valve closed
10/25/2010	6:37:26 PM	PH3 valve closed
10/25/2010	6:37:26 PM	SiCl4 pre valve closed
10/25/2010	6:37:26 PM	SiCl4 post valve closed
10/25/2010	6:37:26 PM	Bubbler valve closed
10/25/2010	6:37:26 PM	Main Vac valve opened
10/25/2010	6:37:26 PM	Bypass valve opened
10/25/2010	6:37:26 PM	Helium MFC set to  0.000000
10/25/2010	6:37:26 PM	H2 MFC set to  0.000000
10/25/2010	6:37:26 PM	BCl3 MFC set to  0.000000
10/25/2010	6:37:26 PM	PHl3 MFC set to  0.000000
10/25/2010	6:37:26 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:37:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:37:26 PM	Tube furnace set to 0
10/25/2010	6:38:26 PM	H2 valve closed
10/25/2010	6:38:26 PM	BCl3 valve closed
10/25/2010	6:38:26 PM	PH3 valve closed
10/25/2010	6:38:26 PM	SiCl4 pre valve closed
10/25/2010	6:38:26 PM	SiCl4 post valve closed
10/25/2010	6:38:26 PM	Bubbler valve closed
10/25/2010	6:38:26 PM	Helium valve opened
10/25/2010	6:38:26 PM	Main Vac valve opened
10/25/2010	6:38:26 PM	Bypass valve opened
10/25/2010	6:38:26 PM	Helium MFC set to  100.000000
10/25/2010	6:38:26 PM	H2 MFC set to  0.000000
10/25/2010	6:38:26 PM	BCl3 MFC set to  0.000000
10/25/2010	6:38:26 PM	PHl3 MFC set to  0.000000
10/25/2010	6:38:26 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:38:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:38:27 PM	Tube furnace set to 0
10/25/2010	6:39:27 PM	Helium valve closed
10/25/2010	6:39:27 PM	H2 valve closed
10/25/2010	6:39:27 PM	BCl3 valve closed
10/25/2010	6:39:27 PM	PH3 valve closed
10/25/2010	6:39:27 PM	SiCl4 pre valve closed
10/25/2010	6:39:27 PM	SiCl4 post valve closed
10/25/2010	6:39:27 PM	Bubbler valve closed
10/25/2010	6:39:27 PM	Main Vac valve opened
10/25/2010	6:39:27 PM	Bypass valve opened
10/25/2010	6:39:27 PM	Helium MFC set to  0.000000
10/25/2010	6:39:27 PM	H2 MFC set to  0.000000
10/25/2010	6:39:27 PM	BCl3 MFC set to  0.000000
10/25/2010	6:39:27 PM	PHl3 MFC set to  0.000000
10/25/2010	6:39:27 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:39:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:39:27 PM	Tube furnace set to 0
10/25/2010	6:40:27 PM	H2 valve closed
10/25/2010	6:40:27 PM	BCl3 valve closed
10/25/2010	6:40:27 PM	PH3 valve closed
10/25/2010	6:40:27 PM	SiCl4 pre valve closed
10/25/2010	6:40:27 PM	SiCl4 post valve closed
10/25/2010	6:40:27 PM	Bubbler valve closed
10/25/2010	6:40:27 PM	Helium valve opened
10/25/2010	6:40:27 PM	Main Vac valve opened
10/25/2010	6:40:27 PM	Bypass valve opened
10/25/2010	6:40:27 PM	Helium MFC set to  100.000000
10/25/2010	6:40:27 PM	H2 MFC set to  0.000000
10/25/2010	6:40:27 PM	BCl3 MFC set to  0.000000
10/25/2010	6:40:27 PM	PHl3 MFC set to  0.000000
10/25/2010	6:40:27 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:40:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:40:27 PM	Tube furnace set to 0
10/25/2010	6:41:27 PM	Helium valve closed
10/25/2010	6:41:27 PM	H2 valve closed
10/25/2010	6:41:27 PM	BCl3 valve closed
10/25/2010	6:41:27 PM	PH3 valve closed
10/25/2010	6:41:27 PM	SiCl4 pre valve closed
10/25/2010	6:41:27 PM	SiCl4 post valve closed
10/25/2010	6:41:27 PM	Bubbler valve closed
10/25/2010	6:41:27 PM	Main Vac valve opened
10/25/2010	6:41:27 PM	Bypass valve opened
10/25/2010	6:41:27 PM	Helium MFC set to  0.000000
10/25/2010	6:41:27 PM	H2 MFC set to  0.000000
10/25/2010	6:41:27 PM	BCl3 MFC set to  0.000000
10/25/2010	6:41:27 PM	PHl3 MFC set to  0.000000
10/25/2010	6:41:27 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:41:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:41:27 PM	Tube furnace set to 0
10/25/2010	6:41:28 PM	Run finished at 6:41 PM
10/25/2010	6:41:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	6:49:16 PM	Recipe started at 6:49 PM
10/25/2010	6:49:16 PM	Helium valve closed
10/25/2010	6:49:16 PM	BCl3 valve closed
10/25/2010	6:49:16 PM	PH3 valve closed
10/25/2010	6:49:16 PM	SiCl4 pre valve closed
10/25/2010	6:49:16 PM	SiCl4 post valve closed
10/25/2010	6:49:16 PM	Main Vac valve closed
10/25/2010	6:49:16 PM	Bypass valve closed
10/25/2010	6:49:16 PM	Bubbler valve closed
10/25/2010	6:49:16 PM	H2 valve opened
10/25/2010	6:49:16 PM	Helium MFC set to  0.000000
10/25/2010	6:49:16 PM	H2 MFC set to  500.000000
10/25/2010	6:49:16 PM	BCl3 MFC set to  0.000000
10/25/2010	6:49:16 PM	PHl3 MFC set to  0.000000
10/25/2010	6:49:16 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:49:16 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:49:16 PM	Tube furnace set to 0
10/25/2010	6:50:39 PM	Helium valve closed
10/25/2010	6:50:39 PM	BCl3 valve closed
10/25/2010	6:50:39 PM	PH3 valve closed
10/25/2010	6:50:39 PM	SiCl4 pre valve closed
10/25/2010	6:50:39 PM	SiCl4 post valve closed
10/25/2010	6:50:39 PM	Main Vac valve closed
10/25/2010	6:50:39 PM	Bypass valve closed
10/25/2010	6:50:39 PM	H2 valve opened
10/25/2010	6:50:39 PM	Bubbler valve opened
10/25/2010	6:50:39 PM	Helium MFC set to  0.000000
10/25/2010	6:50:39 PM	H2 MFC set to  500.000000
10/25/2010	6:50:39 PM	BCl3 MFC set to  0.000000
10/25/2010	6:50:39 PM	PHl3 MFC set to  0.000000
10/25/2010	6:50:39 PM	SiCl4 MFC set to  0.000000
10/25/2010	6:50:39 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	6:50:39 PM	Tube furnace set to 1000
10/25/2010	7:10:39 PM	Helium valve closed
10/25/2010	7:10:39 PM	BCl3 valve closed
10/25/2010	7:10:39 PM	PH3 valve closed
10/25/2010	7:10:39 PM	Main Vac valve closed
10/25/2010	7:10:39 PM	Bypass valve closed
10/25/2010	7:10:39 PM	H2 valve opened
10/25/2010	7:10:39 PM	SiCl4 pre valve opened
10/25/2010	7:10:39 PM	SiCl4 post valve opened
10/25/2010	7:10:39 PM	Bubbler valve opened
10/25/2010	7:10:39 PM	Helium MFC set to  0.000000
10/25/2010	7:10:39 PM	H2 MFC set to  500.000000
10/25/2010	7:10:39 PM	BCl3 MFC set to  0.000000
10/25/2010	7:10:39 PM	PHl3 MFC set to  0.000000
10/25/2010	7:10:39 PM	SiCl4 MFC set to  50.000000
10/25/2010	7:10:39 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	7:10:39 PM	Tube furnace set to 1000
10/25/2010	7:30:39 PM	H2 valve closed
10/25/2010	7:30:39 PM	BCl3 valve closed
10/25/2010	7:30:39 PM	PH3 valve closed
10/25/2010	7:30:39 PM	SiCl4 pre valve closed
10/25/2010	7:30:39 PM	SiCl4 post valve closed
10/25/2010	7:30:39 PM	Main Vac valve closed
10/25/2010	7:30:39 PM	Bypass valve closed
10/25/2010	7:30:39 PM	Helium valve opened
10/25/2010	7:30:39 PM	Bubbler valve opened
10/25/2010	7:30:39 PM	Helium MFC set to  500.000000
10/25/2010	7:30:39 PM	H2 MFC set to  0.000000
10/25/2010	7:30:39 PM	BCl3 MFC set to  0.000000
10/25/2010	7:30:39 PM	PHl3 MFC set to  0.000000
10/25/2010	7:30:39 PM	SiCl4 MFC set to  0.000000
10/25/2010	7:30:39 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	7:30:39 PM	Tube furnace set to 0
10/25/2010	7:50:39 PM	Helium valve closed
10/25/2010	7:50:39 PM	H2 valve closed
10/25/2010	7:50:39 PM	BCl3 valve closed
10/25/2010	7:50:39 PM	PH3 valve closed
10/25/2010	7:50:39 PM	SiCl4 pre valve closed
10/25/2010	7:50:39 PM	SiCl4 post valve closed
10/25/2010	7:50:39 PM	Main Vac valve closed
10/25/2010	7:50:39 PM	Bypass valve closed
10/25/2010	7:50:39 PM	Bubbler valve closed
10/25/2010	7:50:39 PM	Helium MFC set to  0.000000
10/25/2010	7:50:39 PM	H2 MFC set to  0.000000
10/25/2010	7:50:39 PM	BCl3 MFC set to  0.000000
10/25/2010	7:50:39 PM	PHl3 MFC set to  0.000000
10/25/2010	7:50:39 PM	SiCl4 MFC set to  0.000000
10/25/2010	7:50:39 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	7:50:40 PM	Tube furnace set to 0
10/25/2010	7:50:40 PM	Run finished at 7:50 PM
10/25/2010	7:57:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	7:57:11 PM	Recipe started at 7:57 PM
10/25/2010	7:57:11 PM	H2 valve closed
10/25/2010	7:57:11 PM	BCl3 valve closed
10/25/2010	7:57:11 PM	PH3 valve closed
10/25/2010	7:57:11 PM	SiCl4 pre valve closed
10/25/2010	7:57:11 PM	SiCl4 post valve closed
10/25/2010	7:57:11 PM	Main Vac valve closed
10/25/2010	7:57:11 PM	Bypass valve closed
10/25/2010	7:57:11 PM	Bubbler valve closed
10/25/2010	7:57:11 PM	Helium valve opened
10/25/2010	7:57:11 PM	Helium MFC set to  500.000000
10/25/2010	7:57:11 PM	H2 MFC set to  0.000000
10/25/2010	7:57:11 PM	BCl3 MFC set to  0.000000
10/25/2010	7:57:11 PM	PHl3 MFC set to  0.000000
10/25/2010	7:57:11 PM	SiCl4 MFC set to  0.000000
10/25/2010	7:57:11 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	7:57:11 PM	Tube furnace set to 0
10/25/2010	7:57:14 PM	Helium valve closed
10/25/2010	7:57:14 PM	H2 valve closed
10/25/2010	7:57:14 PM	BCl3 valve closed
10/25/2010	7:57:14 PM	PH3 valve closed
10/25/2010	7:57:14 PM	SiCl4 pre valve closed
10/25/2010	7:57:14 PM	SiCl4 post valve closed
10/25/2010	7:57:14 PM	Main Vac valve closed
10/25/2010	7:57:14 PM	Bypass valve closed
10/25/2010	7:57:14 PM	Bubbler valve closed
10/25/2010	7:57:14 PM	Helium MFC set to  0.000000
10/25/2010	7:57:14 PM	H2 MFC set to  0.000000
10/25/2010	7:57:14 PM	BCl3 MFC set to  0.000000
10/25/2010	7:57:14 PM	PHl3 MFC set to  0.000000
10/25/2010	7:57:14 PM	SiCl4 MFC set to  0.000000
10/25/2010	7:57:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	7:57:15 PM	Tube furnace set to 0
10/25/2010	7:57:15 PM	Run finished at 7:57 PM
10/25/2010	7:57:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	8:01:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	8:01:03 PM	Recipe started at 8:01 PM
10/25/2010	8:01:03 PM	Helium valve closed
10/25/2010	8:01:03 PM	H2 valve closed
10/25/2010	8:01:03 PM	BCl3 valve closed
10/25/2010	8:01:03 PM	PH3 valve closed
10/25/2010	8:01:03 PM	SiCl4 pre valve closed
10/25/2010	8:01:03 PM	SiCl4 post valve closed
10/25/2010	8:01:03 PM	Main Vac valve closed
10/25/2010	8:01:03 PM	Bubbler valve closed
10/25/2010	8:01:03 PM	Bypass valve opened
10/25/2010	8:01:03 PM	Helium MFC set to  0.000000
10/25/2010	8:01:03 PM	H2 MFC set to  0.000000
10/25/2010	8:01:03 PM	BCl3 MFC set to  0.000000
10/25/2010	8:01:03 PM	PHl3 MFC set to  0.000000
10/25/2010	8:01:03 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:01:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:01:03 PM	Tube furnace set to 0
10/25/2010	8:01:54 PM	Helium valve closed
10/25/2010	8:01:54 PM	H2 valve closed
10/25/2010	8:01:54 PM	BCl3 valve closed
10/25/2010	8:01:54 PM	PH3 valve closed
10/25/2010	8:01:54 PM	SiCl4 pre valve closed
10/25/2010	8:01:54 PM	SiCl4 post valve closed
10/25/2010	8:01:54 PM	Bubbler valve closed
10/25/2010	8:01:54 PM	Main Vac valve opened
10/25/2010	8:01:54 PM	Bypass valve opened
10/25/2010	8:01:54 PM	Helium MFC set to  0.000000
10/25/2010	8:01:54 PM	H2 MFC set to  0.000000
10/25/2010	8:01:54 PM	BCl3 MFC set to  0.000000
10/25/2010	8:01:54 PM	PHl3 MFC set to  0.000000
10/25/2010	8:01:54 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:01:54 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:01:54 PM	Tube furnace set to 0
10/25/2010	8:01:54 PM	Run finished at 8:01 PM
10/25/2010	8:01:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	8:02:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	8:03:02 PM	Recipe started at 8:02 PM
10/25/2010	8:03:02 PM	Helium valve closed
10/25/2010	8:03:02 PM	H2 valve closed
10/25/2010	8:03:02 PM	BCl3 valve closed
10/25/2010	8:03:02 PM	PH3 valve closed
10/25/2010	8:03:02 PM	SiCl4 pre valve closed
10/25/2010	8:03:02 PM	SiCl4 post valve closed
10/25/2010	8:03:02 PM	Main Vac valve closed
10/25/2010	8:03:02 PM	Bubbler valve closed
10/25/2010	8:03:02 PM	Bypass valve opened
10/25/2010	8:03:02 PM	Helium MFC set to  0.000000
10/25/2010	8:03:02 PM	H2 MFC set to  0.000000
10/25/2010	8:03:02 PM	BCl3 MFC set to  0.000000
10/25/2010	8:03:02 PM	PHl3 MFC set to  0.000000
10/25/2010	8:03:02 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:03:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:03:03 PM	Tube furnace set to 0
10/25/2010	8:03:03 PM	Helium valve closed
10/25/2010	8:03:03 PM	H2 valve closed
10/25/2010	8:03:03 PM	BCl3 valve closed
10/25/2010	8:03:03 PM	PH3 valve closed
10/25/2010	8:03:03 PM	SiCl4 pre valve closed
10/25/2010	8:03:03 PM	SiCl4 post valve closed
10/25/2010	8:03:03 PM	Bubbler valve closed
10/25/2010	8:03:03 PM	Main Vac valve opened
10/25/2010	8:03:03 PM	Bypass valve opened
10/25/2010	8:03:03 PM	Helium MFC set to  0.000000
10/25/2010	8:03:03 PM	H2 MFC set to  0.000000
10/25/2010	8:03:03 PM	BCl3 MFC set to  0.000000
10/25/2010	8:03:03 PM	PHl3 MFC set to  0.000000
10/25/2010	8:03:03 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:03:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:03:03 PM	Tube furnace set to 0
10/25/2010	8:04:03 PM	H2 valve closed
10/25/2010	8:04:03 PM	BCl3 valve closed
10/25/2010	8:04:03 PM	PH3 valve closed
10/25/2010	8:04:03 PM	SiCl4 pre valve closed
10/25/2010	8:04:03 PM	SiCl4 post valve closed
10/25/2010	8:04:03 PM	Bubbler valve closed
10/25/2010	8:04:03 PM	Helium valve opened
10/25/2010	8:04:03 PM	Main Vac valve opened
10/25/2010	8:04:03 PM	Bypass valve opened
10/25/2010	8:04:03 PM	Helium MFC set to  100.000000
10/25/2010	8:04:03 PM	H2 MFC set to  0.000000
10/25/2010	8:04:03 PM	BCl3 MFC set to  0.000000
10/25/2010	8:04:03 PM	PHl3 MFC set to  0.000000
10/25/2010	8:04:03 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:04:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:04:03 PM	Tube furnace set to 0
10/25/2010	8:05:03 PM	Helium valve closed
10/25/2010	8:05:03 PM	H2 valve closed
10/25/2010	8:05:03 PM	BCl3 valve closed
10/25/2010	8:05:03 PM	PH3 valve closed
10/25/2010	8:05:03 PM	SiCl4 pre valve closed
10/25/2010	8:05:03 PM	SiCl4 post valve closed
10/25/2010	8:05:03 PM	Bubbler valve closed
10/25/2010	8:05:03 PM	Main Vac valve opened
10/25/2010	8:05:03 PM	Bypass valve opened
10/25/2010	8:05:03 PM	Helium MFC set to  0.000000
10/25/2010	8:05:03 PM	H2 MFC set to  0.000000
10/25/2010	8:05:03 PM	BCl3 MFC set to  0.000000
10/25/2010	8:05:03 PM	PHl3 MFC set to  0.000000
10/25/2010	8:05:03 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:05:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:05:03 PM	Tube furnace set to 0
10/25/2010	8:06:03 PM	H2 valve closed
10/25/2010	8:06:03 PM	BCl3 valve closed
10/25/2010	8:06:03 PM	PH3 valve closed
10/25/2010	8:06:03 PM	SiCl4 pre valve closed
10/25/2010	8:06:03 PM	SiCl4 post valve closed
10/25/2010	8:06:03 PM	Bubbler valve closed
10/25/2010	8:06:03 PM	Helium valve opened
10/25/2010	8:06:03 PM	Main Vac valve opened
10/25/2010	8:06:03 PM	Bypass valve opened
10/25/2010	8:06:03 PM	Helium MFC set to  100.000000
10/25/2010	8:06:03 PM	H2 MFC set to  0.000000
10/25/2010	8:06:03 PM	BCl3 MFC set to  0.000000
10/25/2010	8:06:03 PM	PHl3 MFC set to  0.000000
10/25/2010	8:06:03 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:06:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:06:04 PM	Tube furnace set to 0
10/25/2010	8:07:04 PM	Helium valve closed
10/25/2010	8:07:04 PM	H2 valve closed
10/25/2010	8:07:04 PM	BCl3 valve closed
10/25/2010	8:07:04 PM	PH3 valve closed
10/25/2010	8:07:04 PM	SiCl4 pre valve closed
10/25/2010	8:07:04 PM	SiCl4 post valve closed
10/25/2010	8:07:04 PM	Bubbler valve closed
10/25/2010	8:07:04 PM	Main Vac valve opened
10/25/2010	8:07:04 PM	Bypass valve opened
10/25/2010	8:07:04 PM	Helium MFC set to  0.000000
10/25/2010	8:07:04 PM	H2 MFC set to  0.000000
10/25/2010	8:07:04 PM	BCl3 MFC set to  0.000000
10/25/2010	8:07:04 PM	PHl3 MFC set to  0.000000
10/25/2010	8:07:04 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:07:04 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:07:04 PM	Tube furnace set to 0
10/25/2010	8:08:04 PM	H2 valve closed
10/25/2010	8:08:04 PM	BCl3 valve closed
10/25/2010	8:08:04 PM	PH3 valve closed
10/25/2010	8:08:04 PM	SiCl4 pre valve closed
10/25/2010	8:08:04 PM	SiCl4 post valve closed
10/25/2010	8:08:04 PM	Bubbler valve closed
10/25/2010	8:08:04 PM	Helium valve opened
10/25/2010	8:08:04 PM	Main Vac valve opened
10/25/2010	8:08:04 PM	Bypass valve opened
10/25/2010	8:08:04 PM	Helium MFC set to  100.000000
10/25/2010	8:08:04 PM	H2 MFC set to  0.000000
10/25/2010	8:08:04 PM	BCl3 MFC set to  0.000000
10/25/2010	8:08:04 PM	PHl3 MFC set to  0.000000
10/25/2010	8:08:04 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:08:04 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:08:04 PM	Tube furnace set to 0
10/25/2010	8:09:04 PM	Helium valve closed
10/25/2010	8:09:04 PM	H2 valve closed
10/25/2010	8:09:04 PM	BCl3 valve closed
10/25/2010	8:09:04 PM	PH3 valve closed
10/25/2010	8:09:04 PM	SiCl4 pre valve closed
10/25/2010	8:09:04 PM	SiCl4 post valve closed
10/25/2010	8:09:04 PM	Bubbler valve closed
10/25/2010	8:09:04 PM	Main Vac valve opened
10/25/2010	8:09:04 PM	Bypass valve opened
10/25/2010	8:09:04 PM	Helium MFC set to  0.000000
10/25/2010	8:09:04 PM	H2 MFC set to  0.000000
10/25/2010	8:09:04 PM	BCl3 MFC set to  0.000000
10/25/2010	8:09:04 PM	PHl3 MFC set to  0.000000
10/25/2010	8:09:04 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:09:04 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:09:04 PM	Tube furnace set to 0
10/25/2010	8:10:04 PM	H2 valve closed
10/25/2010	8:10:04 PM	BCl3 valve closed
10/25/2010	8:10:04 PM	PH3 valve closed
10/25/2010	8:10:04 PM	SiCl4 pre valve closed
10/25/2010	8:10:04 PM	SiCl4 post valve closed
10/25/2010	8:10:04 PM	Bubbler valve closed
10/25/2010	8:10:04 PM	Helium valve opened
10/25/2010	8:10:04 PM	Main Vac valve opened
10/25/2010	8:10:04 PM	Bypass valve opened
10/25/2010	8:10:04 PM	Helium MFC set to  100.000000
10/25/2010	8:10:04 PM	H2 MFC set to  0.000000
10/25/2010	8:10:04 PM	BCl3 MFC set to  0.000000
10/25/2010	8:10:04 PM	PHl3 MFC set to  0.000000
10/25/2010	8:10:04 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:10:04 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:10:04 PM	Tube furnace set to 0
10/25/2010	8:11:04 PM	Helium valve closed
10/25/2010	8:11:04 PM	H2 valve closed
10/25/2010	8:11:04 PM	BCl3 valve closed
10/25/2010	8:11:04 PM	PH3 valve closed
10/25/2010	8:11:04 PM	SiCl4 pre valve closed
10/25/2010	8:11:04 PM	SiCl4 post valve closed
10/25/2010	8:11:04 PM	Bubbler valve closed
10/25/2010	8:11:04 PM	Main Vac valve opened
10/25/2010	8:11:04 PM	Bypass valve opened
10/25/2010	8:11:04 PM	Helium MFC set to  0.000000
10/25/2010	8:11:04 PM	H2 MFC set to  0.000000
10/25/2010	8:11:04 PM	BCl3 MFC set to  0.000000
10/25/2010	8:11:04 PM	PHl3 MFC set to  0.000000
10/25/2010	8:11:04 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:11:04 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:11:05 PM	Tube furnace set to 0
10/25/2010	8:12:05 PM	H2 valve closed
10/25/2010	8:12:05 PM	BCl3 valve closed
10/25/2010	8:12:05 PM	PH3 valve closed
10/25/2010	8:12:05 PM	SiCl4 pre valve closed
10/25/2010	8:12:05 PM	SiCl4 post valve closed
10/25/2010	8:12:05 PM	Bubbler valve closed
10/25/2010	8:12:05 PM	Helium valve opened
10/25/2010	8:12:05 PM	Main Vac valve opened
10/25/2010	8:12:05 PM	Bypass valve opened
10/25/2010	8:12:05 PM	Helium MFC set to  100.000000
10/25/2010	8:12:05 PM	H2 MFC set to  0.000000
10/25/2010	8:12:05 PM	BCl3 MFC set to  0.000000
10/25/2010	8:12:05 PM	PHl3 MFC set to  0.000000
10/25/2010	8:12:05 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:12:05 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:12:05 PM	Tube furnace set to 0
10/25/2010	8:13:05 PM	Helium valve closed
10/25/2010	8:13:05 PM	H2 valve closed
10/25/2010	8:13:05 PM	BCl3 valve closed
10/25/2010	8:13:05 PM	PH3 valve closed
10/25/2010	8:13:05 PM	SiCl4 pre valve closed
10/25/2010	8:13:05 PM	SiCl4 post valve closed
10/25/2010	8:13:05 PM	Bubbler valve closed
10/25/2010	8:13:05 PM	Main Vac valve opened
10/25/2010	8:13:05 PM	Bypass valve opened
10/25/2010	8:13:05 PM	Helium MFC set to  0.000000
10/25/2010	8:13:05 PM	H2 MFC set to  0.000000
10/25/2010	8:13:05 PM	BCl3 MFC set to  0.000000
10/25/2010	8:13:05 PM	PHl3 MFC set to  0.000000
10/25/2010	8:13:05 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:13:05 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:13:05 PM	Tube furnace set to 0
10/25/2010	8:14:05 PM	H2 valve closed
10/25/2010	8:14:05 PM	BCl3 valve closed
10/25/2010	8:14:05 PM	PH3 valve closed
10/25/2010	8:14:05 PM	SiCl4 pre valve closed
10/25/2010	8:14:05 PM	SiCl4 post valve closed
10/25/2010	8:14:05 PM	Bubbler valve closed
10/25/2010	8:14:05 PM	Helium valve opened
10/25/2010	8:14:05 PM	Main Vac valve opened
10/25/2010	8:14:05 PM	Bypass valve opened
10/25/2010	8:14:05 PM	Helium MFC set to  100.000000
10/25/2010	8:14:05 PM	H2 MFC set to  0.000000
10/25/2010	8:14:05 PM	BCl3 MFC set to  0.000000
10/25/2010	8:14:05 PM	PHl3 MFC set to  0.000000
10/25/2010	8:14:05 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:14:05 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:14:05 PM	Tube furnace set to 0
10/25/2010	8:15:05 PM	Helium valve closed
10/25/2010	8:15:05 PM	H2 valve closed
10/25/2010	8:15:05 PM	BCl3 valve closed
10/25/2010	8:15:05 PM	PH3 valve closed
10/25/2010	8:15:05 PM	SiCl4 pre valve closed
10/25/2010	8:15:05 PM	SiCl4 post valve closed
10/25/2010	8:15:05 PM	Bubbler valve closed
10/25/2010	8:15:05 PM	Main Vac valve opened
10/25/2010	8:15:05 PM	Bypass valve opened
10/25/2010	8:15:05 PM	Helium MFC set to  0.000000
10/25/2010	8:15:05 PM	H2 MFC set to  0.000000
10/25/2010	8:15:05 PM	BCl3 MFC set to  0.000000
10/25/2010	8:15:05 PM	PHl3 MFC set to  0.000000
10/25/2010	8:15:05 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:15:05 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:15:05 PM	Tube furnace set to 0
10/25/2010	8:16:05 PM	H2 valve closed
10/25/2010	8:16:05 PM	BCl3 valve closed
10/25/2010	8:16:05 PM	PH3 valve closed
10/25/2010	8:16:05 PM	SiCl4 pre valve closed
10/25/2010	8:16:05 PM	SiCl4 post valve closed
10/25/2010	8:16:05 PM	Bubbler valve closed
10/25/2010	8:16:05 PM	Helium valve opened
10/25/2010	8:16:05 PM	Main Vac valve opened
10/25/2010	8:16:05 PM	Bypass valve opened
10/25/2010	8:16:05 PM	Helium MFC set to  100.000000
10/25/2010	8:16:05 PM	H2 MFC set to  0.000000
10/25/2010	8:16:05 PM	BCl3 MFC set to  0.000000
10/25/2010	8:16:05 PM	PHl3 MFC set to  0.000000
10/25/2010	8:16:05 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:16:05 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:16:06 PM	Tube furnace set to 0
10/25/2010	8:17:06 PM	Helium valve closed
10/25/2010	8:17:06 PM	H2 valve closed
10/25/2010	8:17:06 PM	BCl3 valve closed
10/25/2010	8:17:06 PM	PH3 valve closed
10/25/2010	8:17:06 PM	SiCl4 pre valve closed
10/25/2010	8:17:06 PM	SiCl4 post valve closed
10/25/2010	8:17:06 PM	Bubbler valve closed
10/25/2010	8:17:06 PM	Main Vac valve opened
10/25/2010	8:17:06 PM	Bypass valve opened
10/25/2010	8:17:06 PM	Helium MFC set to  0.000000
10/25/2010	8:17:06 PM	H2 MFC set to  0.000000
10/25/2010	8:17:06 PM	BCl3 MFC set to  0.000000
10/25/2010	8:17:06 PM	PHl3 MFC set to  0.000000
10/25/2010	8:17:06 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:17:06 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:17:06 PM	Tube furnace set to 0
10/25/2010	8:18:06 PM	H2 valve closed
10/25/2010	8:18:06 PM	BCl3 valve closed
10/25/2010	8:18:06 PM	PH3 valve closed
10/25/2010	8:18:06 PM	SiCl4 pre valve closed
10/25/2010	8:18:06 PM	SiCl4 post valve closed
10/25/2010	8:18:06 PM	Bubbler valve closed
10/25/2010	8:18:06 PM	Helium valve opened
10/25/2010	8:18:06 PM	Main Vac valve opened
10/25/2010	8:18:06 PM	Bypass valve opened
10/25/2010	8:18:06 PM	Helium MFC set to  100.000000
10/25/2010	8:18:06 PM	H2 MFC set to  0.000000
10/25/2010	8:18:06 PM	BCl3 MFC set to  0.000000
10/25/2010	8:18:06 PM	PHl3 MFC set to  0.000000
10/25/2010	8:18:06 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:18:06 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:18:06 PM	Tube furnace set to 0
10/25/2010	8:19:06 PM	Helium valve closed
10/25/2010	8:19:06 PM	H2 valve closed
10/25/2010	8:19:06 PM	BCl3 valve closed
10/25/2010	8:19:06 PM	PH3 valve closed
10/25/2010	8:19:06 PM	SiCl4 pre valve closed
10/25/2010	8:19:06 PM	SiCl4 post valve closed
10/25/2010	8:19:06 PM	Bubbler valve closed
10/25/2010	8:19:06 PM	Main Vac valve opened
10/25/2010	8:19:06 PM	Bypass valve opened
10/25/2010	8:19:06 PM	Helium MFC set to  0.000000
10/25/2010	8:19:06 PM	H2 MFC set to  0.000000
10/25/2010	8:19:06 PM	BCl3 MFC set to  0.000000
10/25/2010	8:19:06 PM	PHl3 MFC set to  0.000000
10/25/2010	8:19:06 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:19:06 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:19:06 PM	Tube furnace set to 0
10/25/2010	8:20:06 PM	H2 valve closed
10/25/2010	8:20:06 PM	BCl3 valve closed
10/25/2010	8:20:06 PM	PH3 valve closed
10/25/2010	8:20:06 PM	SiCl4 pre valve closed
10/25/2010	8:20:06 PM	SiCl4 post valve closed
10/25/2010	8:20:06 PM	Bubbler valve closed
10/25/2010	8:20:06 PM	Helium valve opened
10/25/2010	8:20:06 PM	Main Vac valve opened
10/25/2010	8:20:06 PM	Bypass valve opened
10/25/2010	8:20:06 PM	Helium MFC set to  100.000000
10/25/2010	8:20:06 PM	H2 MFC set to  0.000000
10/25/2010	8:20:06 PM	BCl3 MFC set to  0.000000
10/25/2010	8:20:06 PM	PHl3 MFC set to  0.000000
10/25/2010	8:20:06 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:20:06 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:20:06 PM	Tube furnace set to 0
10/25/2010	8:21:06 PM	Helium valve closed
10/25/2010	8:21:06 PM	H2 valve closed
10/25/2010	8:21:06 PM	BCl3 valve closed
10/25/2010	8:21:06 PM	PH3 valve closed
10/25/2010	8:21:06 PM	SiCl4 pre valve closed
10/25/2010	8:21:06 PM	SiCl4 post valve closed
10/25/2010	8:21:06 PM	Bubbler valve closed
10/25/2010	8:21:06 PM	Main Vac valve opened
10/25/2010	8:21:06 PM	Bypass valve opened
10/25/2010	8:21:06 PM	Helium MFC set to  0.000000
10/25/2010	8:21:06 PM	H2 MFC set to  0.000000
10/25/2010	8:21:06 PM	BCl3 MFC set to  0.000000
10/25/2010	8:21:06 PM	PHl3 MFC set to  0.000000
10/25/2010	8:21:06 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:21:06 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:21:06 PM	Tube furnace set to 0
10/25/2010	8:22:07 PM	H2 valve closed
10/25/2010	8:22:07 PM	BCl3 valve closed
10/25/2010	8:22:07 PM	PH3 valve closed
10/25/2010	8:22:07 PM	SiCl4 pre valve closed
10/25/2010	8:22:07 PM	SiCl4 post valve closed
10/25/2010	8:22:07 PM	Bubbler valve closed
10/25/2010	8:22:07 PM	Helium valve opened
10/25/2010	8:22:07 PM	Main Vac valve opened
10/25/2010	8:22:07 PM	Bypass valve opened
10/25/2010	8:22:07 PM	Helium MFC set to  100.000000
10/25/2010	8:22:07 PM	H2 MFC set to  0.000000
10/25/2010	8:22:07 PM	BCl3 MFC set to  0.000000
10/25/2010	8:22:07 PM	PHl3 MFC set to  0.000000
10/25/2010	8:22:07 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:22:07 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:22:07 PM	Tube furnace set to 0
10/25/2010	8:23:07 PM	Helium valve closed
10/25/2010	8:23:07 PM	H2 valve closed
10/25/2010	8:23:07 PM	BCl3 valve closed
10/25/2010	8:23:07 PM	PH3 valve closed
10/25/2010	8:23:07 PM	SiCl4 pre valve closed
10/25/2010	8:23:07 PM	SiCl4 post valve closed
10/25/2010	8:23:07 PM	Bubbler valve closed
10/25/2010	8:23:07 PM	Main Vac valve opened
10/25/2010	8:23:07 PM	Bypass valve opened
10/25/2010	8:23:07 PM	Helium MFC set to  0.000000
10/25/2010	8:23:07 PM	H2 MFC set to  0.000000
10/25/2010	8:23:07 PM	BCl3 MFC set to  0.000000
10/25/2010	8:23:07 PM	PHl3 MFC set to  0.000000
10/25/2010	8:23:07 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:23:07 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:23:07 PM	Tube furnace set to 0
10/25/2010	8:23:08 PM	Run finished at 8:23 PM
10/25/2010	8:23:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	8:25:28 PM	Bypass valve closed
10/25/2010	8:25:28 PM	Main Vac valve closed
10/25/2010	8:25:52 PM	Bypass valve opened
10/25/2010	8:25:53 PM	Main Vac valve opened
10/25/2010	8:26:45 PM	Recipe started at 8:26 PM
10/25/2010	8:26:45 PM	Helium valve closed
10/25/2010	8:26:45 PM	BCl3 valve closed
10/25/2010	8:26:45 PM	PH3 valve closed
10/25/2010	8:26:45 PM	SiCl4 pre valve closed
10/25/2010	8:26:45 PM	SiCl4 post valve closed
10/25/2010	8:26:45 PM	Main Vac valve closed
10/25/2010	8:26:45 PM	Bypass valve closed
10/25/2010	8:26:45 PM	Bubbler valve closed
10/25/2010	8:26:45 PM	H2 valve opened
10/25/2010	8:26:45 PM	Helium MFC set to  0.000000
10/25/2010	8:26:45 PM	H2 MFC set to  500.000000
10/25/2010	8:26:45 PM	BCl3 MFC set to  0.000000
10/25/2010	8:26:45 PM	PHl3 MFC set to  0.000000
10/25/2010	8:26:45 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:26:45 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:26:46 PM	Tube furnace set to 0
10/25/2010	8:28:02 PM	Helium valve closed
10/25/2010	8:28:02 PM	BCl3 valve closed
10/25/2010	8:28:02 PM	PH3 valve closed
10/25/2010	8:28:02 PM	SiCl4 pre valve closed
10/25/2010	8:28:02 PM	SiCl4 post valve closed
10/25/2010	8:28:02 PM	Main Vac valve closed
10/25/2010	8:28:02 PM	Bypass valve closed
10/25/2010	8:28:02 PM	H2 valve opened
10/25/2010	8:28:02 PM	Bubbler valve opened
10/25/2010	8:28:02 PM	Helium MFC set to  0.000000
10/25/2010	8:28:02 PM	H2 MFC set to  500.000000
10/25/2010	8:28:02 PM	BCl3 MFC set to  0.000000
10/25/2010	8:28:02 PM	PHl3 MFC set to  0.000000
10/25/2010	8:28:02 PM	SiCl4 MFC set to  0.000000
10/25/2010	8:28:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:28:02 PM	Tube furnace set to 1000
10/25/2010	8:48:02 PM	Helium valve closed
10/25/2010	8:48:02 PM	BCl3 valve closed
10/25/2010	8:48:02 PM	PH3 valve closed
10/25/2010	8:48:02 PM	Main Vac valve closed
10/25/2010	8:48:02 PM	Bypass valve closed
10/25/2010	8:48:02 PM	H2 valve opened
10/25/2010	8:48:02 PM	SiCl4 pre valve opened
10/25/2010	8:48:02 PM	SiCl4 post valve opened
10/25/2010	8:48:02 PM	Bubbler valve opened
10/25/2010	8:48:02 PM	Helium MFC set to  0.000000
10/25/2010	8:48:02 PM	H2 MFC set to  500.000000
10/25/2010	8:48:02 PM	BCl3 MFC set to  0.000000
10/25/2010	8:48:02 PM	PHl3 MFC set to  0.000000
10/25/2010	8:48:02 PM	SiCl4 MFC set to  50.000000
10/25/2010	8:48:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	8:48:02 PM	Tube furnace set to 1000
10/25/2010	9:08:03 PM	H2 valve closed
10/25/2010	9:08:03 PM	BCl3 valve closed
10/25/2010	9:08:03 PM	PH3 valve closed
10/25/2010	9:08:03 PM	SiCl4 pre valve closed
10/25/2010	9:08:03 PM	SiCl4 post valve closed
10/25/2010	9:08:03 PM	Main Vac valve closed
10/25/2010	9:08:03 PM	Bypass valve closed
10/25/2010	9:08:03 PM	Helium valve opened
10/25/2010	9:08:03 PM	Bubbler valve opened
10/25/2010	9:08:03 PM	Helium MFC set to  500.000000
10/25/2010	9:08:03 PM	H2 MFC set to  0.000000
10/25/2010	9:08:03 PM	BCl3 MFC set to  0.000000
10/25/2010	9:08:03 PM	PHl3 MFC set to  0.000000
10/25/2010	9:08:03 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:08:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:08:03 PM	Tube furnace set to 0
10/25/2010	9:28:03 PM	Helium valve closed
10/25/2010	9:28:03 PM	H2 valve closed
10/25/2010	9:28:03 PM	BCl3 valve closed
10/25/2010	9:28:03 PM	PH3 valve closed
10/25/2010	9:28:03 PM	SiCl4 pre valve closed
10/25/2010	9:28:03 PM	SiCl4 post valve closed
10/25/2010	9:28:03 PM	Main Vac valve closed
10/25/2010	9:28:03 PM	Bypass valve closed
10/25/2010	9:28:03 PM	Bubbler valve closed
10/25/2010	9:28:03 PM	Helium MFC set to  0.000000
10/25/2010	9:28:03 PM	H2 MFC set to  0.000000
10/25/2010	9:28:03 PM	BCl3 MFC set to  0.000000
10/25/2010	9:28:03 PM	PHl3 MFC set to  0.000000
10/25/2010	9:28:03 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:28:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:28:03 PM	Tube furnace set to 0
10/25/2010	9:28:03 PM	Run finished at 9:28 PM
10/25/2010	9:39:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	9:39:43 PM	Recipe started at 9:39 PM
10/25/2010	9:39:43 PM	H2 valve closed
10/25/2010	9:39:43 PM	BCl3 valve closed
10/25/2010	9:39:43 PM	PH3 valve closed
10/25/2010	9:39:43 PM	SiCl4 pre valve closed
10/25/2010	9:39:43 PM	SiCl4 post valve closed
10/25/2010	9:39:43 PM	Main Vac valve closed
10/25/2010	9:39:43 PM	Bypass valve closed
10/25/2010	9:39:43 PM	Bubbler valve closed
10/25/2010	9:39:43 PM	Helium valve opened
10/25/2010	9:39:43 PM	Helium MFC set to  500.000000
10/25/2010	9:39:43 PM	H2 MFC set to  0.000000
10/25/2010	9:39:43 PM	BCl3 MFC set to  0.000000
10/25/2010	9:39:43 PM	PHl3 MFC set to  0.000000
10/25/2010	9:39:43 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:39:43 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:39:44 PM	Tube furnace set to 0
10/25/2010	9:39:48 PM	Helium valve closed
10/25/2010	9:39:48 PM	H2 valve closed
10/25/2010	9:39:48 PM	BCl3 valve closed
10/25/2010	9:39:48 PM	PH3 valve closed
10/25/2010	9:39:48 PM	SiCl4 pre valve closed
10/25/2010	9:39:48 PM	SiCl4 post valve closed
10/25/2010	9:39:48 PM	Main Vac valve closed
10/25/2010	9:39:48 PM	Bypass valve closed
10/25/2010	9:39:48 PM	Bubbler valve closed
10/25/2010	9:39:48 PM	Helium MFC set to  0.000000
10/25/2010	9:39:48 PM	H2 MFC set to  0.000000
10/25/2010	9:39:48 PM	BCl3 MFC set to  0.000000
10/25/2010	9:39:48 PM	PHl3 MFC set to  0.000000
10/25/2010	9:39:48 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:39:48 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:39:48 PM	Tube furnace set to 0
10/25/2010	9:39:49 PM	Run finished at 9:39 PM
10/25/2010	9:39:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	9:44:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	9:44:08 PM	Recipe started at 9:44 PM
10/25/2010	9:44:08 PM	Helium valve closed
10/25/2010	9:44:08 PM	H2 valve closed
10/25/2010	9:44:08 PM	BCl3 valve closed
10/25/2010	9:44:08 PM	PH3 valve closed
10/25/2010	9:44:08 PM	SiCl4 pre valve closed
10/25/2010	9:44:08 PM	SiCl4 post valve closed
10/25/2010	9:44:08 PM	Main Vac valve closed
10/25/2010	9:44:08 PM	Bubbler valve closed
10/25/2010	9:44:08 PM	Bypass valve opened
10/25/2010	9:44:08 PM	Helium MFC set to  0.000000
10/25/2010	9:44:08 PM	H2 MFC set to  0.000000
10/25/2010	9:44:08 PM	BCl3 MFC set to  0.000000
10/25/2010	9:44:08 PM	PHl3 MFC set to  0.000000
10/25/2010	9:44:08 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:44:08 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:44:09 PM	Tube furnace set to 0
10/25/2010	9:45:00 PM	Helium valve closed
10/25/2010	9:45:00 PM	H2 valve closed
10/25/2010	9:45:00 PM	BCl3 valve closed
10/25/2010	9:45:00 PM	PH3 valve closed
10/25/2010	9:45:00 PM	SiCl4 pre valve closed
10/25/2010	9:45:00 PM	SiCl4 post valve closed
10/25/2010	9:45:00 PM	Bubbler valve closed
10/25/2010	9:45:00 PM	Main Vac valve opened
10/25/2010	9:45:00 PM	Bypass valve opened
10/25/2010	9:45:00 PM	Helium MFC set to  0.000000
10/25/2010	9:45:00 PM	H2 MFC set to  0.000000
10/25/2010	9:45:00 PM	BCl3 MFC set to  0.000000
10/25/2010	9:45:00 PM	PHl3 MFC set to  0.000000
10/25/2010	9:45:00 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:45:00 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:45:00 PM	Tube furnace set to 0
10/25/2010	9:45:00 PM	Run finished at 9:45 PM
10/25/2010	9:45:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	9:46:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	9:46:37 PM	Recipe started at 9:46 PM
10/25/2010	9:46:37 PM	Helium valve closed
10/25/2010	9:46:37 PM	H2 valve closed
10/25/2010	9:46:37 PM	BCl3 valve closed
10/25/2010	9:46:37 PM	PH3 valve closed
10/25/2010	9:46:37 PM	SiCl4 pre valve closed
10/25/2010	9:46:37 PM	SiCl4 post valve closed
10/25/2010	9:46:37 PM	Main Vac valve closed
10/25/2010	9:46:37 PM	Bubbler valve closed
10/25/2010	9:46:37 PM	Bypass valve opened
10/25/2010	9:46:37 PM	Helium MFC set to  0.000000
10/25/2010	9:46:37 PM	H2 MFC set to  0.000000
10/25/2010	9:46:37 PM	BCl3 MFC set to  0.000000
10/25/2010	9:46:37 PM	PHl3 MFC set to  0.000000
10/25/2010	9:46:37 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:46:37 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:46:37 PM	Tube furnace set to 0
10/25/2010	9:46:38 PM	Helium valve closed
10/25/2010	9:46:38 PM	H2 valve closed
10/25/2010	9:46:38 PM	BCl3 valve closed
10/25/2010	9:46:38 PM	PH3 valve closed
10/25/2010	9:46:38 PM	SiCl4 pre valve closed
10/25/2010	9:46:38 PM	SiCl4 post valve closed
10/25/2010	9:46:38 PM	Bubbler valve closed
10/25/2010	9:46:38 PM	Main Vac valve opened
10/25/2010	9:46:38 PM	Bypass valve opened
10/25/2010	9:46:38 PM	Helium MFC set to  0.000000
10/25/2010	9:46:38 PM	H2 MFC set to  0.000000
10/25/2010	9:46:38 PM	BCl3 MFC set to  0.000000
10/25/2010	9:46:38 PM	PHl3 MFC set to  0.000000
10/25/2010	9:46:38 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:46:38 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:46:38 PM	Tube furnace set to 0
10/25/2010	9:47:38 PM	H2 valve closed
10/25/2010	9:47:38 PM	BCl3 valve closed
10/25/2010	9:47:38 PM	PH3 valve closed
10/25/2010	9:47:38 PM	SiCl4 pre valve closed
10/25/2010	9:47:38 PM	SiCl4 post valve closed
10/25/2010	9:47:38 PM	Bubbler valve closed
10/25/2010	9:47:38 PM	Helium valve opened
10/25/2010	9:47:38 PM	Main Vac valve opened
10/25/2010	9:47:38 PM	Bypass valve opened
10/25/2010	9:47:38 PM	Helium MFC set to  100.000000
10/25/2010	9:47:38 PM	H2 MFC set to  0.000000
10/25/2010	9:47:38 PM	BCl3 MFC set to  0.000000
10/25/2010	9:47:38 PM	PHl3 MFC set to  0.000000
10/25/2010	9:47:38 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:47:38 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:47:38 PM	Tube furnace set to 0
10/25/2010	9:48:38 PM	Helium valve closed
10/25/2010	9:48:38 PM	H2 valve closed
10/25/2010	9:48:38 PM	BCl3 valve closed
10/25/2010	9:48:38 PM	PH3 valve closed
10/25/2010	9:48:38 PM	SiCl4 pre valve closed
10/25/2010	9:48:38 PM	SiCl4 post valve closed
10/25/2010	9:48:38 PM	Bubbler valve closed
10/25/2010	9:48:38 PM	Main Vac valve opened
10/25/2010	9:48:38 PM	Bypass valve opened
10/25/2010	9:48:38 PM	Helium MFC set to  0.000000
10/25/2010	9:48:38 PM	H2 MFC set to  0.000000
10/25/2010	9:48:38 PM	BCl3 MFC set to  0.000000
10/25/2010	9:48:38 PM	PHl3 MFC set to  0.000000
10/25/2010	9:48:38 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:48:38 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:48:38 PM	Tube furnace set to 0
10/25/2010	9:49:38 PM	H2 valve closed
10/25/2010	9:49:38 PM	BCl3 valve closed
10/25/2010	9:49:38 PM	PH3 valve closed
10/25/2010	9:49:38 PM	SiCl4 pre valve closed
10/25/2010	9:49:38 PM	SiCl4 post valve closed
10/25/2010	9:49:38 PM	Bubbler valve closed
10/25/2010	9:49:38 PM	Helium valve opened
10/25/2010	9:49:38 PM	Main Vac valve opened
10/25/2010	9:49:38 PM	Bypass valve opened
10/25/2010	9:49:38 PM	Helium MFC set to  100.000000
10/25/2010	9:49:38 PM	H2 MFC set to  0.000000
10/25/2010	9:49:38 PM	BCl3 MFC set to  0.000000
10/25/2010	9:49:38 PM	PHl3 MFC set to  0.000000
10/25/2010	9:49:38 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:49:38 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:49:38 PM	Tube furnace set to 0
10/25/2010	9:50:38 PM	Helium valve closed
10/25/2010	9:50:38 PM	H2 valve closed
10/25/2010	9:50:38 PM	BCl3 valve closed
10/25/2010	9:50:38 PM	PH3 valve closed
10/25/2010	9:50:38 PM	SiCl4 pre valve closed
10/25/2010	9:50:38 PM	SiCl4 post valve closed
10/25/2010	9:50:38 PM	Bubbler valve closed
10/25/2010	9:50:38 PM	Main Vac valve opened
10/25/2010	9:50:38 PM	Bypass valve opened
10/25/2010	9:50:38 PM	Helium MFC set to  0.000000
10/25/2010	9:50:38 PM	H2 MFC set to  0.000000
10/25/2010	9:50:38 PM	BCl3 MFC set to  0.000000
10/25/2010	9:50:38 PM	PHl3 MFC set to  0.000000
10/25/2010	9:50:39 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:50:39 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:50:39 PM	Tube furnace set to 0
10/25/2010	9:51:39 PM	H2 valve closed
10/25/2010	9:51:39 PM	BCl3 valve closed
10/25/2010	9:51:39 PM	PH3 valve closed
10/25/2010	9:51:39 PM	SiCl4 pre valve closed
10/25/2010	9:51:39 PM	SiCl4 post valve closed
10/25/2010	9:51:39 PM	Bubbler valve closed
10/25/2010	9:51:39 PM	Helium valve opened
10/25/2010	9:51:39 PM	Main Vac valve opened
10/25/2010	9:51:39 PM	Bypass valve opened
10/25/2010	9:51:39 PM	Helium MFC set to  100.000000
10/25/2010	9:51:39 PM	H2 MFC set to  0.000000
10/25/2010	9:51:39 PM	BCl3 MFC set to  0.000000
10/25/2010	9:51:39 PM	PHl3 MFC set to  0.000000
10/25/2010	9:51:39 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:51:39 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:51:39 PM	Tube furnace set to 0
10/25/2010	9:52:39 PM	Helium valve closed
10/25/2010	9:52:39 PM	H2 valve closed
10/25/2010	9:52:39 PM	BCl3 valve closed
10/25/2010	9:52:39 PM	PH3 valve closed
10/25/2010	9:52:39 PM	SiCl4 pre valve closed
10/25/2010	9:52:39 PM	SiCl4 post valve closed
10/25/2010	9:52:39 PM	Bubbler valve closed
10/25/2010	9:52:39 PM	Main Vac valve opened
10/25/2010	9:52:39 PM	Bypass valve opened
10/25/2010	9:52:39 PM	Helium MFC set to  0.000000
10/25/2010	9:52:39 PM	H2 MFC set to  0.000000
10/25/2010	9:52:39 PM	BCl3 MFC set to  0.000000
10/25/2010	9:52:39 PM	PHl3 MFC set to  0.000000
10/25/2010	9:52:39 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:52:39 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:52:39 PM	Tube furnace set to 0
10/25/2010	9:53:39 PM	H2 valve closed
10/25/2010	9:53:39 PM	BCl3 valve closed
10/25/2010	9:53:39 PM	PH3 valve closed
10/25/2010	9:53:39 PM	SiCl4 pre valve closed
10/25/2010	9:53:39 PM	SiCl4 post valve closed
10/25/2010	9:53:39 PM	Bubbler valve closed
10/25/2010	9:53:39 PM	Helium valve opened
10/25/2010	9:53:39 PM	Main Vac valve opened
10/25/2010	9:53:39 PM	Bypass valve opened
10/25/2010	9:53:39 PM	Helium MFC set to  100.000000
10/25/2010	9:53:39 PM	H2 MFC set to  0.000000
10/25/2010	9:53:39 PM	BCl3 MFC set to  0.000000
10/25/2010	9:53:39 PM	PHl3 MFC set to  0.000000
10/25/2010	9:53:39 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:53:39 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:53:39 PM	Tube furnace set to 0
10/25/2010	9:54:39 PM	Helium valve closed
10/25/2010	9:54:39 PM	H2 valve closed
10/25/2010	9:54:39 PM	BCl3 valve closed
10/25/2010	9:54:39 PM	PH3 valve closed
10/25/2010	9:54:39 PM	SiCl4 pre valve closed
10/25/2010	9:54:39 PM	SiCl4 post valve closed
10/25/2010	9:54:39 PM	Bubbler valve closed
10/25/2010	9:54:39 PM	Main Vac valve opened
10/25/2010	9:54:39 PM	Bypass valve opened
10/25/2010	9:54:39 PM	Helium MFC set to  0.000000
10/25/2010	9:54:39 PM	H2 MFC set to  0.000000
10/25/2010	9:54:39 PM	BCl3 MFC set to  0.000000
10/25/2010	9:54:39 PM	PHl3 MFC set to  0.000000
10/25/2010	9:54:39 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:54:39 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:54:39 PM	Tube furnace set to 0
10/25/2010	9:55:39 PM	H2 valve closed
10/25/2010	9:55:39 PM	BCl3 valve closed
10/25/2010	9:55:39 PM	PH3 valve closed
10/25/2010	9:55:39 PM	SiCl4 pre valve closed
10/25/2010	9:55:39 PM	SiCl4 post valve closed
10/25/2010	9:55:39 PM	Bubbler valve closed
10/25/2010	9:55:39 PM	Helium valve opened
10/25/2010	9:55:39 PM	Main Vac valve opened
10/25/2010	9:55:39 PM	Bypass valve opened
10/25/2010	9:55:39 PM	Helium MFC set to  100.000000
10/25/2010	9:55:39 PM	H2 MFC set to  0.000000
10/25/2010	9:55:39 PM	BCl3 MFC set to  0.000000
10/25/2010	9:55:39 PM	PHl3 MFC set to  0.000000
10/25/2010	9:55:39 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:55:39 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:55:40 PM	Tube furnace set to 0
10/25/2010	9:56:40 PM	Helium valve closed
10/25/2010	9:56:40 PM	H2 valve closed
10/25/2010	9:56:40 PM	BCl3 valve closed
10/25/2010	9:56:40 PM	PH3 valve closed
10/25/2010	9:56:40 PM	SiCl4 pre valve closed
10/25/2010	9:56:40 PM	SiCl4 post valve closed
10/25/2010	9:56:40 PM	Bubbler valve closed
10/25/2010	9:56:40 PM	Main Vac valve opened
10/25/2010	9:56:40 PM	Bypass valve opened
10/25/2010	9:56:40 PM	Helium MFC set to  0.000000
10/25/2010	9:56:40 PM	H2 MFC set to  0.000000
10/25/2010	9:56:40 PM	BCl3 MFC set to  0.000000
10/25/2010	9:56:40 PM	PHl3 MFC set to  0.000000
10/25/2010	9:56:40 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:56:40 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:56:40 PM	Tube furnace set to 0
10/25/2010	9:57:40 PM	H2 valve closed
10/25/2010	9:57:40 PM	BCl3 valve closed
10/25/2010	9:57:40 PM	PH3 valve closed
10/25/2010	9:57:40 PM	SiCl4 pre valve closed
10/25/2010	9:57:40 PM	SiCl4 post valve closed
10/25/2010	9:57:40 PM	Bubbler valve closed
10/25/2010	9:57:40 PM	Helium valve opened
10/25/2010	9:57:40 PM	Main Vac valve opened
10/25/2010	9:57:40 PM	Bypass valve opened
10/25/2010	9:57:40 PM	Helium MFC set to  100.000000
10/25/2010	9:57:40 PM	H2 MFC set to  0.000000
10/25/2010	9:57:40 PM	BCl3 MFC set to  0.000000
10/25/2010	9:57:40 PM	PHl3 MFC set to  0.000000
10/25/2010	9:57:40 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:57:40 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:57:40 PM	Tube furnace set to 0
10/25/2010	9:58:40 PM	Helium valve closed
10/25/2010	9:58:40 PM	H2 valve closed
10/25/2010	9:58:40 PM	BCl3 valve closed
10/25/2010	9:58:40 PM	PH3 valve closed
10/25/2010	9:58:40 PM	SiCl4 pre valve closed
10/25/2010	9:58:40 PM	SiCl4 post valve closed
10/25/2010	9:58:40 PM	Bubbler valve closed
10/25/2010	9:58:40 PM	Main Vac valve opened
10/25/2010	9:58:40 PM	Bypass valve opened
10/25/2010	9:58:40 PM	Helium MFC set to  0.000000
10/25/2010	9:58:40 PM	H2 MFC set to  0.000000
10/25/2010	9:58:40 PM	BCl3 MFC set to  0.000000
10/25/2010	9:58:40 PM	PHl3 MFC set to  0.000000
10/25/2010	9:58:40 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:58:40 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:58:40 PM	Tube furnace set to 0
10/25/2010	9:59:40 PM	H2 valve closed
10/25/2010	9:59:40 PM	BCl3 valve closed
10/25/2010	9:59:40 PM	PH3 valve closed
10/25/2010	9:59:40 PM	SiCl4 pre valve closed
10/25/2010	9:59:40 PM	SiCl4 post valve closed
10/25/2010	9:59:40 PM	Bubbler valve closed
10/25/2010	9:59:40 PM	Helium valve opened
10/25/2010	9:59:40 PM	Main Vac valve opened
10/25/2010	9:59:40 PM	Bypass valve opened
10/25/2010	9:59:40 PM	Helium MFC set to  100.000000
10/25/2010	9:59:40 PM	H2 MFC set to  0.000000
10/25/2010	9:59:40 PM	BCl3 MFC set to  0.000000
10/25/2010	9:59:40 PM	PHl3 MFC set to  0.000000
10/25/2010	9:59:40 PM	SiCl4 MFC set to  0.000000
10/25/2010	9:59:40 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	9:59:40 PM	Tube furnace set to 0
10/25/2010	10:00:40 PM	Helium valve closed
10/25/2010	10:00:40 PM	H2 valve closed
10/25/2010	10:00:40 PM	BCl3 valve closed
10/25/2010	10:00:40 PM	PH3 valve closed
10/25/2010	10:00:40 PM	SiCl4 pre valve closed
10/25/2010	10:00:40 PM	SiCl4 post valve closed
10/25/2010	10:00:40 PM	Bubbler valve closed
10/25/2010	10:00:40 PM	Main Vac valve opened
10/25/2010	10:00:40 PM	Bypass valve opened
10/25/2010	10:00:40 PM	Helium MFC set to  0.000000
10/25/2010	10:00:40 PM	H2 MFC set to  0.000000
10/25/2010	10:00:40 PM	BCl3 MFC set to  0.000000
10/25/2010	10:00:40 PM	PHl3 MFC set to  0.000000
10/25/2010	10:00:40 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:00:40 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:00:41 PM	Tube furnace set to 0
10/25/2010	10:01:41 PM	H2 valve closed
10/25/2010	10:01:41 PM	BCl3 valve closed
10/25/2010	10:01:41 PM	PH3 valve closed
10/25/2010	10:01:41 PM	SiCl4 pre valve closed
10/25/2010	10:01:41 PM	SiCl4 post valve closed
10/25/2010	10:01:41 PM	Bubbler valve closed
10/25/2010	10:01:41 PM	Helium valve opened
10/25/2010	10:01:41 PM	Main Vac valve opened
10/25/2010	10:01:41 PM	Bypass valve opened
10/25/2010	10:01:41 PM	Helium MFC set to  100.000000
10/25/2010	10:01:41 PM	H2 MFC set to  0.000000
10/25/2010	10:01:41 PM	BCl3 MFC set to  0.000000
10/25/2010	10:01:41 PM	PHl3 MFC set to  0.000000
10/25/2010	10:01:41 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:01:41 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:01:41 PM	Tube furnace set to 0
10/25/2010	10:02:41 PM	Helium valve closed
10/25/2010	10:02:41 PM	H2 valve closed
10/25/2010	10:02:41 PM	BCl3 valve closed
10/25/2010	10:02:41 PM	PH3 valve closed
10/25/2010	10:02:41 PM	SiCl4 pre valve closed
10/25/2010	10:02:41 PM	SiCl4 post valve closed
10/25/2010	10:02:41 PM	Bubbler valve closed
10/25/2010	10:02:41 PM	Main Vac valve opened
10/25/2010	10:02:41 PM	Bypass valve opened
10/25/2010	10:02:41 PM	Helium MFC set to  0.000000
10/25/2010	10:02:41 PM	H2 MFC set to  0.000000
10/25/2010	10:02:41 PM	BCl3 MFC set to  0.000000
10/25/2010	10:02:41 PM	PHl3 MFC set to  0.000000
10/25/2010	10:02:41 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:02:41 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:02:41 PM	Tube furnace set to 0
10/25/2010	10:03:41 PM	H2 valve closed
10/25/2010	10:03:41 PM	BCl3 valve closed
10/25/2010	10:03:41 PM	PH3 valve closed
10/25/2010	10:03:41 PM	SiCl4 pre valve closed
10/25/2010	10:03:41 PM	SiCl4 post valve closed
10/25/2010	10:03:41 PM	Bubbler valve closed
10/25/2010	10:03:41 PM	Helium valve opened
10/25/2010	10:03:41 PM	Main Vac valve opened
10/25/2010	10:03:41 PM	Bypass valve opened
10/25/2010	10:03:41 PM	Helium MFC set to  100.000000
10/25/2010	10:03:41 PM	H2 MFC set to  0.000000
10/25/2010	10:03:41 PM	BCl3 MFC set to  0.000000
10/25/2010	10:03:41 PM	PHl3 MFC set to  0.000000
10/25/2010	10:03:41 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:03:41 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:03:41 PM	Tube furnace set to 0
10/25/2010	10:04:41 PM	Helium valve closed
10/25/2010	10:04:41 PM	H2 valve closed
10/25/2010	10:04:41 PM	BCl3 valve closed
10/25/2010	10:04:41 PM	PH3 valve closed
10/25/2010	10:04:41 PM	SiCl4 pre valve closed
10/25/2010	10:04:41 PM	SiCl4 post valve closed
10/25/2010	10:04:41 PM	Bubbler valve closed
10/25/2010	10:04:41 PM	Main Vac valve opened
10/25/2010	10:04:41 PM	Bypass valve opened
10/25/2010	10:04:41 PM	Helium MFC set to  0.000000
10/25/2010	10:04:41 PM	H2 MFC set to  0.000000
10/25/2010	10:04:41 PM	BCl3 MFC set to  0.000000
10/25/2010	10:04:41 PM	PHl3 MFC set to  0.000000
10/25/2010	10:04:41 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:04:41 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:04:41 PM	Tube furnace set to 0
10/25/2010	10:05:41 PM	H2 valve closed
10/25/2010	10:05:41 PM	BCl3 valve closed
10/25/2010	10:05:41 PM	PH3 valve closed
10/25/2010	10:05:41 PM	SiCl4 pre valve closed
10/25/2010	10:05:41 PM	SiCl4 post valve closed
10/25/2010	10:05:41 PM	Bubbler valve closed
10/25/2010	10:05:41 PM	Helium valve opened
10/25/2010	10:05:41 PM	Main Vac valve opened
10/25/2010	10:05:41 PM	Bypass valve opened
10/25/2010	10:05:41 PM	Helium MFC set to  100.000000
10/25/2010	10:05:41 PM	H2 MFC set to  0.000000
10/25/2010	10:05:41 PM	BCl3 MFC set to  0.000000
10/25/2010	10:05:41 PM	PHl3 MFC set to  0.000000
10/25/2010	10:05:41 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:05:41 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:05:42 PM	Tube furnace set to 0
10/25/2010	10:06:42 PM	Helium valve closed
10/25/2010	10:06:42 PM	H2 valve closed
10/25/2010	10:06:42 PM	BCl3 valve closed
10/25/2010	10:06:42 PM	PH3 valve closed
10/25/2010	10:06:42 PM	SiCl4 pre valve closed
10/25/2010	10:06:42 PM	SiCl4 post valve closed
10/25/2010	10:06:42 PM	Bubbler valve closed
10/25/2010	10:06:42 PM	Main Vac valve opened
10/25/2010	10:06:42 PM	Bypass valve opened
10/25/2010	10:06:42 PM	Helium MFC set to  0.000000
10/25/2010	10:06:42 PM	H2 MFC set to  0.000000
10/25/2010	10:06:42 PM	BCl3 MFC set to  0.000000
10/25/2010	10:06:42 PM	PHl3 MFC set to  0.000000
10/25/2010	10:06:42 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:06:42 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:06:42 PM	Tube furnace set to 0
10/25/2010	10:06:43 PM	Run finished at 10:06 PM
10/25/2010	10:06:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	10:14:15 PM	Bypass valve closed
10/25/2010	10:14:16 PM	Main Vac valve closed
10/25/2010	10:14:56 PM	Bypass valve opened
10/25/2010	10:14:57 PM	Main Vac valve opened
10/25/2010	10:14:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	10:15:11 PM	Recipe started at 10:15 PM
10/25/2010	10:15:11 PM	Helium valve closed
10/25/2010	10:15:11 PM	H2 valve closed
10/25/2010	10:15:11 PM	BCl3 valve closed
10/25/2010	10:15:11 PM	PH3 valve closed
10/25/2010	10:15:11 PM	SiCl4 pre valve closed
10/25/2010	10:15:11 PM	SiCl4 post valve closed
10/25/2010	10:15:11 PM	Main Vac valve closed
10/25/2010	10:15:11 PM	Bubbler valve closed
10/25/2010	10:15:11 PM	Bypass valve opened
10/25/2010	10:15:11 PM	Helium MFC set to  0.000000
10/25/2010	10:15:11 PM	H2 MFC set to  0.000000
10/25/2010	10:15:11 PM	BCl3 MFC set to  0.000000
10/25/2010	10:15:11 PM	PHl3 MFC set to  0.000000
10/25/2010	10:15:11 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:15:11 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:15:11 PM	Tube furnace set to 0
10/25/2010	10:15:11 PM	Helium valve closed
10/25/2010	10:15:11 PM	H2 valve closed
10/25/2010	10:15:11 PM	BCl3 valve closed
10/25/2010	10:15:11 PM	PH3 valve closed
10/25/2010	10:15:11 PM	SiCl4 pre valve closed
10/25/2010	10:15:11 PM	SiCl4 post valve closed
10/25/2010	10:15:11 PM	Bubbler valve closed
10/25/2010	10:15:11 PM	Main Vac valve opened
10/25/2010	10:15:11 PM	Bypass valve opened
10/25/2010	10:15:11 PM	Helium MFC set to  0.000000
10/25/2010	10:15:11 PM	H2 MFC set to  0.000000
10/25/2010	10:15:11 PM	BCl3 MFC set to  0.000000
10/25/2010	10:15:11 PM	PHl3 MFC set to  0.000000
10/25/2010	10:15:11 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:15:11 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:15:11 PM	Tube furnace set to 0
10/25/2010	10:16:11 PM	H2 valve closed
10/25/2010	10:16:11 PM	BCl3 valve closed
10/25/2010	10:16:11 PM	PH3 valve closed
10/25/2010	10:16:11 PM	SiCl4 pre valve closed
10/25/2010	10:16:11 PM	SiCl4 post valve closed
10/25/2010	10:16:11 PM	Bubbler valve closed
10/25/2010	10:16:11 PM	Helium valve opened
10/25/2010	10:16:11 PM	Main Vac valve opened
10/25/2010	10:16:11 PM	Bypass valve opened
10/25/2010	10:16:11 PM	Helium MFC set to  100.000000
10/25/2010	10:16:11 PM	H2 MFC set to  0.000000
10/25/2010	10:16:11 PM	BCl3 MFC set to  0.000000
10/25/2010	10:16:11 PM	PHl3 MFC set to  0.000000
10/25/2010	10:16:11 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:16:11 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:16:12 PM	Tube furnace set to 0
10/25/2010	10:17:12 PM	Helium valve closed
10/25/2010	10:17:12 PM	H2 valve closed
10/25/2010	10:17:12 PM	BCl3 valve closed
10/25/2010	10:17:12 PM	PH3 valve closed
10/25/2010	10:17:12 PM	SiCl4 pre valve closed
10/25/2010	10:17:12 PM	SiCl4 post valve closed
10/25/2010	10:17:12 PM	Bubbler valve closed
10/25/2010	10:17:12 PM	Main Vac valve opened
10/25/2010	10:17:12 PM	Bypass valve opened
10/25/2010	10:17:12 PM	Helium MFC set to  0.000000
10/25/2010	10:17:12 PM	H2 MFC set to  0.000000
10/25/2010	10:17:12 PM	BCl3 MFC set to  0.000000
10/25/2010	10:17:12 PM	PHl3 MFC set to  0.000000
10/25/2010	10:17:12 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:17:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:17:12 PM	Tube furnace set to 0
10/25/2010	10:18:12 PM	H2 valve closed
10/25/2010	10:18:12 PM	BCl3 valve closed
10/25/2010	10:18:12 PM	PH3 valve closed
10/25/2010	10:18:12 PM	SiCl4 pre valve closed
10/25/2010	10:18:12 PM	SiCl4 post valve closed
10/25/2010	10:18:12 PM	Bubbler valve closed
10/25/2010	10:18:12 PM	Helium valve opened
10/25/2010	10:18:12 PM	Main Vac valve opened
10/25/2010	10:18:12 PM	Bypass valve opened
10/25/2010	10:18:12 PM	Helium MFC set to  100.000000
10/25/2010	10:18:12 PM	H2 MFC set to  0.000000
10/25/2010	10:18:12 PM	BCl3 MFC set to  0.000000
10/25/2010	10:18:12 PM	PHl3 MFC set to  0.000000
10/25/2010	10:18:12 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:18:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:18:12 PM	Tube furnace set to 0
10/25/2010	10:19:12 PM	Helium valve closed
10/25/2010	10:19:12 PM	H2 valve closed
10/25/2010	10:19:12 PM	BCl3 valve closed
10/25/2010	10:19:12 PM	PH3 valve closed
10/25/2010	10:19:12 PM	SiCl4 pre valve closed
10/25/2010	10:19:12 PM	SiCl4 post valve closed
10/25/2010	10:19:12 PM	Bubbler valve closed
10/25/2010	10:19:12 PM	Main Vac valve opened
10/25/2010	10:19:12 PM	Bypass valve opened
10/25/2010	10:19:12 PM	Helium MFC set to  0.000000
10/25/2010	10:19:12 PM	H2 MFC set to  0.000000
10/25/2010	10:19:12 PM	BCl3 MFC set to  0.000000
10/25/2010	10:19:12 PM	PHl3 MFC set to  0.000000
10/25/2010	10:19:12 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:19:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:19:12 PM	Tube furnace set to 0
10/25/2010	10:20:12 PM	H2 valve closed
10/25/2010	10:20:12 PM	BCl3 valve closed
10/25/2010	10:20:12 PM	PH3 valve closed
10/25/2010	10:20:12 PM	SiCl4 pre valve closed
10/25/2010	10:20:12 PM	SiCl4 post valve closed
10/25/2010	10:20:12 PM	Bubbler valve closed
10/25/2010	10:20:12 PM	Helium valve opened
10/25/2010	10:20:12 PM	Main Vac valve opened
10/25/2010	10:20:12 PM	Bypass valve opened
10/25/2010	10:20:12 PM	Helium MFC set to  100.000000
10/25/2010	10:20:12 PM	H2 MFC set to  0.000000
10/25/2010	10:20:12 PM	BCl3 MFC set to  0.000000
10/25/2010	10:20:12 PM	PHl3 MFC set to  0.000000
10/25/2010	10:20:12 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:20:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:20:12 PM	Tube furnace set to 0
10/25/2010	10:21:12 PM	Helium valve closed
10/25/2010	10:21:12 PM	H2 valve closed
10/25/2010	10:21:12 PM	BCl3 valve closed
10/25/2010	10:21:12 PM	PH3 valve closed
10/25/2010	10:21:12 PM	SiCl4 pre valve closed
10/25/2010	10:21:12 PM	SiCl4 post valve closed
10/25/2010	10:21:12 PM	Bubbler valve closed
10/25/2010	10:21:12 PM	Main Vac valve opened
10/25/2010	10:21:12 PM	Bypass valve opened
10/25/2010	10:21:12 PM	Helium MFC set to  0.000000
10/25/2010	10:21:12 PM	H2 MFC set to  0.000000
10/25/2010	10:21:12 PM	BCl3 MFC set to  0.000000
10/25/2010	10:21:12 PM	PHl3 MFC set to  0.000000
10/25/2010	10:21:12 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:21:12 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:21:13 PM	Tube furnace set to 0
10/25/2010	10:22:13 PM	H2 valve closed
10/25/2010	10:22:13 PM	BCl3 valve closed
10/25/2010	10:22:13 PM	PH3 valve closed
10/25/2010	10:22:13 PM	SiCl4 pre valve closed
10/25/2010	10:22:13 PM	SiCl4 post valve closed
10/25/2010	10:22:13 PM	Bubbler valve closed
10/25/2010	10:22:13 PM	Helium valve opened
10/25/2010	10:22:13 PM	Main Vac valve opened
10/25/2010	10:22:13 PM	Bypass valve opened
10/25/2010	10:22:13 PM	Helium MFC set to  100.000000
10/25/2010	10:22:13 PM	H2 MFC set to  0.000000
10/25/2010	10:22:13 PM	BCl3 MFC set to  0.000000
10/25/2010	10:22:13 PM	PHl3 MFC set to  0.000000
10/25/2010	10:22:13 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:22:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:22:13 PM	Tube furnace set to 0
10/25/2010	10:23:13 PM	Helium valve closed
10/25/2010	10:23:13 PM	H2 valve closed
10/25/2010	10:23:13 PM	BCl3 valve closed
10/25/2010	10:23:13 PM	PH3 valve closed
10/25/2010	10:23:13 PM	SiCl4 pre valve closed
10/25/2010	10:23:13 PM	SiCl4 post valve closed
10/25/2010	10:23:13 PM	Bubbler valve closed
10/25/2010	10:23:13 PM	Main Vac valve opened
10/25/2010	10:23:13 PM	Bypass valve opened
10/25/2010	10:23:13 PM	Helium MFC set to  0.000000
10/25/2010	10:23:13 PM	H2 MFC set to  0.000000
10/25/2010	10:23:13 PM	BCl3 MFC set to  0.000000
10/25/2010	10:23:13 PM	PHl3 MFC set to  0.000000
10/25/2010	10:23:13 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:23:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:23:13 PM	Tube furnace set to 0
10/25/2010	10:24:13 PM	H2 valve closed
10/25/2010	10:24:13 PM	BCl3 valve closed
10/25/2010	10:24:13 PM	PH3 valve closed
10/25/2010	10:24:13 PM	SiCl4 pre valve closed
10/25/2010	10:24:13 PM	SiCl4 post valve closed
10/25/2010	10:24:13 PM	Bubbler valve closed
10/25/2010	10:24:13 PM	Helium valve opened
10/25/2010	10:24:13 PM	Main Vac valve opened
10/25/2010	10:24:13 PM	Bypass valve opened
10/25/2010	10:24:13 PM	Helium MFC set to  100.000000
10/25/2010	10:24:13 PM	H2 MFC set to  0.000000
10/25/2010	10:24:13 PM	BCl3 MFC set to  0.000000
10/25/2010	10:24:13 PM	PHl3 MFC set to  0.000000
10/25/2010	10:24:13 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:24:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:24:13 PM	Tube furnace set to 0
10/25/2010	10:25:13 PM	Helium valve closed
10/25/2010	10:25:13 PM	H2 valve closed
10/25/2010	10:25:13 PM	BCl3 valve closed
10/25/2010	10:25:13 PM	PH3 valve closed
10/25/2010	10:25:13 PM	SiCl4 pre valve closed
10/25/2010	10:25:13 PM	SiCl4 post valve closed
10/25/2010	10:25:13 PM	Bubbler valve closed
10/25/2010	10:25:13 PM	Main Vac valve opened
10/25/2010	10:25:13 PM	Bypass valve opened
10/25/2010	10:25:13 PM	Helium MFC set to  0.000000
10/25/2010	10:25:13 PM	H2 MFC set to  0.000000
10/25/2010	10:25:13 PM	BCl3 MFC set to  0.000000
10/25/2010	10:25:13 PM	PHl3 MFC set to  0.000000
10/25/2010	10:25:13 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:25:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:25:13 PM	Tube furnace set to 0
10/25/2010	10:26:13 PM	H2 valve closed
10/25/2010	10:26:13 PM	BCl3 valve closed
10/25/2010	10:26:13 PM	PH3 valve closed
10/25/2010	10:26:13 PM	SiCl4 pre valve closed
10/25/2010	10:26:13 PM	SiCl4 post valve closed
10/25/2010	10:26:13 PM	Bubbler valve closed
10/25/2010	10:26:13 PM	Helium valve opened
10/25/2010	10:26:13 PM	Main Vac valve opened
10/25/2010	10:26:13 PM	Bypass valve opened
10/25/2010	10:26:13 PM	Helium MFC set to  100.000000
10/25/2010	10:26:13 PM	H2 MFC set to  0.000000
10/25/2010	10:26:13 PM	BCl3 MFC set to  0.000000
10/25/2010	10:26:13 PM	PHl3 MFC set to  0.000000
10/25/2010	10:26:13 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:26:13 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:26:14 PM	Tube furnace set to 0
10/25/2010	10:27:14 PM	Helium valve closed
10/25/2010	10:27:14 PM	H2 valve closed
10/25/2010	10:27:14 PM	BCl3 valve closed
10/25/2010	10:27:14 PM	PH3 valve closed
10/25/2010	10:27:14 PM	SiCl4 pre valve closed
10/25/2010	10:27:14 PM	SiCl4 post valve closed
10/25/2010	10:27:14 PM	Bubbler valve closed
10/25/2010	10:27:14 PM	Main Vac valve opened
10/25/2010	10:27:14 PM	Bypass valve opened
10/25/2010	10:27:14 PM	Helium MFC set to  0.000000
10/25/2010	10:27:14 PM	H2 MFC set to  0.000000
10/25/2010	10:27:14 PM	BCl3 MFC set to  0.000000
10/25/2010	10:27:14 PM	PHl3 MFC set to  0.000000
10/25/2010	10:27:14 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:27:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:27:14 PM	Tube furnace set to 0
10/25/2010	10:28:14 PM	H2 valve closed
10/25/2010	10:28:14 PM	BCl3 valve closed
10/25/2010	10:28:14 PM	PH3 valve closed
10/25/2010	10:28:14 PM	SiCl4 pre valve closed
10/25/2010	10:28:14 PM	SiCl4 post valve closed
10/25/2010	10:28:14 PM	Bubbler valve closed
10/25/2010	10:28:14 PM	Helium valve opened
10/25/2010	10:28:14 PM	Main Vac valve opened
10/25/2010	10:28:14 PM	Bypass valve opened
10/25/2010	10:28:14 PM	Helium MFC set to  100.000000
10/25/2010	10:28:14 PM	H2 MFC set to  0.000000
10/25/2010	10:28:14 PM	BCl3 MFC set to  0.000000
10/25/2010	10:28:14 PM	PHl3 MFC set to  0.000000
10/25/2010	10:28:14 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:28:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:28:14 PM	Tube furnace set to 0
10/25/2010	10:29:14 PM	Helium valve closed
10/25/2010	10:29:14 PM	H2 valve closed
10/25/2010	10:29:14 PM	BCl3 valve closed
10/25/2010	10:29:14 PM	PH3 valve closed
10/25/2010	10:29:14 PM	SiCl4 pre valve closed
10/25/2010	10:29:14 PM	SiCl4 post valve closed
10/25/2010	10:29:14 PM	Bubbler valve closed
10/25/2010	10:29:14 PM	Main Vac valve opened
10/25/2010	10:29:14 PM	Bypass valve opened
10/25/2010	10:29:14 PM	Helium MFC set to  0.000000
10/25/2010	10:29:14 PM	H2 MFC set to  0.000000
10/25/2010	10:29:14 PM	BCl3 MFC set to  0.000000
10/25/2010	10:29:14 PM	PHl3 MFC set to  0.000000
10/25/2010	10:29:14 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:29:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:29:14 PM	Tube furnace set to 0
10/25/2010	10:30:14 PM	H2 valve closed
10/25/2010	10:30:14 PM	BCl3 valve closed
10/25/2010	10:30:14 PM	PH3 valve closed
10/25/2010	10:30:14 PM	SiCl4 pre valve closed
10/25/2010	10:30:14 PM	SiCl4 post valve closed
10/25/2010	10:30:14 PM	Bubbler valve closed
10/25/2010	10:30:14 PM	Helium valve opened
10/25/2010	10:30:14 PM	Main Vac valve opened
10/25/2010	10:30:14 PM	Bypass valve opened
10/25/2010	10:30:14 PM	Helium MFC set to  100.000000
10/25/2010	10:30:14 PM	H2 MFC set to  0.000000
10/25/2010	10:30:14 PM	BCl3 MFC set to  0.000000
10/25/2010	10:30:14 PM	PHl3 MFC set to  0.000000
10/25/2010	10:30:14 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:30:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:30:14 PM	Tube furnace set to 0
10/25/2010	10:31:14 PM	Helium valve closed
10/25/2010	10:31:14 PM	H2 valve closed
10/25/2010	10:31:14 PM	BCl3 valve closed
10/25/2010	10:31:14 PM	PH3 valve closed
10/25/2010	10:31:14 PM	SiCl4 pre valve closed
10/25/2010	10:31:14 PM	SiCl4 post valve closed
10/25/2010	10:31:14 PM	Bubbler valve closed
10/25/2010	10:31:14 PM	Main Vac valve opened
10/25/2010	10:31:14 PM	Bypass valve opened
10/25/2010	10:31:14 PM	Helium MFC set to  0.000000
10/25/2010	10:31:14 PM	H2 MFC set to  0.000000
10/25/2010	10:31:14 PM	BCl3 MFC set to  0.000000
10/25/2010	10:31:14 PM	PHl3 MFC set to  0.000000
10/25/2010	10:31:14 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:31:14 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:31:15 PM	Tube furnace set to 0
10/25/2010	10:32:15 PM	H2 valve closed
10/25/2010	10:32:15 PM	BCl3 valve closed
10/25/2010	10:32:15 PM	PH3 valve closed
10/25/2010	10:32:15 PM	SiCl4 pre valve closed
10/25/2010	10:32:15 PM	SiCl4 post valve closed
10/25/2010	10:32:15 PM	Bubbler valve closed
10/25/2010	10:32:15 PM	Helium valve opened
10/25/2010	10:32:15 PM	Main Vac valve opened
10/25/2010	10:32:15 PM	Bypass valve opened
10/25/2010	10:32:15 PM	Helium MFC set to  100.000000
10/25/2010	10:32:15 PM	H2 MFC set to  0.000000
10/25/2010	10:32:15 PM	BCl3 MFC set to  0.000000
10/25/2010	10:32:15 PM	PHl3 MFC set to  0.000000
10/25/2010	10:32:15 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:32:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:32:15 PM	Tube furnace set to 0
10/25/2010	10:33:15 PM	Helium valve closed
10/25/2010	10:33:15 PM	H2 valve closed
10/25/2010	10:33:15 PM	BCl3 valve closed
10/25/2010	10:33:15 PM	PH3 valve closed
10/25/2010	10:33:15 PM	SiCl4 pre valve closed
10/25/2010	10:33:15 PM	SiCl4 post valve closed
10/25/2010	10:33:15 PM	Bubbler valve closed
10/25/2010	10:33:15 PM	Main Vac valve opened
10/25/2010	10:33:15 PM	Bypass valve opened
10/25/2010	10:33:15 PM	Helium MFC set to  0.000000
10/25/2010	10:33:15 PM	H2 MFC set to  0.000000
10/25/2010	10:33:15 PM	BCl3 MFC set to  0.000000
10/25/2010	10:33:15 PM	PHl3 MFC set to  0.000000
10/25/2010	10:33:15 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:33:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:33:15 PM	Tube furnace set to 0
10/25/2010	10:34:15 PM	H2 valve closed
10/25/2010	10:34:15 PM	BCl3 valve closed
10/25/2010	10:34:15 PM	PH3 valve closed
10/25/2010	10:34:15 PM	SiCl4 pre valve closed
10/25/2010	10:34:15 PM	SiCl4 post valve closed
10/25/2010	10:34:15 PM	Bubbler valve closed
10/25/2010	10:34:15 PM	Helium valve opened
10/25/2010	10:34:15 PM	Main Vac valve opened
10/25/2010	10:34:15 PM	Bypass valve opened
10/25/2010	10:34:15 PM	Helium MFC set to  100.000000
10/25/2010	10:34:15 PM	H2 MFC set to  0.000000
10/25/2010	10:34:15 PM	BCl3 MFC set to  0.000000
10/25/2010	10:34:15 PM	PHl3 MFC set to  0.000000
10/25/2010	10:34:15 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:34:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:34:15 PM	Tube furnace set to 0
10/25/2010	10:35:15 PM	Helium valve closed
10/25/2010	10:35:15 PM	H2 valve closed
10/25/2010	10:35:15 PM	BCl3 valve closed
10/25/2010	10:35:15 PM	PH3 valve closed
10/25/2010	10:35:15 PM	SiCl4 pre valve closed
10/25/2010	10:35:15 PM	SiCl4 post valve closed
10/25/2010	10:35:15 PM	Bubbler valve closed
10/25/2010	10:35:15 PM	Main Vac valve opened
10/25/2010	10:35:15 PM	Bypass valve opened
10/25/2010	10:35:15 PM	Helium MFC set to  0.000000
10/25/2010	10:35:15 PM	H2 MFC set to  0.000000
10/25/2010	10:35:15 PM	BCl3 MFC set to  0.000000
10/25/2010	10:35:15 PM	PHl3 MFC set to  0.000000
10/25/2010	10:35:15 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:35:15 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:35:15 PM	Tube furnace set to 0
10/25/2010	10:35:16 PM	Run finished at 10:35 PM
10/25/2010	10:35:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	10:40:29 PM	Recipe started at 10:40 PM
10/25/2010	10:40:29 PM	Helium valve closed
10/25/2010	10:40:29 PM	BCl3 valve closed
10/25/2010	10:40:29 PM	PH3 valve closed
10/25/2010	10:40:29 PM	SiCl4 pre valve closed
10/25/2010	10:40:29 PM	SiCl4 post valve closed
10/25/2010	10:40:29 PM	Main Vac valve closed
10/25/2010	10:40:29 PM	Bypass valve closed
10/25/2010	10:40:29 PM	Bubbler valve closed
10/25/2010	10:40:29 PM	H2 valve opened
10/25/2010	10:40:29 PM	Helium MFC set to  0.000000
10/25/2010	10:40:29 PM	H2 MFC set to  500.000000
10/25/2010	10:40:29 PM	BCl3 MFC set to  0.000000
10/25/2010	10:40:29 PM	PHl3 MFC set to  0.000000
10/25/2010	10:40:29 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:40:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:40:29 PM	Tube furnace set to 0
10/25/2010	10:41:46 PM	Helium valve closed
10/25/2010	10:41:46 PM	BCl3 valve closed
10/25/2010	10:41:46 PM	PH3 valve closed
10/25/2010	10:41:46 PM	SiCl4 pre valve closed
10/25/2010	10:41:46 PM	SiCl4 post valve closed
10/25/2010	10:41:46 PM	Main Vac valve closed
10/25/2010	10:41:46 PM	Bypass valve closed
10/25/2010	10:41:46 PM	H2 valve opened
10/25/2010	10:41:46 PM	Bubbler valve opened
10/25/2010	10:41:46 PM	Helium MFC set to  0.000000
10/25/2010	10:41:46 PM	H2 MFC set to  500.000000
10/25/2010	10:41:46 PM	BCl3 MFC set to  0.000000
10/25/2010	10:41:46 PM	PHl3 MFC set to  0.000000
10/25/2010	10:41:46 PM	SiCl4 MFC set to  0.000000
10/25/2010	10:41:46 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	10:41:46 PM	Tube furnace set to 1000
10/25/2010	11:01:46 PM	Helium valve closed
10/25/2010	11:01:46 PM	BCl3 valve closed
10/25/2010	11:01:46 PM	Main Vac valve closed
10/25/2010	11:01:46 PM	Bypass valve closed
10/25/2010	11:01:46 PM	H2 valve opened
10/25/2010	11:01:46 PM	PH3 valve opened
10/25/2010	11:01:46 PM	SiCl4 pre valve opened
10/25/2010	11:01:46 PM	SiCl4 post valve opened
10/25/2010	11:01:46 PM	Bubbler valve opened
10/25/2010	11:01:46 PM	Helium MFC set to  0.000000
10/25/2010	11:01:46 PM	H2 MFC set to  500.000000
10/25/2010	11:01:46 PM	BCl3 MFC set to  0.000000
10/25/2010	11:01:46 PM	PHl3 MFC set to  1.000000
10/25/2010	11:01:46 PM	SiCl4 MFC set to  50.000000
10/25/2010	11:01:46 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:01:47 PM	Tube furnace set to 1000
10/25/2010	11:21:47 PM	H2 valve closed
10/25/2010	11:21:47 PM	BCl3 valve closed
10/25/2010	11:21:47 PM	PH3 valve closed
10/25/2010	11:21:47 PM	SiCl4 pre valve closed
10/25/2010	11:21:47 PM	SiCl4 post valve closed
10/25/2010	11:21:47 PM	Main Vac valve closed
10/25/2010	11:21:47 PM	Bypass valve closed
10/25/2010	11:21:47 PM	Helium valve opened
10/25/2010	11:21:47 PM	Bubbler valve opened
10/25/2010	11:21:47 PM	Helium MFC set to  500.000000
10/25/2010	11:21:47 PM	H2 MFC set to  0.000000
10/25/2010	11:21:47 PM	BCl3 MFC set to  0.000000
10/25/2010	11:21:47 PM	PHl3 MFC set to  0.000000
10/25/2010	11:21:47 PM	SiCl4 MFC set to  0.000000
10/25/2010	11:21:47 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:21:47 PM	Tube furnace set to 0
10/25/2010	11:41:47 PM	Helium valve closed
10/25/2010	11:41:47 PM	H2 valve closed
10/25/2010	11:41:47 PM	BCl3 valve closed
10/25/2010	11:41:47 PM	PH3 valve closed
10/25/2010	11:41:47 PM	SiCl4 pre valve closed
10/25/2010	11:41:47 PM	SiCl4 post valve closed
10/25/2010	11:41:47 PM	Main Vac valve closed
10/25/2010	11:41:47 PM	Bypass valve closed
10/25/2010	11:41:47 PM	Bubbler valve closed
10/25/2010	11:41:47 PM	Helium MFC set to  0.000000
10/25/2010	11:41:47 PM	H2 MFC set to  0.000000
10/25/2010	11:41:47 PM	BCl3 MFC set to  0.000000
10/25/2010	11:41:47 PM	PHl3 MFC set to  0.000000
10/25/2010	11:41:47 PM	SiCl4 MFC set to  0.000000
10/25/2010	11:41:47 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:41:47 PM	Tube furnace set to 0
10/25/2010	11:41:47 PM	Run finished at 11:41 PM
10/25/2010	11:49:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	11:49:33 PM	Recipe started at 11:49 PM
10/25/2010	11:49:33 PM	H2 valve closed
10/25/2010	11:49:33 PM	BCl3 valve closed
10/25/2010	11:49:33 PM	PH3 valve closed
10/25/2010	11:49:33 PM	SiCl4 pre valve closed
10/25/2010	11:49:33 PM	SiCl4 post valve closed
10/25/2010	11:49:33 PM	Main Vac valve closed
10/25/2010	11:49:33 PM	Bypass valve closed
10/25/2010	11:49:33 PM	Bubbler valve closed
10/25/2010	11:49:33 PM	Helium valve opened
10/25/2010	11:49:33 PM	Helium MFC set to  500.000000
10/25/2010	11:49:33 PM	H2 MFC set to  0.000000
10/25/2010	11:49:33 PM	BCl3 MFC set to  0.000000
10/25/2010	11:49:33 PM	PHl3 MFC set to  0.000000
10/25/2010	11:49:33 PM	SiCl4 MFC set to  0.000000
10/25/2010	11:49:33 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:49:33 PM	Tube furnace set to 0
10/25/2010	11:49:38 PM	Helium valve closed
10/25/2010	11:49:38 PM	H2 valve closed
10/25/2010	11:49:38 PM	BCl3 valve closed
10/25/2010	11:49:38 PM	PH3 valve closed
10/25/2010	11:49:38 PM	SiCl4 pre valve closed
10/25/2010	11:49:38 PM	SiCl4 post valve closed
10/25/2010	11:49:38 PM	Main Vac valve closed
10/25/2010	11:49:38 PM	Bypass valve closed
10/25/2010	11:49:38 PM	Bubbler valve closed
10/25/2010	11:49:38 PM	Helium MFC set to  0.000000
10/25/2010	11:49:38 PM	H2 MFC set to  0.000000
10/25/2010	11:49:38 PM	BCl3 MFC set to  0.000000
10/25/2010	11:49:38 PM	PHl3 MFC set to  0.000000
10/25/2010	11:49:38 PM	SiCl4 MFC set to  0.000000
10/25/2010	11:49:38 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:49:38 PM	Tube furnace set to 0
10/25/2010	11:49:38 PM	Run finished at 11:49 PM
10/25/2010	11:49:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2010	11:54:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	11:54:05 PM	Recipe started at 11:54 PM
10/25/2010	11:54:05 PM	Helium valve closed
10/25/2010	11:54:05 PM	H2 valve closed
10/25/2010	11:54:05 PM	BCl3 valve closed
10/25/2010	11:54:05 PM	PH3 valve closed
10/25/2010	11:54:05 PM	SiCl4 pre valve closed
10/25/2010	11:54:05 PM	SiCl4 post valve closed
10/25/2010	11:54:05 PM	Main Vac valve closed
10/25/2010	11:54:05 PM	Bubbler valve closed
10/25/2010	11:54:05 PM	Bypass valve opened
10/25/2010	11:54:05 PM	Helium MFC set to  0.000000
10/25/2010	11:54:05 PM	H2 MFC set to  0.000000
10/25/2010	11:54:05 PM	BCl3 MFC set to  0.000000
10/25/2010	11:54:05 PM	PHl3 MFC set to  0.000000
10/25/2010	11:54:05 PM	SiCl4 MFC set to  0.000000
10/25/2010	11:54:05 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:54:05 PM	Tube furnace set to 0
10/25/2010	11:54:56 PM	Helium valve closed
10/25/2010	11:54:56 PM	H2 valve closed
10/25/2010	11:54:56 PM	BCl3 valve closed
10/25/2010	11:54:56 PM	PH3 valve closed
10/25/2010	11:54:56 PM	SiCl4 pre valve closed
10/25/2010	11:54:56 PM	SiCl4 post valve closed
10/25/2010	11:54:56 PM	Bubbler valve closed
10/25/2010	11:54:56 PM	Main Vac valve opened
10/25/2010	11:54:56 PM	Bypass valve opened
10/25/2010	11:54:56 PM	Helium MFC set to  0.000000
10/25/2010	11:54:56 PM	H2 MFC set to  0.000000
10/25/2010	11:54:56 PM	BCl3 MFC set to  0.000000
10/25/2010	11:54:56 PM	PHl3 MFC set to  0.000000
10/25/2010	11:54:56 PM	SiCl4 MFC set to  0.000000
10/25/2010	11:54:56 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:54:56 PM	Tube furnace set to 0
10/25/2010	11:54:56 PM	Run finished at 11:54 PM
10/25/2010	11:54:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2010	11:56:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/25/2010	11:56:31 PM	Recipe started at 11:56 PM
10/25/2010	11:56:31 PM	Helium valve closed
10/25/2010	11:56:31 PM	H2 valve closed
10/25/2010	11:56:31 PM	BCl3 valve closed
10/25/2010	11:56:31 PM	PH3 valve closed
10/25/2010	11:56:31 PM	SiCl4 pre valve closed
10/25/2010	11:56:31 PM	SiCl4 post valve closed
10/25/2010	11:56:31 PM	Main Vac valve closed
10/25/2010	11:56:31 PM	Bubbler valve closed
10/25/2010	11:56:31 PM	Bypass valve opened
10/25/2010	11:56:31 PM	Helium MFC set to  0.000000
10/25/2010	11:56:31 PM	H2 MFC set to  0.000000
10/25/2010	11:56:31 PM	BCl3 MFC set to  0.000000
10/25/2010	11:56:31 PM	PHl3 MFC set to  0.000000
10/25/2010	11:56:31 PM	SiCl4 MFC set to  0.000000
10/25/2010	11:56:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:56:31 PM	Tube furnace set to 0
10/25/2010	11:56:31 PM	Helium valve closed
10/25/2010	11:56:31 PM	H2 valve closed
10/25/2010	11:56:31 PM	BCl3 valve closed
10/25/2010	11:56:31 PM	PH3 valve closed
10/25/2010	11:56:31 PM	SiCl4 pre valve closed
10/25/2010	11:56:31 PM	SiCl4 post valve closed
10/25/2010	11:56:31 PM	Bubbler valve closed
10/25/2010	11:56:31 PM	Main Vac valve opened
10/25/2010	11:56:31 PM	Bypass valve opened
10/25/2010	11:56:31 PM	Helium MFC set to  0.000000
10/25/2010	11:56:31 PM	H2 MFC set to  0.000000
10/25/2010	11:56:31 PM	BCl3 MFC set to  0.000000
10/25/2010	11:56:31 PM	PHl3 MFC set to  0.000000
10/25/2010	11:56:31 PM	SiCl4 MFC set to  0.000000
10/25/2010	11:56:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:56:32 PM	Tube furnace set to 0
10/25/2010	11:57:32 PM	H2 valve closed
10/25/2010	11:57:32 PM	BCl3 valve closed
10/25/2010	11:57:32 PM	PH3 valve closed
10/25/2010	11:57:32 PM	SiCl4 pre valve closed
10/25/2010	11:57:32 PM	SiCl4 post valve closed
10/25/2010	11:57:32 PM	Bubbler valve closed
10/25/2010	11:57:32 PM	Helium valve opened
10/25/2010	11:57:32 PM	Main Vac valve opened
10/25/2010	11:57:32 PM	Bypass valve opened
10/25/2010	11:57:32 PM	Helium MFC set to  100.000000
10/25/2010	11:57:32 PM	H2 MFC set to  0.000000
10/25/2010	11:57:32 PM	BCl3 MFC set to  0.000000
10/25/2010	11:57:32 PM	PHl3 MFC set to  0.000000
10/25/2010	11:57:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	11:57:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:57:32 PM	Tube furnace set to 0
10/25/2010	11:58:32 PM	Helium valve closed
10/25/2010	11:58:32 PM	H2 valve closed
10/25/2010	11:58:32 PM	BCl3 valve closed
10/25/2010	11:58:32 PM	PH3 valve closed
10/25/2010	11:58:32 PM	SiCl4 pre valve closed
10/25/2010	11:58:32 PM	SiCl4 post valve closed
10/25/2010	11:58:32 PM	Bubbler valve closed
10/25/2010	11:58:32 PM	Main Vac valve opened
10/25/2010	11:58:32 PM	Bypass valve opened
10/25/2010	11:58:32 PM	Helium MFC set to  0.000000
10/25/2010	11:58:32 PM	H2 MFC set to  0.000000
10/25/2010	11:58:32 PM	BCl3 MFC set to  0.000000
10/25/2010	11:58:32 PM	PHl3 MFC set to  0.000000
10/25/2010	11:58:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	11:58:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:58:32 PM	Tube furnace set to 0
10/25/2010	11:59:32 PM	H2 valve closed
10/25/2010	11:59:32 PM	BCl3 valve closed
10/25/2010	11:59:32 PM	PH3 valve closed
10/25/2010	11:59:32 PM	SiCl4 pre valve closed
10/25/2010	11:59:32 PM	SiCl4 post valve closed
10/25/2010	11:59:32 PM	Bubbler valve closed
10/25/2010	11:59:32 PM	Helium valve opened
10/25/2010	11:59:32 PM	Main Vac valve opened
10/25/2010	11:59:32 PM	Bypass valve opened
10/25/2010	11:59:32 PM	Helium MFC set to  100.000000
10/25/2010	11:59:32 PM	H2 MFC set to  0.000000
10/25/2010	11:59:32 PM	BCl3 MFC set to  0.000000
10/25/2010	11:59:32 PM	PHl3 MFC set to  0.000000
10/25/2010	11:59:32 PM	SiCl4 MFC set to  0.000000
10/25/2010	11:59:32 PM	Bypass solenoid MFC set to  0.000000
10/25/2010	11:59:32 PM	Tube furnace set to 0
